AU2002239471A1 - An apparatus and method of doping silica with fluorine during laydown - Google Patents

An apparatus and method of doping silica with fluorine during laydown

Info

Publication number
AU2002239471A1
AU2002239471A1 AU2002239471A AU3947102A AU2002239471A1 AU 2002239471 A1 AU2002239471 A1 AU 2002239471A1 AU 2002239471 A AU2002239471 A AU 2002239471A AU 3947102 A AU3947102 A AU 3947102A AU 2002239471 A1 AU2002239471 A1 AU 2002239471A1
Authority
AU
Australia
Prior art keywords
doping silica
fluorine during
during laydown
laydown
fluorine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002239471A
Inventor
Michael J. Lehman
V. Srikant
Jeffery S. Stone
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of AU2002239471A1 publication Critical patent/AU2002239471A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
    • C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/06—Concentric circular ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/12—Nozzle or orifice plates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/14—Tapered or flared nozzles or ports angled to central burner axis
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/34—Liquid, e.g. mist or aerosol
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/46—Comprising performance enhancing means, e.g. electrostatic charge or built-in heater

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Silicon Compounds (AREA)
AU2002239471A 2000-12-15 2001-10-31 An apparatus and method of doping silica with fluorine during laydown Abandoned AU2002239471A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US25576000P 2000-12-15 2000-12-15
US60255760 2000-12-15
PCT/US2001/046026 WO2002048061A1 (en) 2000-12-15 2001-10-31 An apparatus and method of doping silica with fluorine during laydown

Publications (1)

Publication Number Publication Date
AU2002239471A1 true AU2002239471A1 (en) 2002-06-24

Family

ID=22969733

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002239471A Abandoned AU2002239471A1 (en) 2000-12-15 2001-10-31 An apparatus and method of doping silica with fluorine during laydown

Country Status (5)

Country Link
US (1) US6748768B2 (en)
KR (1) KR20030069187A (en)
AU (1) AU2002239471A1 (en)
BR (1) BR0116142A (en)
WO (1) WO2002048061A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002338258A (en) * 2001-03-06 2002-11-27 Sumitomo Electric Ind Ltd Method and apparatus for manufacturing glass particulate deposit
US20050120752A1 (en) * 2001-04-11 2005-06-09 Brown John T. Substantially dry, silica-containing soot, fused silica and optical fiber soot preforms, apparatus, methods and burners for manufacturing same
US6910352B2 (en) * 2002-04-24 2005-06-28 Corning Incorporated Deposition of high fluorine content silica soot
US20220098084A1 (en) * 2020-05-20 2022-03-31 Corning Incorporated Methods for increasing deposition in a flame hydrolysis deposition process

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2432478B1 (en) 1978-07-31 1982-03-12 Quartz & Silice
US4402720A (en) 1980-01-22 1983-09-06 Nippon Telegraph & Telephone Public Corporation Process for preparing glass preform for optical fiber
JPS59232934A (en) 1983-06-17 1984-12-27 Sumitomo Electric Ind Ltd Production of base material for optical fiber
US4629485A (en) 1983-09-26 1986-12-16 Corning Glass Works Method of making fluorine doped optical preform and fiber and resultant articles
JPH0753591B2 (en) 1985-08-14 1995-06-07 住友電気工業株式会社 Method for manufacturing base material for optical fiber
FR2647778B1 (en) 1989-06-05 1992-11-20 Comp Generale Electricite METHOD AND DEVICE FOR EXTERNAL DEPOSITION BY HYDROXYLIC ION-FREE SILICA PLASMA
JPH06122527A (en) * 1992-10-09 1994-05-06 Sumitomo Electric Ind Ltd Production of optical fiber preform
US5599371A (en) 1994-12-30 1997-02-04 Corning Incorporated Method of using precision burners for oxidizing halide-free, silicon-containing compounds
TW371650B (en) 1995-12-04 1999-10-11 Sumitomo Electric Industries Method for producing an optical fiber quartz glass preform
EP0835848A3 (en) 1996-08-21 1998-06-10 Nikon Corporation Fluorine-containing silica glass, its method of manufacture and a projection exposure apparatus comprising the glass
US6291377B1 (en) 1997-08-21 2001-09-18 Nikon Corporation Silica glass and its manufacturing method
US20020005051A1 (en) 2000-04-28 2002-01-17 Brown John T. Substantially dry, silica-containing soot, fused silica and optical fiber soot preforms, apparatus, methods and burners for manufacturing same

Also Published As

Publication number Publication date
US6748768B2 (en) 2004-06-15
WO2002048061A1 (en) 2002-06-20
BR0116142A (en) 2003-10-28
KR20030069187A (en) 2003-08-25
US20020073734A1 (en) 2002-06-20

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