AU2001292029A1 - Silicon-on-insulator (soi) trench photodiode and method of forming same - Google Patents

Silicon-on-insulator (soi) trench photodiode and method of forming same

Info

Publication number
AU2001292029A1
AU2001292029A1 AU2001292029A AU9202901A AU2001292029A1 AU 2001292029 A1 AU2001292029 A1 AU 2001292029A1 AU 2001292029 A AU2001292029 A AU 2001292029A AU 9202901 A AU9202901 A AU 9202901A AU 2001292029 A1 AU2001292029 A1 AU 2001292029A1
Authority
AU
Australia
Prior art keywords
soi
insulator
silicon
forming same
photodiode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001292029A
Inventor
Dan Moy
Mark Ritter
Dennis Rogers
Jeffrey John Welser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of AU2001292029A1 publication Critical patent/AU2001292029A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0232—Optical elements or arrangements associated with the device
    • H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0236—Special surface textures
    • H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
    • H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
    • H01L31/03529—Shape of the potential jump barrier or surface barrier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/548—Amorphous silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Light Receiving Elements (AREA)
  • Element Separation (AREA)
  • Solid State Image Pick-Up Elements (AREA)
AU2001292029A 2000-10-03 2001-09-28 Silicon-on-insulator (soi) trench photodiode and method of forming same Abandoned AU2001292029A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/678,315 US6538299B1 (en) 2000-10-03 2000-10-03 Silicon-on-insulator (SOI) trench photodiode
US09/678,315 2000-10-03
PCT/GB2001/004336 WO2002029903A2 (en) 2000-10-03 2001-09-28 Silicon-on-insulator (soi) trench photodiode and method of forming same

Publications (1)

Publication Number Publication Date
AU2001292029A1 true AU2001292029A1 (en) 2002-04-15

Family

ID=24722303

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001292029A Abandoned AU2001292029A1 (en) 2000-10-03 2001-09-28 Silicon-on-insulator (soi) trench photodiode and method of forming same

Country Status (9)

Country Link
US (1) US6538299B1 (en)
EP (1) EP1374318A2 (en)
JP (1) JP2004511106A (en)
KR (1) KR100615916B1 (en)
CN (1) CN100505330C (en)
AU (1) AU2001292029A1 (en)
MX (1) MXPA03001799A (en)
TW (1) TW531899B (en)
WO (1) WO2002029903A2 (en)

