AU2001287701A1 - Measuring the wall thickness of an electrically conductive object - Google Patents
Measuring the wall thickness of an electrically conductive objectInfo
- Publication number
- AU2001287701A1 AU2001287701A1 AU2001287701A AU8770101A AU2001287701A1 AU 2001287701 A1 AU2001287701 A1 AU 2001287701A1 AU 2001287701 A AU2001287701 A AU 2001287701A AU 8770101 A AU8770101 A AU 8770101A AU 2001287701 A1 AU2001287701 A1 AU 2001287701A1
- Authority
- AU
- Australia
- Prior art keywords
- wall thickness
- measuring
- probe
- electrically conductive
- signals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
Abstract
Measuring the wall thickness of an electrically conductive object using a probe comprising a transmitter coil, a first receiver and a second receiver, which method comprises arranging the probe near the object; inducing transient eddy currents in the object and recording the signals of the receivers with time; measuring the wall thickness from a characteristic of one of the signals; calculating a characteristic value from a combination of the signals; and correcting the measured wall thickness for the distance between the probe and the object using a pre-determined relationship between the wall thickness and the characteristic value for different values of the distance between the probe and the object.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00307298 | 2000-08-24 | ||
EP00307298 | 2000-08-24 | ||
PCT/EP2001/009720 WO2002016863A1 (en) | 2000-08-24 | 2001-08-22 | Measuring the wall thickness of an electrically conductive object |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001287701A1 true AU2001287701A1 (en) | 2002-03-04 |
Family
ID=8173218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001287701A Abandoned AU2001287701A1 (en) | 2000-08-24 | 2001-08-22 | Measuring the wall thickness of an electrically conductive object |
Country Status (11)
Country | Link |
---|---|
US (1) | US6593737B2 (en) |
EP (1) | EP1311800B1 (en) |
JP (1) | JP2004507721A (en) |
CN (1) | CN1447902A (en) |
AT (1) | ATE433092T1 (en) |
AU (1) | AU2001287701A1 (en) |
CA (1) | CA2420309A1 (en) |
DE (1) | DE60138891D1 (en) |
NO (1) | NO20030814L (en) |
RU (1) | RU2260172C2 (en) |
WO (1) | WO2002016863A1 (en) |
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US6640151B1 (en) | 1999-12-22 | 2003-10-28 | Applied Materials, Inc. | Multi-tool control system, method and medium |
US6708074B1 (en) | 2000-08-11 | 2004-03-16 | Applied Materials, Inc. | Generic interface builder |
US6538435B2 (en) * | 2000-08-24 | 2003-03-25 | Shell Oil Company | Method for detecting an anomaly in an object of electrically conductive material along first and second direction at inspection points |
US6570379B2 (en) * | 2000-08-24 | 2003-05-27 | Shell Oil Company | Method for inspecting an object of electrically conducting material |
US7188142B2 (en) | 2000-11-30 | 2007-03-06 | Applied Materials, Inc. | Dynamic subject information generation in message services of distributed object systems in a semiconductor assembly line facility |
US7160739B2 (en) | 2001-06-19 | 2007-01-09 | Applied Materials, Inc. | Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles |
US7698012B2 (en) | 2001-06-19 | 2010-04-13 | Applied Materials, Inc. | Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing |
