AU2002314897A1 - Method of and apparatus for substrate pre-treatment - Google Patents

Method of and apparatus for substrate pre-treatment

Info

Publication number
AU2002314897A1
AU2002314897A1 AU2002314897A AU2002314897A AU2002314897A1 AU 2002314897 A1 AU2002314897 A1 AU 2002314897A1 AU 2002314897 A AU2002314897 A AU 2002314897A AU 2002314897 A AU2002314897 A AU 2002314897A AU 2002314897 A1 AU2002314897 A1 AU 2002314897A1
Authority
AU
Australia
Prior art keywords
treatment
substrate pre
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002314897A
Inventor
Sean Barstow
Michael A. Fury
Clifford Henderson
Ross H. Hill
Wai M. Lee
David J. Maloney
Paul J. Roman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EKC Technology Inc
Georgia Tech Research Corp
Original Assignee
EKC Technology Inc
Georgia Tech Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EKC Technology Inc, Georgia Tech Research Corp filed Critical EKC Technology Inc
Publication of AU2002314897A1 publication Critical patent/AU2002314897A1/en
Abandoned legal-status Critical Current

Links

AU2002314897A 2001-06-06 2002-06-04 Method of and apparatus for substrate pre-treatment Abandoned AU2002314897A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/874,330 2001-06-06

Publications (1)

Publication Number Publication Date
AU2002314897A1 true AU2002314897A1 (en) 2002-12-16

Family

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