Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002226694A
Inventor
Syoichi Abe
Takashi Akahori
Shigeo Ashigaki
Gishi Chung
Yoichi Inoue
Shuuichi Ishizuka
Kohei Kawamura
Hidenori Miyoshi
Yasuhiro Oshima
Takashi Suzuki
Koichi Takatsuki
Hiroyuki Tkahashi
Hikaru Yoshitaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron LtdfiledCriticalTokyo Electron Ltd
Publication of AU2002226694A1publicationCriticalpatent/AU2002226694A1/en