US20030199112A1 (en) | 2002-03-22 | 2003-10-23 | Applied Materials, Inc. | Copper wiring module control |
US6672716B2 (en) * | 2002-04-29 | 2004-01-06 | Xerox Corporation | Multiple portion solid ink stick |
US7272459B2 (en) | 2002-11-15 | 2007-09-18 | Applied Materials, Inc. | Method, system and medium for controlling manufacture process having multivariate input parameters |
RU2323410C2 (en) * | 2002-12-19 | 2008-04-27 | Шелл Интернэшнл Рисерч Маатсхаппий Б.В. | Monitoring of thickness of wall |
DE112004002418T5 (en) * | 2003-12-10 | 2006-10-19 | Metso Paper, Inc. | Method for controlling the running parameters in a device for treating a fiber web and apparatus for applying this method |
SE527091C2 (en) * | 2003-12-31 | 2005-12-20 | Abb Ab | Method and apparatus for contactless measurement of thickness and electrical conductivity of a measuring object |
SE527125C2 (en) * | 2003-12-31 | 2005-12-27 | Abb Ab | Method and apparatus for contactless measurement of thickness or conductivity with electromagnetic induction |
JP4542973B2 (en) * | 2005-09-15 | 2010-09-15 | 株式会社東芝 | Moving distance measuring device and moving distance measuring method |
DK2064413T3 (en) | 2006-09-21 | 2018-02-12 | Tüv Rheinland Sonovation Holding B V | DEVICE AND PROCEDURE FOR DETECTING AN ANOMALY IN A COLLECTION OF A FIRST AND SECOND ITEM |
GB2450112B (en) * | 2007-06-12 | 2010-12-08 | Ge Inspection Technologies Ltd | Automatic lift-off compensation for pulsed eddy current inspection |
CN101398298B (en) * | 2008-11-10 | 2010-09-29 | 清华大学 | Electromagnetical ultrasonic thickness-measuring method |
US20100240900A1 (en) * | 2009-03-23 | 2010-09-23 | Headwaters Technology Innovation, Llc | Dispersible carbon nanospheres and methods for making same |
JP5513821B2 (en) * | 2009-09-17 | 2014-06-04 | 株式会社荏原製作所 | Eddy current sensor, polishing apparatus, plating apparatus, polishing method, plating method |
CN101788260B (en) * | 2010-03-18 | 2011-12-28 | 清华大学 | Eddy current measuring method of thickness of metal film |
JP4975142B2 (en) | 2010-06-17 | 2012-07-11 | トヨタ自動車株式会社 | Eddy current measuring sensor and eddy current measuring method |
FR2981741B1 (en) * | 2011-10-20 | 2013-11-29 | Messier Bugatti Dowty | METHOD FOR MEASURING THE THICKNESS OF A COATING LAYER BY INDUCING MAGNETIC FIELDS |
US9091664B2 (en) * | 2012-06-07 | 2015-07-28 | Thomas Krause | Pulsed eddy current sensor for precision measurement at-large lift-offs on metallic surfaces |
US9335151B2 (en) * | 2012-10-26 | 2016-05-10 | Applied Materials, Inc. | Film measurement |
CN104465481A (en) * | 2013-09-22 | 2015-03-25 | 盛美半导体设备(上海)有限公司 | Wafer chuck |
CN104034250B (en) * | 2014-06-30 | 2016-08-24 | 山东中科普锐检测技术有限公司 | Coating thickness detector temperature-compensating measuring method |
FR3025306B1 (en) * | 2014-08-29 | 2020-07-10 | Safran | NON-DESTRUCTIVE METHOD FOR MEASURING THICKNESS OF THERMAL BARRIER AND / OR WALL IN HOLLOW BLADE TURBOMACHINE SUPERALLOY |
US10073058B2 (en) | 2015-02-11 | 2018-09-11 | Structural Integrity Associates | Dynamic pulsed eddy current probe |
US10895555B2 (en) | 2015-03-30 | 2021-01-19 | Structural Integrity Associates, Inc. | System for in-line inspection using a dynamic pulsed eddy current probe and method thereof |
CN105509631B (en) * | 2015-12-07 | 2018-05-18 | 天津因科新创科技有限公司 | A kind of impulse eddy current method for testing wall thickness and device |
