AU2002236525A1 - Volatile organometallic complexes of lowered reactivity suitable for use in chemical vapor deposition of metal oxide films - Google Patents
Volatile organometallic complexes of lowered reactivity suitable for use in chemical vapor deposition of metal oxide filmsInfo
- Publication number
- AU2002236525A1 AU2002236525A1 AU2002236525A AU3652502A AU2002236525A1 AU 2002236525 A1 AU2002236525 A1 AU 2002236525A1 AU 2002236525 A AU2002236525 A AU 2002236525A AU 3652502 A AU3652502 A AU 3652502A AU 2002236525 A1 AU2002236525 A1 AU 2002236525A1
- Authority
- AU
- Australia
- Prior art keywords
- metal oxide
- vapor deposition
- chemical vapor
- oxide films
- organometallic complexes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
- C03C17/2456—Coating containing TiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
- C03C17/2453—Coating containing SnO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/211—SnO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/212—TiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/216—ZnO
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/732,233 US6416814B1 (en) | 2000-12-07 | 2000-12-07 | Volatile organometallic complexes of lowered reactivity suitable for use in chemical vapor deposition of metal oxide films |
US09/732,233 | 2000-12-07 | ||
PCT/US2001/044903 WO2002046242A2 (fr) | 2000-12-07 | 2001-11-30 | Complexes organometalliques volatiles a reactivite reduite pour depot en phase vapeur de films d'oxyde metallique |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002236525A1 true AU2002236525A1 (en) | 2002-06-18 |
Family
ID=24942712
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002236525A Abandoned AU2002236525A1 (en) | 2000-12-07 | 2001-11-30 | Volatile organometallic complexes of lowered reactivity suitable for use in chemical vapor deposition of metal oxide films |
Country Status (7)
Country | Link |
---|---|
US (2) | US6416814B1 (fr) |
EP (1) | EP1356132B1 (fr) |
AU (1) | AU2002236525A1 (fr) |
DE (1) | DE60143816D1 (fr) |
ES (1) | ES2360199T3 (fr) |
TW (1) | TW541352B (fr) |
WO (1) | WO2002046242A2 (fr) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AUPQ800200A0 (en) * | 2000-06-06 | 2000-06-29 | Unisearch Limited | A method of growing a zno film |
US7419698B2 (en) * | 2001-10-26 | 2008-09-02 | Sigma-Aldrich Co. | Precursors for chemical vapor deposition |
US7267842B2 (en) * | 2004-03-15 | 2007-09-11 | Air Products And Chemicals, Inc. | Method for removing titanium dioxide deposits from a reactor |
GB0518383D0 (en) * | 2005-09-09 | 2005-10-19 | Pilkington Plc | Deposition process |
GB2432363B (en) * | 2005-11-16 | 2010-06-23 | Epichem Ltd | Hafnocene and zirconocene precursors, and use thereof in atomic layer deposition |
WO2007130447A2 (fr) * | 2006-05-05 | 2007-11-15 | Pilkington Group Limited | Procédé de dépôt de revêtements d'oxyde de zinc sur du verre plat |
US8158262B2 (en) * | 2006-06-05 | 2012-04-17 | Pilkington Group Limited | Glass article having a zinc oxide coating and method for making same |
WO2008027085A1 (fr) * | 2006-08-29 | 2008-03-06 | Pilkington Group Limited | Méthode de fabrication de revêtements d'oxyde de zinc dopé de faible résistivité et articles réalisés selon la méthode |
JP5406717B2 (ja) * | 2006-09-08 | 2014-02-05 | ピルキントン グループ リミテッド | 酸化亜鉛被覆物品を製造するための低温法 |
CN100492125C (zh) * | 2006-11-17 | 2009-05-27 | 群康科技(深圳)有限公司 | 液晶显示装置 |
US20100304512A1 (en) * | 2007-11-30 | 2010-12-02 | University Of Toledo | System for Diagnosis and Treatment of Photovoltaic and Other Semiconductor Devices |
WO2009120974A2 (fr) * | 2008-03-28 | 2009-10-01 | University Of Toledo | Système destiné à remplir de manière sélective des trous d'aiguille, des shunts faibles et/ou des chemins de découpe dans des dispositifs photovoltaïques et cellules photovoltaïques réalisées ainsi |
US8418418B2 (en) | 2009-04-29 | 2013-04-16 | 3Form, Inc. | Architectural panels with organic photovoltaic interlayers and methods of forming the same |
TR201903701T4 (tr) | 2011-03-23 | 2019-04-22 | Pilkington Group Ltd | İnce film kaplamaların çöktürülmesi için düzenek ve bu düzeneğin kullanılması için çöktürme usulü. |
JP2014513209A (ja) * | 2011-03-23 | 2014-05-29 | ピルキントン グループ リミテッド | 化学気相蒸着法による酸化亜鉛被膜を堆積させる方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1187783A (en) | 1966-03-31 | 1970-04-15 | United Glass Ltd | Strengthening Glassware |
GB1187784A (en) | 1966-03-31 | 1970-04-15 | United Glass Ltd | Strengthening Glassware |
JPH0682625B2 (ja) | 1985-06-04 | 1994-10-19 | シーメンス ソーラー インダストリーズ,エル.ピー. | 酸化亜鉛膜の蒸着方法 |
GB9616983D0 (en) | 1996-08-13 | 1996-09-25 | Pilkington Plc | Method for depositing tin oxide and titanium oxide coatings on flat glass and the resulting coated glass |
-
2000
- 2000-12-07 US US09/732,233 patent/US6416814B1/en not_active Expired - Lifetime
-
2001
- 2001-11-30 EP EP01986057A patent/EP1356132B1/fr not_active Expired - Lifetime
- 2001-11-30 AU AU2002236525A patent/AU2002236525A1/en not_active Abandoned
- 2001-11-30 DE DE60143816T patent/DE60143816D1/de not_active Expired - Lifetime
- 2001-11-30 ES ES01986057T patent/ES2360199T3/es not_active Expired - Lifetime
- 2001-11-30 WO PCT/US2001/044903 patent/WO2002046242A2/fr not_active Application Discontinuation
- 2001-12-06 TW TW090130220A patent/TW541352B/zh not_active IP Right Cessation
-
2002
- 2002-05-21 US US10/150,561 patent/US6627765B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20020136832A1 (en) | 2002-09-26 |
US6416814B1 (en) | 2002-07-09 |
EP1356132B1 (fr) | 2011-01-05 |
TW541352B (en) | 2003-07-11 |
DE60143816D1 (de) | 2011-02-17 |
US6627765B2 (en) | 2003-09-30 |
WO2002046242A3 (fr) | 2002-09-19 |
WO2002046242A2 (fr) | 2002-06-13 |
ES2360199T3 (es) | 2011-06-01 |
US20020071912A1 (en) | 2002-06-13 |
EP1356132A2 (fr) | 2003-10-29 |
EP1356132A4 (fr) | 2008-11-19 |
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