AU2001269334A1 - Improvements in or relating to filters - Google Patents

Improvements in or relating to filters

Info

Publication number
AU2001269334A1
AU2001269334A1 AU2001269334A AU6933401A AU2001269334A1 AU 2001269334 A1 AU2001269334 A1 AU 2001269334A1 AU 2001269334 A AU2001269334 A AU 2001269334A AU 6933401 A AU6933401 A AU 6933401A AU 2001269334 A1 AU2001269334 A1 AU 2001269334A1
Authority
AU
Australia
Prior art keywords
filters
relating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001269334A
Inventor
Masaaki Imura
Paul B. Kirby
Eiju Komuro
Qingxin Su
Roger W. Whatmore
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Publication of AU2001269334A1 publication Critical patent/AU2001269334A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AU2001269334A 2000-11-29 2001-07-11 Improvements in or relating to filters Abandoned AU2001269334A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0029090 2000-11-29
GBGB0029090.8A GB0029090D0 (en) 2000-11-29 2000-11-29 Improvements in or relating to filters
PCT/GB2001/003141 WO2002045265A1 (en) 2000-11-29 2001-07-11 Improvements in or relating to filters

Publications (1)

Publication Number Publication Date
AU2001269334A1 true AU2001269334A1 (en) 2002-06-11

Family

ID=9904094

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001269334A Abandoned AU2001269334A1 (en) 2000-11-29 2001-07-11 Improvements in or relating to filters

Country Status (7)

Country Link
US (2) US7187254B2 (en)
EP (1) EP1340315B1 (en)
JP (2) JP2004515149A (en)
AU (1) AU2001269334A1 (en)
DE (1) DE60131888T2 (en)
GB (1) GB0029090D0 (en)
WO (1) WO2002045265A1 (en)

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GB0029090D0 (en) * 2000-11-29 2001-01-10 Univ Cranfield Improvements in or relating to filters
US20040027030A1 (en) * 2002-08-08 2004-02-12 Li-Peng Wang Manufacturing film bulk acoustic resonator filters
JP4128836B2 (en) * 2002-09-27 2008-07-30 Ｔｄｋ株式会社 Thin film piezoelectric resonator, filter and duplexer using the same
US7275292B2 (en) 2003-03-07 2007-10-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Method for fabricating an acoustical resonator on a substrate
JP4024741B2 (en) * 2003-10-20 2007-12-19 富士通メディアデバイス株式会社 Piezoelectric thin film resonator and filter
US7362198B2 (en) * 2003-10-30 2008-04-22 Avago Technologies Wireless Ip (Singapore) Pte. Ltd Pass bandwidth control in decoupled stacked bulk acoustic resonator devices
US6946928B2 (en) * 2003-10-30 2005-09-20 Agilent Technologies, Inc. Thin-film acoustically-coupled transformer
US7019605B2 (en) * 2003-10-30 2006-03-28 Larson Iii John D Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth
US7332985B2 (en) * 2003-10-30 2008-02-19 Avago Technologies Wireless Ip (Singapore) Pte Ltd. Cavity-less film bulk acoustic resonator (FBAR) devices
JP4223428B2 (en) * 2004-03-31 2009-02-12 富士通メディアデバイス株式会社 Filter and manufacturing method thereof
US7388454B2 (en) * 2004-10-01 2008-06-17 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using alternating frame structure
US8981876B2 (en) * 2004-11-15 2015-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters having frame elements
US7202560B2 (en) 2004-12-15 2007-04-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Wafer bonding of micro-electro mechanical systems to active circuitry
US7791434B2 (en) * 2004-12-22 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
US7427819B2 (en) * 2005-03-04 2008-09-23 Avago Wireless Ip Pte Ltd Film-bulk acoustic wave resonator with motion plate and method
US7369013B2 (en) * 2005-04-06 2008-05-06 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using filled recessed region
US7436269B2 (en) * 2005-04-18 2008-10-14 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled resonators and method of making the same
US7934884B2 (en) * 2005-04-27 2011-05-03 Lockhart Industries, Inc. Ring binder cover
KR100622393B1 (en) * 2005-07-05 2006-09-12 삼성전자주식회사 Bulk acoustic resonator comprising a resonance part with dimple and fabrication method therefor
US7868522B2 (en) 2005-09-09 2011-01-11 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Adjusted frequency temperature coefficient resonator
US7391286B2 (en) * 2005-10-06 2008-06-24 Avago Wireless Ip Pte Ltd Impedance matching and parasitic capacitor resonance of FBAR resonators and coupled filters
US7425787B2 (en) * 2005-10-18 2008-09-16 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator
US7675390B2 (en) * 2005-10-18 2010-03-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator
US7525398B2 (en) * 2005-10-18 2009-04-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustically communicating data signals across an electrical isolation barrier
US7423503B2 (en) * 2005-10-18 2008-09-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating film acoustically-coupled transformer
US7737807B2 (en) 2005-10-18 2010-06-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators
US7463499B2 (en) * 2005-10-31 2008-12-09 Avago Technologies General Ip (Singapore) Pte Ltd. AC-DC power converter
US7561009B2 (en) * 2005-11-30 2009-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator (FBAR) devices with temperature compensation
US7612636B2 (en) * 2006-01-30 2009-11-03 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Impedance transforming bulk acoustic wave baluns
US7746677B2 (en) * 2006-03-09 2010-06-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. AC-DC converter circuit and power supply
US20070210724A1 (en) * 2006-03-09 2007-09-13 Mark Unkrich Power adapter and DC-DC converter having acoustic transformer
US7479685B2 (en) * 2006-03-10 2009-01-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Electronic device on substrate with cavity and mitigated parasitic leakage path
US7851709B2 (en) * 2006-03-22 2010-12-14 Advanced Semiconductor Engineering, Inc. Multi-layer circuit board having ground shielding walls
US7508286B2 (en) * 2006-09-28 2009-03-24 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. HBAR oscillator and method of manufacture
US20080202239A1 (en) * 2007-02-28 2008-08-28 Fazzio R Shane Piezoelectric acceleration sensor
US20090079514A1 (en) * 2007-09-24 2009-03-26 Tiberiu Jamneala Hybrid acoustic resonator-based filters
US7791435B2 (en) * 2007-09-28 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single stack coupled resonators having differential output
US7732977B2 (en) * 2008-04-30 2010-06-08 Avago Technologies Wireless Ip (Singapore) Transceiver circuit for film bulk acoustic resonator (FBAR) transducers
US7855618B2 (en) * 2008-04-30 2010-12-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator electrical impedance transformers
US7888843B2 (en) 2008-09-10 2011-02-15 Georgia Tech Research Corporation Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein
US7939990B2 (en) * 2009-01-30 2011-05-10 Integrated Device Technology, Inc. Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations
US7834524B2 (en) * 2009-01-30 2010-11-16 Integrated Device Technology, Inc. Micro-electromechanical devices having variable capacitors therein that compensate for temperature-induced frequency drift in acoustic resonators
US8291559B2 (en) * 2009-02-24 2012-10-23 Epcos Ag Process for adapting resonance frequency of a BAW resonator
JP2012531097A (en) * 2009-06-19 2012-12-06 ジョージア・テック・リサーチ・コーポレイション Method of forming a micromechanical resonator having a high density trench array providing passive temperature compensation
US8248185B2 (en) * 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
US8902023B2 (en) * 2009-06-24 2014-12-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US8106724B1 (en) 2009-07-23 2012-01-31 Integrated Device Technologies, Inc. Thin-film bulk acoustic resonators having perforated resonator body supports that enhance quality factor
US8193877B2 (en) * 2009-11-30 2012-06-05 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Duplexer with negative phase shifting circuit
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US8501515B1 (en) 2011-02-25 2013-08-06 Integrated Device Technology Inc. Methods of forming micro-electromechanical resonators using passive compensation techniques
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9048812B2 (en) 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US8350445B1 (en) 2011-06-16 2013-01-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising non-piezoelectric layer and bridge
US8922302B2 (en) 2011-08-24 2014-12-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator formed on a pedestal
US8610336B1 (en) 2011-09-30 2013-12-17 Integrated Device Technology Inc Microelectromechanical resonators having resistive heating elements therein configured to provide frequency tuning through convective heating of resonator bodies
EP3229359A1 (en) * 2016-04-06 2017-10-11 Neumüller Elektronik GmbH Resonant converter and power device with such a converter
CN112514088B (en) * 2018-09-21 2024-09-03 株式会社村田制作所 Piezoelectric device

