AU2002226694A1 - Plasma processing device and plasma processing method - Google Patents

Plasma processing device and plasma processing method

Info

Publication number
AU2002226694A1
AU2002226694A1 AU2002226694A AU2002226694A AU2002226694A1 AU 2002226694 A1 AU2002226694 A1 AU 2002226694A1 AU 2002226694 A AU2002226694 A AU 2002226694A AU 2002226694 A AU2002226694 A AU 2002226694A AU 2002226694 A1 AU2002226694 A1 AU 2002226694A1
Authority
AU
Australia
Prior art keywords
plasma processing
processing device
processing method
plasma
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002226694A
Inventor
Syoichi Abe
Takashi Akahori
Shigeo Ashigaki
Gishi Chung
Yoichi Inoue
Shuuichi Ishizuka
Kohei Kawamura
Hidenori Miyoshi
Yasuhiro Oshima
Takashi Suzuki
Koichi Takatsuki
Hiroyuki Tkahashi
Hikaru Yoshitaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002226694A1 publication Critical patent/AU2002226694A1/en
Abandoned legal-status Critical Current

Links

AU2002226694A 2001-01-22 2002-01-22 Plasma processing device and plasma processing method Abandoned AU2002226694A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-13574 2001-01-22
JP2001-13572 2001-01-22
JP2001-239720 2001-08-07

Publications (1)

Publication Number Publication Date
AU2002226694A1 true AU2002226694A1 (en) 2002-07-30

Family

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