AU2001247304A1 - Composition and process for production of copper circuitry in microelectronic device structures - Google Patents
Composition and process for production of copper circuitry in microelectronic device structuresInfo
- Publication number
- AU2001247304A1 AU2001247304A1 AU2001247304A AU4730401A AU2001247304A1 AU 2001247304 A1 AU2001247304 A1 AU 2001247304A1 AU 2001247304 A AU2001247304 A AU 2001247304A AU 4730401 A AU4730401 A AU 4730401A AU 2001247304 A1 AU2001247304 A1 AU 2001247304A1
- Authority
- AU
- Australia
- Prior art keywords
- composition
- production
- microelectronic device
- device structures
- copper circuitry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title 1
- 229910052802 copper Inorganic materials 0.000 title 1
- 239000010949 copper Substances 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 238000004377 microelectronic Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
- C07F1/08—Copper compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/0803—Compounds with Si-C or Si-Si linkages
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/522,102 US6589329B1 (en) | 2000-03-09 | 2000-03-09 | Composition and process for production of copper circuitry in microelectronic device structures |
US09522102 | 2000-03-09 | ||
PCT/US2001/007232 WO2001066347A1 (en) | 2000-03-09 | 2001-03-07 | Composition and process for production of copper circuitry in microelectronic device structures |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001247304A1 true AU2001247304A1 (en) | 2001-09-17 |
Family
ID=24079474
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001247304A Abandoned AU2001247304A1 (en) | 2000-03-09 | 2001-03-07 | Composition and process for production of copper circuitry in microelectronic device structures |
Country Status (3)
Country | Link |
---|---|
US (1) | US6589329B1 (en) |
AU (1) | AU2001247304A1 (en) |
WO (1) | WO2001066347A1 (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2003272656A1 (en) * | 2002-09-27 | 2004-04-19 | Tokyo Electron Limited | A method and system for etching high-k dielectric materials |
JP4954448B2 (en) * | 2003-04-05 | 2012-06-13 | ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. | Organometallic compounds |
JP4529434B2 (en) * | 2003-12-11 | 2010-08-25 | 東ソー株式会社 | Copper complex and copper complex composition comprising a polysubstituted vinylsilane compound |
FR2868085B1 (en) * | 2004-03-24 | 2006-07-14 | Alchimer Sa | METHOD FOR SELECTIVE COATING OF COMPOSITE SURFACE, FABRICATION OF MICROELECTRONIC INTERCONNECTIONS USING THE SAME, AND INTEGRATED CIRCUITS |
US7166732B2 (en) * | 2004-06-16 | 2007-01-23 | Advanced Technology Materials, Inc. | Copper (I) compounds useful as deposition precursors of copper thin films |
WO2006055868A1 (en) * | 2004-11-21 | 2006-05-26 | David Mitchell Windmiller | Bottom fillable bottles and systems for charging |
US7205422B2 (en) | 2004-12-30 | 2007-04-17 | Air Products And Chemicals, Inc. | Volatile metal β-ketoiminate and metal β-diiminate complexes |
US7034169B1 (en) | 2004-12-30 | 2006-04-25 | Air Products And Chemicals, Inc. | Volatile metal β-ketoiminate complexes |
US7956465B2 (en) * | 2006-05-08 | 2011-06-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reducing resistivity in interconnect structures of integrated circuits |
US7919862B2 (en) * | 2006-05-08 | 2011-04-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reducing resistivity in interconnect structures of integrated circuits |
US7612451B2 (en) * | 2006-07-13 | 2009-11-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reducing resistivity in interconnect structures by forming an inter-layer |
US20110060165A1 (en) * | 2006-12-05 | 2011-03-10 | Advanced Technology Materials, Inc. | Metal aminotroponiminates, bis-oxazolinates and guanidinates |
US8242016B2 (en) * | 2007-05-14 | 2012-08-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Approach for reducing copper line resistivity |