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US5382930A (en) * 1992-12-21 1995-01-17 Trw Inc. Monolithic multipole filters made of thin film stacked crystal filters
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US6051907A (en) 1996-10-10 2000-04-18 Nokia Mobile Phones Limited Method for performing on-wafer tuning of thin film bulk acoustic wave resonators (FBARS)
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US5932953A (en) * 1997-06-30 1999-08-03 Iowa State University Research Foundation, Inc. Method and system for detecting material using piezoelectric resonators
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US6720842B2 (en) * 2000-02-14 2004-04-13 Murata Manufacturing Co., Ltd. Surface acoustic wave filter device having first through third surface acoustic wave filter elements
GB0012439D0 (en) * 2000-05-24 2000-07-12 Univ Cranfield Improvements to filters
GB0012437D0 (en) * 2000-05-24 2000-07-12 Univ Cranfield Improvements to filters
GB0029090D0 (en) * 2000-11-29 2001-01-10 Univ Cranfield Improvements in or relating to filters
JP3949990B2 (en) * 2002-03-29 2007-07-25 株式会社東芝 Voltage controlled oscillator
TW540173B (en) * 2002-05-03 2003-07-01 Asia Pacific Microsystems Inc Bulk acoustic device having integrated fine-tuning and trimming devices
JP4128836B2 (en) * 2002-09-27 2008-07-30 Ｔｄｋ株式会社 Thin film piezoelectric resonator, filter and duplexer using the same

Also Published As

Publication number Publication date
DE60131888T2 (en) 2008-12-04
US20040061416A1 (en) 2004-04-01
US7187254B2 (en) 2007-03-06
EP1340315A1 (en) 2003-09-03
US7199504B2 (en) 2007-04-03
JP2004007847A (en) 2004-01-08
GB0029090D0 (en) 2001-01-10
WO2002045265A1 (en) 2002-06-06
US20040150295A1 (en) 2004-08-05
JP2004515149A (en) 2004-05-20
DE60131888D1 (en) 2008-01-24
EP1340315B1 (en) 2007-12-12

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