AU2001270534A1 - Pressure measuring cell - Google Patents

Pressure measuring cell

Info

Publication number
AU2001270534A1
AU2001270534A1 AU2001270534A AU7053401A AU2001270534A1 AU 2001270534 A1 AU2001270534 A1 AU 2001270534A1 AU 2001270534 A AU2001270534 A AU 2001270534A AU 7053401 A AU7053401 A AU 7053401A AU 2001270534 A1 AU2001270534 A1 AU 2001270534A1
Authority
AU
Australia
Prior art keywords
pressure measuring
measuring cell
cell
pressure
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001270534A
Other languages
English (en)
Inventor
Ulfert Drewes
Frank Hegner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of AU2001270534A1 publication Critical patent/AU2001270534A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
AU2001270534A 2000-09-01 2001-05-23 Pressure measuring cell Abandoned AU2001270534A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10043630A DE10043630A1 (de) 2000-09-01 2000-09-01 Druckmeßzelle
DE10043630 2000-09-01
PCT/EP2001/005926 WO2002018896A1 (fr) 2000-09-01 2001-05-23 Cellule de mesure de pression

Publications (1)

Publication Number Publication Date
AU2001270534A1 true AU2001270534A1 (en) 2002-03-13

Family

ID=7654994

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001270534A Abandoned AU2001270534A1 (en) 2000-09-01 2001-05-23 Pressure measuring cell

Country Status (4)

Country Link
US (1) US20020026836A1 (fr)
AU (1) AU2001270534A1 (fr)
DE (1) DE10043630A1 (fr)
WO (1) WO2002018896A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10326975A1 (de) 2003-06-12 2005-01-20 Endress + Hauser Gmbh + Co. Kg Drucksensor mit Feuchteschutz
DE102004033813B4 (de) * 2004-07-12 2010-04-08 Endress + Hauser Gmbh + Co. Kg Druckmessgerät
DE102009027742A1 (de) * 2009-07-15 2011-01-27 Endress + Hauser Gmbh + Co. Kg Kapazitive keramische Druckmesszelle und Drucksensor mit einer solchen Druckmesszelle
DE102010042344B4 (de) * 2010-10-12 2022-06-23 Endress+Hauser SE+Co. KG Wirkdruckgeberanordnung für ein Durchflussmessgerät und Durchflussmessgerät mit einer solchen Wirkdruckgeberanordnung
DE102012110152A1 (de) * 2012-07-11 2014-05-15 Endress + Hauser Gmbh + Co. Kg Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle
DE102012106236A1 (de) * 2012-07-11 2014-01-16 Endress + Hauser Gmbh + Co. Kg Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle
DE102015122220A1 (de) * 2015-12-18 2017-06-22 Endress + Hauser Gmbh + Co. Kg Keramische Druckmesszelle mit mindestens einem Temperaturmesswandler und Druckmessaufnehmer mit einer solchen Druckmesszelle
DE102020118313B4 (de) * 2020-07-10 2023-10-05 Vega Grieshaber Kg Kanalstrukturen zur Optimierung der Membranfunktion von ölgefüllten Drucksensoren

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58731A (ja) * 1981-06-25 1983-01-05 Matsushita Electric Ind Co Ltd 静電容量式圧力センサ
US4425799A (en) * 1982-06-03 1984-01-17 Kavlico Corporation Liquid capacitance pressure transducer technique
US4562742A (en) * 1984-08-07 1986-01-07 Bell Microcomponents, Inc. Capacitive pressure transducer
US4944187A (en) * 1988-12-23 1990-07-31 Rosemount Inc. Multimodulus pressure sensor
DE4004275A1 (de) * 1990-02-13 1991-08-14 Schoppe & Faeser Gmbh Kapazitiver druck- oder differenzdrucksensor
GB9007948D0 (en) * 1990-04-07 1990-06-06 Shelton Richard D Designs for low cost,sensitive pressure sensors
DE4028402A1 (de) * 1990-09-07 1992-03-12 Bosch Gmbh Robert Drucksensor
US5349491A (en) * 1992-11-06 1994-09-20 Kavlico Corporation Pre-stressed pressure transducer and method of forming same
DE4416978C2 (de) * 1994-05-13 2000-09-07 Ifm Electronic Gmbh Drucksensor
DE19509250C1 (de) * 1995-03-15 1996-09-12 Bosch Gmbh Robert Verfahren zur Herstellung eines Drucksensors

Also Published As

Publication number Publication date
WO2002018896A1 (fr) 2002-03-07
DE10043630A1 (de) 2002-03-14
US20020026836A1 (en) 2002-03-07

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