AU2001263815A1 - Method for controlling reactive sputtering processes - Google Patents
Method for controlling reactive sputtering processesInfo
- Publication number
- AU2001263815A1 AU2001263815A1 AU2001263815A AU6381501A AU2001263815A1 AU 2001263815 A1 AU2001263815 A1 AU 2001263815A1 AU 2001263815 A AU2001263815 A AU 2001263815A AU 6381501 A AU6381501 A AU 6381501A AU 2001263815 A1 AU2001263815 A1 AU 2001263815A1
- Authority
- AU
- Australia
- Prior art keywords
- reactive sputtering
- sputtering processes
- controlling reactive
- controlling
- processes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0094—Reactive sputtering in transition mode
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0042—Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10015150 | 2000-03-27 | ||
DE10015150 | 2000-03-27 | ||
PCT/EP2001/003443 WO2001073151A1 (en) | 2000-03-27 | 2001-03-27 | Method for controlling reactive sputtering processes |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001263815A1 true AU2001263815A1 (en) | 2001-10-08 |
Family
ID=7636548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001263815A Abandoned AU2001263815A1 (en) | 2000-03-27 | 2001-03-27 | Method for controlling reactive sputtering processes |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1268872B2 (en) |
AU (1) | AU2001263815A1 (en) |
DE (1) | DE50100613D1 (en) |
WO (1) | WO2001073151A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10347521A1 (en) | 2002-12-04 | 2004-06-24 | Leybold Optics Gmbh | Method for producing a multilayer layer and device for carrying out the method |
DE102005015587B4 (en) * | 2005-04-05 | 2009-12-24 | Von Ardenne Anlagentechnik Gmbh | Method and arrangement for stabilizing an operating point of reactive plasma-assisted vacuum coating processes |
CN102725433B (en) * | 2010-01-21 | 2014-07-02 | Oc欧瑞康巴尔斯公司 | Method for depositing an antireflective layer on a substrate |
WO2016156496A1 (en) | 2015-03-31 | 2016-10-06 | Bühler Alzenau Gmbh | Method for producing coated substrates |
DE102020122547B4 (en) | 2020-08-28 | 2024-02-22 | VON ARDENNE Asset GmbH & Co. KG | Method, control device and non-volatile data storage |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4428811A (en) * | 1983-04-04 | 1984-01-31 | Borg-Warner Corporation | Rapid rate reactive sputtering of a group IVb metal |
JPH01268859A (en) * | 1988-04-20 | 1989-10-26 | Casio Comput Co Ltd | Formation of transparent conductive film and device therefor |
US5040559A (en) † | 1989-02-06 | 1991-08-20 | Mks Instruments, Inc. | Modulating positive shutoff mechanism |
EP0508359B1 (en) * | 1991-04-12 | 1996-10-09 | Balzers Aktiengesellschaft | Process and apparatus for coating at least one object |
DE19609970A1 (en) * | 1996-03-14 | 1997-09-18 | Leybold Systems Gmbh | Device for applying thin layers on a substrate |
-
2001
- 2001-03-27 WO PCT/EP2001/003443 patent/WO2001073151A1/en active IP Right Grant
- 2001-03-27 DE DE50100613T patent/DE50100613D1/en not_active Expired - Lifetime
- 2001-03-27 EP EP01938052A patent/EP1268872B2/en not_active Expired - Lifetime
- 2001-03-27 AU AU2001263815A patent/AU2001263815A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1268872B1 (en) | 2003-09-10 |
DE50100613D1 (en) | 2003-10-16 |
EP1268872A1 (en) | 2003-01-02 |
EP1268872B2 (en) | 2010-01-20 |
WO2001073151A1 (en) | 2001-10-04 |
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