AU2001275534A1 - High sensitivity optical inspection system and method for detecting flaws on a diffractive surface - Google Patents

High sensitivity optical inspection system and method for detecting flaws on a diffractive surface

Info

Publication number
AU2001275534A1
AU2001275534A1 AU2001275534A AU7553401A AU2001275534A1 AU 2001275534 A1 AU2001275534 A1 AU 2001275534A1 AU 2001275534 A AU2001275534 A AU 2001275534A AU 7553401 A AU7553401 A AU 7553401A AU 2001275534 A1 AU2001275534 A1 AU 2001275534A1
Authority
AU
Australia
Prior art keywords
high sensitivity
inspection system
optical inspection
diffractive surface
detecting flaws
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001275534A
Inventor
Abdu Boudour
Sergey Broude
Eric Chase
Jay Ormsby
Lloyd Quackenbos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
QC Optics Inc
Original Assignee
QC Optics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by QC Optics Inc filed Critical QC Optics Inc
Publication of AU2001275534A1 publication Critical patent/AU2001275534A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
AU2001275534A 2000-06-14 2001-06-14 High sensitivity optical inspection system and method for detecting flaws on a diffractive surface Abandoned AU2001275534A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US21164300P 2000-06-14 2000-06-14
US60211643 2000-06-14
US09688056 2000-10-13
US09/688,056 US6603542B1 (en) 2000-06-14 2000-10-13 High sensitivity optical inspection system and method for detecting flaws on a diffractive surface
PCT/US2001/040955 WO2001096840A2 (en) 2000-06-14 2001-06-14 High sensitivity optical inspection system and method for detecting flaws on a diffractive surface

Publications (1)

Publication Number Publication Date
AU2001275534A1 true AU2001275534A1 (en) 2001-12-24

Family

ID=26906332

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001275534A Abandoned AU2001275534A1 (en) 2000-06-14 2001-06-14 High sensitivity optical inspection system and method for detecting flaws on a diffractive surface

Country Status (4)

Country Link
US (1) US6603542B1 (en)
JP (3) JP3965117B2 (en)
AU (1) AU2001275534A1 (en)
WO (1) WO2001096840A2 (en)

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KR101657982B1 (en) * 2014-09-15 2016-09-30 (주)자비스 Apparatus for Investigating LED Package with X-ray
GB201518322D0 (en) 2015-10-16 2015-12-02 Rolls Royce Plc A method for classifying a defect in a component intended to have a monocrystalline
US10156664B2 (en) 2016-02-12 2018-12-18 Lasertec Corporation Mask inspection apparatus and mask inspection method
JP6053084B1 (en) * 2016-02-12 2016-12-27 レーザーテック株式会社 Mask inspection apparatus and mask inspection method
WO2018085237A1 (en) 2016-11-02 2018-05-11 Corning Incorporated Method and apparatus for inspecting defects on transparent substrate and method of emitting incident light
KR102537558B1 (en) 2016-11-02 2023-05-26 코닝 인코포레이티드 Method and apparatus for inspecting defects on a transparent substrate
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Also Published As

Publication number Publication date
JP4767935B2 (en) 2011-09-07
WO2001096840A2 (en) 2001-12-20
JP3965117B2 (en) 2007-08-29
JP2008058331A (en) 2008-03-13
JP2004503770A (en) 2004-02-05
US6603542B1 (en) 2003-08-05
JP2006284595A (en) 2006-10-19
WO2001096840A3 (en) 2002-06-27

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