AU2002224907A1 - Uv solid state laser - Google Patents

Uv solid state laser

Info

Publication number
AU2002224907A1
AU2002224907A1 AU2002224907A AU2490702A AU2002224907A1 AU 2002224907 A1 AU2002224907 A1 AU 2002224907A1 AU 2002224907 A AU2002224907 A AU 2002224907A AU 2490702 A AU2490702 A AU 2490702A AU 2002224907 A1 AU2002224907 A1 AU 2002224907A1
Authority
AU
Australia
Prior art keywords
solid state
state laser
laser
solid
state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002224907A
Other languages
English (en)
Inventor
Manfred Salzmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NLG-NEW LASER GENERETION GmbH
Original Assignee
NLG NEW LASER GENERETION GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10118793A external-priority patent/DE10118793B4/de
Application filed by NLG NEW LASER GENERETION GmbH filed Critical NLG NEW LASER GENERETION GmbH
Publication of AU2002224907A1 publication Critical patent/AU2002224907A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/37—Non-linear optics for second-harmonic generation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
AU2002224907A 2000-12-01 2001-11-30 Uv solid state laser Abandoned AU2002224907A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE10061231.8 2000-12-01
DE10061231 2000-12-01
DE10118793A DE10118793B4 (de) 2000-12-01 2001-04-05 UV-Festkörperlaser
DE10118793.9 2001-04-05
PCT/EP2001/013981 WO2002044807A2 (de) 2000-12-01 2001-11-30 Uv-festkörperlaser

Publications (1)

Publication Number Publication Date
AU2002224907A1 true AU2002224907A1 (en) 2002-06-11

Family

ID=26007917

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002224907A Abandoned AU2002224907A1 (en) 2000-12-01 2001-11-30 Uv solid state laser

Country Status (2)

Country Link
AU (1) AU2002224907A1 (de)
WO (1) WO2002044807A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10339210B4 (de) * 2003-01-23 2011-12-29 Crylas Crystal Laser Systems Gmbh Laserresonator und Frequenzkonvertierter Laser
US9509112B2 (en) 2013-06-11 2016-11-29 Kla-Tencor Corporation CW DUV laser with improved stability
US9293882B2 (en) 2013-09-10 2016-03-22 Kla-Tencor Corporation Low noise, high stability, deep ultra-violet, continuous wave laser
US10175555B2 (en) 2017-01-03 2019-01-08 KLA—Tencor Corporation 183 nm CW laser and inspection system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03248588A (ja) * 1990-02-27 1991-11-06 Ushio Inc Ｙａｇレーザの第４高調波の発生装置
IT1241503B (it) * 1990-07-25 1994-01-17 Ist Nazionale Fisica Nucleare Metodo ed apparato per fornire luce laser nel campo dell'ultravioletto con alta potenza media ed alta frequenza di ripetizione.
DE4228862A1 (de) * 1992-08-29 1994-03-03 Zeiss Carl Fa Laseranordnung zur Erzeugung von UV-Strahlung
JPH06265955A (ja) * 1993-03-15 1994-09-22 Mitsui Petrochem Ind Ltd 波長変換素子
US6005878A (en) * 1997-02-19 1999-12-21 Academia Sinica Efficient frequency conversion apparatus for use with multimode solid-state lasers

Also Published As

Publication number Publication date
WO2002044807A3 (de) 2002-11-28
WO2002044807A2 (de) 2002-06-06

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