AU2001271715A1 - Automatic slit/gate valve - Google Patents

Automatic slit/gate valve

Info

Publication number
AU2001271715A1
AU2001271715A1 AU2001271715A AU7171501A AU2001271715A1 AU 2001271715 A1 AU2001271715 A1 AU 2001271715A1 AU 2001271715 A AU2001271715 A AU 2001271715A AU 7171501 A AU7171501 A AU 7171501A AU 2001271715 A1 AU2001271715 A1 AU 2001271715A1
Authority
AU
Australia
Prior art keywords
gate valve
automatic slit
slit
automatic
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001271715A
Other languages
English (en)
Inventor
Eugene Gantvarg
Ilya Perlov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of AU2001271715A1 publication Critical patent/AU2001271715A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/182—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of toggle links
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Power-Operated Mechanisms For Wings (AREA)
  • Details Of Valves (AREA)
AU2001271715A 2000-07-07 2001-06-30 Automatic slit/gate valve Abandoned AU2001271715A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US21686800P 2000-07-07 2000-07-07
US60216868 2000-07-07
PCT/US2001/020919 WO2002005322A2 (fr) 2000-07-07 2001-06-30 Valve a fente/obturateur automatique

Publications (1)

Publication Number Publication Date
AU2001271715A1 true AU2001271715A1 (en) 2002-01-21

Family

ID=22808800

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001271715A Abandoned AU2001271715A1 (en) 2000-07-07 2001-06-30 Automatic slit/gate valve

Country Status (3)

Country Link
AU (1) AU2001271715A1 (fr)
TW (1) TW530321B (fr)
WO (1) WO2002005322A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4079157B2 (ja) * 2005-04-12 2008-04-23 東京エレクトロン株式会社 ゲートバルブ装置及び処理システム
US7281700B2 (en) 2005-04-12 2007-10-16 Tokyo Electron Limited Gate valve apparatus for vacuum processing system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2117495A (en) * 1982-03-29 1983-10-12 Varian Associates High speed vacuum gate valve
US4721282A (en) * 1986-12-16 1988-01-26 Lam Research Corporation Vacuum chamber gate valve
JPH05272662A (ja) * 1992-03-25 1993-10-19 Fujitsu Ltd ゲートバルブ
JPH10339377A (ja) * 1997-06-06 1998-12-22 Nec Corp ゲートバルブ

Also Published As

Publication number Publication date
WO2002005322A3 (fr) 2002-05-30
WO2002005322A2 (fr) 2002-01-17
TW530321B (en) 2003-05-01

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