US8263795B2 (en) | 2007-11-05 | 2012-09-11 | Air Products And Chemicals, Inc. | Copper precursors for thin film deposition |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3356527A (en) | 1964-04-23 | 1967-12-05 | Ross W Moshier | Vapor-plating metals from fluorocarbon keto metal compounds |
US3594216A (en) | 1969-06-19 | 1971-07-20 | Westinghouse Electric Corp | Vapor phase deposition of metal from a metal-organic beta-ketoamine chelate |
US5094701A (en) | 1990-03-30 | 1992-03-10 | Air Products And Chemicals, Inc. | Cleaning agents comprising beta-diketone and beta-ketoimine ligands and a process for using the same |
US5820664A (en) | 1990-07-06 | 1998-10-13 | Advanced Technology Materials, Inc. | Precursor compositions for chemical vapor deposition, and ligand exchange resistant metal-organic precursor solutions comprising same |
US5453494A (en) | 1990-07-06 | 1995-09-26 | Advanced Technology Materials, Inc. | Metal complex source reagents for MOCVD |
US5711816A (en) | 1990-07-06 | 1998-01-27 | Advanced Technolgy Materials, Inc. | Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same |
US5204314A (en) | 1990-07-06 | 1993-04-20 | Advanced Technology Materials, Inc. | Method for delivering an involatile reagent in vapor form to a CVD reactor |
US5280012A (en) | 1990-07-06 | 1994-01-18 | Advanced Technology Materials Inc. | Method of forming a superconducting oxide layer by MOCVD |
US5225561A (en) | 1990-07-06 | 1993-07-06 | Advanced Technology Materials, Inc. | Source reagent compounds for MOCVD of refractory films containing group IIA elements |
US5362328A (en) | 1990-07-06 | 1994-11-08 | Advanced Technology Materials, Inc. | Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem |
US5096737A (en) * | 1990-10-24 | 1992-03-17 | International Business Machines Corporation | Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin films |
US5220044A (en) | 1990-10-24 | 1993-06-15 | International Business Machines Corporation | Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin films |
US5098516A (en) | 1990-12-31 | 1992-03-24 | Air Products And Chemicals, Inc. | Processes for the chemical vapor deposition of copper and etching of copper |
US5085731A (en) | 1991-02-04 | 1992-02-04 | Air Products And Chemicals, Inc. | Volatile liquid precursors for the chemical vapor deposition of copper |
US5187300A (en) | 1991-02-04 | 1993-02-16 | Air Products And Chemicals, Inc. | Volatile precursors for copper CVD |
US5144049A (en) | 1991-02-04 | 1992-09-01 | Air Products And Chemicals, Inc. | Volatile liquid precursors for the chemical vapor deposition of copper |
US5280664A (en) | 1992-03-20 | 1994-01-25 | Lin Mary D | Disposable household cleaning devices |
US5358743A (en) | 1992-11-24 | 1994-10-25 | University Of New Mexico | Selective and blanket chemical vapor deposition of Cu from (β-diketonate)Cu(L)n by silica surface modification |
US5322712A (en) | 1993-05-18 | 1994-06-21 | Air Products And Chemicals, Inc. | Process for improved quality of CVD copper films |
US5919522A (en) | 1995-03-31 | 1999-07-06 | Advanced Technology Materials, Inc. | Growth of BaSrTiO3 using polyamine-based precursors |
US5744192A (en) | 1996-11-08 | 1998-04-28 | Sharp Microelectronics Technology, Inc. | Method of using water vapor to increase the conductivity of cooper desposited with cu(hfac)TMVS |
US6090960A (en) | 1997-01-07 | 2000-07-18 | Sharp Laboratories Of America, Inc. | Precursor with (methoxy) (methyl) silylolefin ligand to deposit copper and method same |
US5994571A (en) | 1998-11-10 | 1999-11-30 | Sharp Laboratories Of America, Inc. | Substituted ethylene precursor and synthesis method |
US6337148B1 (en) * | 1999-05-25 | 2002-01-08 | Advanced Technology Materials, Inc. | Copper source reagent compositions, and method of making and using same for microelectronic device structures |
-
2000
- 2000-03-09 US US09/522,102 patent/US6589329B1/en not_active Expired - Fee Related
-
2001
- 2001-03-07 WO PCT/US2001/007232 patent/WO2001066347A1/en active Application Filing
- 2001-03-07 AU AU2001247304A patent/AU2001247304A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US6589329B1 (en) | 2003-07-08 |
WO2001066347A1 (en) | 2001-09-13 |
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