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US6943409B1 (en) 2004-05-24 2005-09-13 International Business Machines Corporation Trench optical device
US7264982B2 (en) * 2004-11-01 2007-09-04 International Business Machines Corporation Trench photodetector
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WO2006113300A1 (en) * 2005-04-13 2006-10-26 Analog Devices, Inc. Inter-digitated silicon photodiode based optical receiver on soi
WO2006129427A1 (en) * 2005-05-31 2006-12-07 Sharp Kabushiki Kaisha Light sensor and display device
DE102005026242B4 (en) * 2005-06-07 2007-05-03 Austriamicrosystems Ag Photodiode with semiconductor integrated circuit and method of manufacture
JP2007013065A (en) * 2005-07-04 2007-01-18 Matsushita Electric Works Ltd Near infrared photodetection element
US20070069237A1 (en) * 2005-09-29 2007-03-29 Toppoly Optoelectronics Corp. Systems for providing electrostatic discharge protection
US7335927B2 (en) 2006-01-30 2008-02-26 Internatioanl Business Machines Corporation Lateral silicided diodes
US9727604B2 (en) 2006-03-10 2017-08-08 International Business Machines Corporation Generating code for an integrated data system
TWI443817B (en) 2006-07-03 2014-07-01 Hamamatsu Photonics Kk Photodiode array
US7525170B2 (en) * 2006-10-04 2009-04-28 International Business Machines Corporation Pillar P-i-n semiconductor diodes
US7560784B2 (en) * 2007-02-01 2009-07-14 International Business Machines Corporation Fin PIN diode
US7919347B2 (en) * 2009-01-06 2011-04-05 International Business Machines Corporation Methods of fabricating P-I-N diodes, structures for P-I-N diodes and design structure for P-I-N diodes
US8962376B2 (en) * 2009-04-21 2015-02-24 The Silanna Group Pty Ltd Optoelectronic device with lateral pin or pin junction
US8384012B2 (en) * 2009-05-11 2013-02-26 Infineon Technologies Ag Photodiode comprising polarizer
EP2256820A3 (en) * 2009-05-25 2011-04-20 Nxp B.V. Photo-electronic device comprising a vertical p-n or p-i-n junction and manufacturing method thereof
US7986022B2 (en) * 2009-11-19 2011-07-26 International Business Machines Corporation Semispherical integrated circuit structures
US8912616B2 (en) * 2011-02-11 2014-12-16 International Business Machines Corporaion Device for detecting electromagnetic radiation comprising a diffusion junction and a resonant grating in a single layer
WO2013066325A1 (en) * 2011-11-02 2013-05-10 Intel Corporation Waveguide avalanche photodetectors
EP2592661B8 (en) * 2011-11-11 2019-05-22 ams AG Lateral avalanche photodiode device and method of production
US9401355B2 (en) * 2011-12-16 2016-07-26 Infineon Technologies Ag Semiconductor device including a diode arranged in a trench
JP5880839B2 (en) * 2012-02-17 2016-03-09 国立大学法人九州工業大学 Method for manufacturing trench diode
US9461212B2 (en) 2012-07-02 2016-10-04 Seoul Viosys Co., Ltd. Light emitting diode module for surface mount technology and method of manufacturing the same
KR101740531B1 (en) * 2012-07-02 2017-06-08 서울바이오시스 주식회사 Light Emitting Diode Module for Surface Mount Technology and Method of manufacturing the same
TW201405792A (en) 2012-07-30 2014-02-01 Sony Corp Solid-state imaging device, method of manufacturing solid-state imaging device and electronic apparatus
US10468543B2 (en) 2013-05-22 2019-11-05 W&Wsens Devices, Inc. Microstructure enhanced absorption photosensitive devices
US10700225B2 (en) * 2013-05-22 2020-06-30 W&Wsens Devices, Inc. Microstructure enhanced absorption photosensitive devices
US11121271B2 (en) 2013-05-22 2021-09-14 W&WSens, Devices, Inc. Microstructure enhanced absorption photosensitive devices
CN103646985B (en) * 2013-12-26 2016-03-23 中国电子科技集团公司第四十四研究所 Responsiveness spatially-variable PIN photoelectric detector and preparation method thereof
WO2016110745A1 (en) * 2015-01-07 2016-07-14 Manai Yassine Non-invasive medical analysis based on ts fuzzy control
WO2016196883A1 (en) 2015-06-03 2016-12-08 Luna Innovations, Inc. Photoresistor on silicon-on-insulator substrate and photodetectors incorporating same
JP2017117882A (en) * 2015-12-22 2017-06-29 ルネサスエレクトロニクス株式会社 Semiconductor device and manufacturing method of the same
US10411150B2 (en) * 2016-12-30 2019-09-10 Texas Instruments Incorporated Optical isolation systems and circuits and photon detectors with extended lateral P-N junctions
EP3474318A1 (en) * 2017-10-23 2019-04-24 Nexperia B.V. Semiconductor device and method of manufacture
CN109461787A (en) * 2018-09-29 2019-03-12 北京工业大学 The vertical coupled type of grating, which is inserted, refers to photodetector
FR3092933A1 (en) 2019-02-14 2020-08-21 Stmicroelectronics (Crolles 2) Sas Photodiode
US20220005845A1 (en) * 2020-07-02 2022-01-06 Bardia Pezeshki Cmos-compatible short wavelength photodetectors
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Also Published As

Publication number Publication date
KR20030045094A (en) 2003-06-09
WO2002029903A3 (en) 2003-10-16
TW531899B (en) 2003-05-11
MXPA03001799A (en) 2003-06-04
EP1374318A2 (en) 2004-01-02
WO2002029903A2 (en) 2002-04-11
JP2004511106A (en) 2004-04-08
CN1537333A (en) 2004-10-13
US6538299B1 (en) 2003-03-25
KR100615916B1 (en) 2006-08-28
CN100505330C (en) 2009-06-24

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