CN106197249A (en) * | 2016-09-30 | 2016-12-07 | 天津华海清科机电科技有限公司 | Copper layer thickness on-line measurement system and control method thereof during CMP |
CN109764800A (en) * | 2019-01-15 | 2019-05-17 | 西南石油大学 | A kind of corrosive pipeline wall thickness detecting system based on vortex thermal imaging array |
EP4053494A1 (en) | 2021-03-02 | 2022-09-07 | ABB Schweiz AG | Thickness measurement using a pulsed eddy current system |
Family Cites Families (31)
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US3555887A (en) | 1967-09-19 | 1971-01-19 | American Mach & Foundry | Apparatus for electroacoustically inspecting tubular members for anomalies using the magnetostrictive effect and for measuring wall thickness |
US3693075A (en) * | 1969-11-15 | 1972-09-19 | Forster F M O | Eddy current system for testing tubes for defects,eccentricity,and wall thickness |
DE2345848C3 (en) * | 1973-09-12 | 1986-06-19 | ELEKTRO-PHYSIK Hans Nix & Dr.-Ing. E. Steingroever GmbH & Co KG, 5000 Köln | Electromagnetic coating thickness meter |
US4383218A (en) * | 1978-12-29 | 1983-05-10 | The Boeing Company | Eddy current flow detection including compensation for system variables such as lift-off |
JPS5692804U (en) * | 1979-12-17 | 1981-07-23 | ||
US4492115A (en) * | 1984-04-11 | 1985-01-08 | Pa Incorporated | Method and apparatus for measuring defects in ferromagnetic tubing |
DE3413787A1 (en) | 1984-04-12 | 1985-10-17 | Nukem Gmbh, 6450 Hanau | METHOD AND DEVICE FOR TESTING ELECTRICALLY CONDUCTING OBJECTS BY MEANS OF ULTRASOUND |
FR2572175A1 (en) | 1984-10-24 | 1986-04-25 | Stein Heurtey | METHOD AND DEVICE FOR MEASURING THE THICKNESS OF THIN METAL LAYERS DEPOSITED ON A CONDUCTIVE SUPPORT |
FR2574938B1 (en) | 1984-12-19 | 1986-12-26 | Snecma | METHOD OF CONTROLLING BY CONTACTLESS EDGE CURRENT AND DEVICE FOR IMPLEMENTING IT |
JPS61151402A (en) * | 1984-12-26 | 1986-07-10 | Nippon Kokan Kk <Nkk> | Differential mutual induction type eddy current measuring sensor |
US4644271A (en) * | 1985-02-25 | 1987-02-17 | Ltv Steel Company, Inc. | Method and apparatus for examining a workpiece |
JPS62225947A (en) * | 1986-03-26 | 1987-10-03 | Kobe Steel Ltd | Probe for measuring vortex |
US4945305A (en) | 1986-10-09 | 1990-07-31 | Ascension Technology Corporation | Device for quantitatively measuring the relative position and orientation of two bodies in the presence of metals utilizing direct current magnetic fields |
SE451886B (en) * | 1986-10-10 | 1987-11-02 | Sten Linder | SET AND DEVICE FOR SOUND-FREE SEAT OF SIZES OF OR CONNECTED TO ELECTRICALLY CONDUCTIVE MATERIAL |
JPS63139202A (en) * | 1986-12-02 | 1988-06-11 | Nippon Telegr & Teleph Corp <Ntt> | Method and apparatus for measuring electromagnetic induction type thickness |
US4843320A (en) | 1987-12-17 | 1989-06-27 | Atlantic Richfield Company | Transient electromagnetic method for detecting corrosion on conductive containers |
US4929898A (en) * | 1987-12-17 | 1990-05-29 | Atlantic Richfield | Transient electromagnetic method for detecting irregularities on conductive containers |
US4849693A (en) * | 1988-02-29 | 1989-07-18 | Battelle Memorial Institute | Automated measurement system employing eddy currents to adjust probe position and determine metal hardness |
