AU2002306330A1 - Scanning exposure method and scanning exposure system, and device production method - Google Patents

Scanning exposure method and scanning exposure system, and device production method

Info

Publication number
AU2002306330A1
AU2002306330A1 AU2002306330A AU2002306330A AU2002306330A1 AU 2002306330 A1 AU2002306330 A1 AU 2002306330A1 AU 2002306330 A AU2002306330 A AU 2002306330A AU 2002306330 A AU2002306330 A AU 2002306330A AU 2002306330 A1 AU2002306330 A1 AU 2002306330A1
Authority
AU
Australia
Prior art keywords
scanning exposure
device production
production method
exposure system
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002306330A
Inventor
Shigeru Hagiwara
Shinichi Kurita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU2002306330A1 publication Critical patent/AU2002306330A1/en
Abandoned legal-status Critical Current

Links

AU2002306330A 2001-06-13 2002-06-13 Scanning exposure method and scanning exposure system, and device production method Abandoned AU2002306330A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001-177878 2001-06-13

Publications (1)

Publication Number Publication Date
AU2002306330A1 true AU2002306330A1 (en) 2003-01-02

Family

ID=

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