US4843317A (en) | 1988-10-18 | 1989-06-27 | Conoco Inc. | Method and apparatus for measuring casing wall thickness using a flux generating coil with radial sensing coils and flux leakage sensing coils |
JPH0654206B2 (en) * | 1989-09-05 | 1994-07-20 | 株式会社ニレコ | Eddy current distance measuring device |
US5198764A (en) | 1991-02-22 | 1993-03-30 | Sentech Corp. | Position detector apparatus and method utilizing a transient voltage waveform processor |
US5491409A (en) * | 1992-11-09 | 1996-02-13 | The Babcock & Wilcox Company | Multiple yoke eddy current technique for detection of surface defects on metal components covered with marine growth |
US5569835A (en) | 1994-08-10 | 1996-10-29 | Ultrasonic Arrays, Inc. | Reference wire compensation method and apparatus |
US5592092A (en) | 1994-10-28 | 1997-01-07 | Gas Research Institute | Pipe proximity warning device for accidental damage prevention mounted on the bucket of a backhoe |
US5541510A (en) * | 1995-04-06 | 1996-07-30 | Kaman Instrumentation Corporation | Multi-Parameter eddy current measuring system with parameter compensation technical field |
SE508354C2 (en) | 1996-07-05 | 1998-09-28 | Asea Atom Ab | Method and apparatus for determining layer thickness |
US6291992B1 (en) | 1996-07-12 | 2001-09-18 | Shell Oil Company | Eddy current inspection technique |
NL1005160C2 (en) * | 1997-01-31 | 1998-08-03 | Roentgen Tech Dienst Bv | Device for determining properties of an electrically conductive object. |
US6037768A (en) * | 1997-04-02 | 2000-03-14 | Iowa State University Research Foundation, Inc. | Pulsed eddy current inspections and the calibration and display of inspection results |
US6201987B1 (en) | 1998-05-26 | 2001-03-13 | General Electric Company | Error compensation for device tracking systems employing electromagnetic fields |
US6344741B1 (en) * | 2000-06-20 | 2002-02-05 | Her Majesty The Queen As Represented By The Minister Of National Defence In Right Of Canada | Pulsed eddy current method for detection of corrosion in multilayer structures using the lift-off point of intersection |
-
2001
- 2001-08-18 US US09/931,993 patent/US6593737B2/en not_active Expired - Fee Related
- 2001-08-22 CN CN01814484.5A patent/CN1447902A/en active Pending
- 2001-08-22 DE DE60138891T patent/DE60138891D1/en not_active Expired - Fee Related
- 2001-08-22 CA CA002420309A patent/CA2420309A1/en not_active Abandoned
- 2001-08-22 AT AT01967295T patent/ATE433092T1/en not_active IP Right Cessation
- 2001-08-22 JP JP2002521917A patent/JP2004507721A/en active Pending
- 2001-08-22 RU RU2003107828/28A patent/RU2260172C2/en not_active IP Right Cessation
- 2001-08-22 AU AU2001287701A patent/AU2001287701A1/en not_active Abandoned
- 2001-08-22 WO PCT/EP2001/009720 patent/WO2002016863A1/en active Application Filing
- 2001-08-22 EP EP01967295A patent/EP1311800B1/en not_active Expired - Lifetime
-
2003
- 2003-02-21 NO NO20030814A patent/NO20030814L/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
ATE433092T1 (en) | 2009-06-15 |
EP1311800A1 (en) | 2003-05-21 |
RU2260172C2 (en) | 2005-09-10 |
NO20030814D0 (en) | 2003-02-21 |
CA2420309A1 (en) | 2002-02-28 |
WO2002016863A1 (en) | 2002-02-28 |
EP1311800B1 (en) | 2009-06-03 |
US6593737B2 (en) | 2003-07-15 |
US20020149359A1 (en) | 2002-10-17 |
NO20030814L (en) | 2003-04-22 |
DE60138891D1 (en) | 2009-07-16 |
JP2004507721A (en) | 2004-03-11 |
CN1447902A (en) | 2003-10-08 |
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