AU2002214283A1 - Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring - Google Patents

Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring

Info

Publication number
AU2002214283A1
AU2002214283A1 AU2002214283A AU1428302A AU2002214283A1 AU 2002214283 A1 AU2002214283 A1 AU 2002214283A1 AU 2002214283 A AU2002214283 A AU 2002214283A AU 1428302 A AU1428302 A AU 1428302A AU 2002214283 A1 AU2002214283 A1 AU 2002214283A1
Authority
AU
Australia
Prior art keywords
metal wiring
forming metal
manufacturing apparatus
semiconductor manufacturing
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002214283A
Inventor
Yumiko Kawano
Kazuya Okubo
Kenji Suzuki
Mitsuhiro Tachibana
Hideaki Yamasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002214283A1 publication Critical patent/AU2002214283A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
    • H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
    • H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
    • H01L21/28562—Selective deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
    • H01L21/76876—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers for deposition from the gas phase, e.g. CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
AU2002214283A 2000-11-17 2001-11-13 Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring Abandoned AU2002214283A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000-351716 2000-11-17
JP2000351716 2000-11-17
PCT/JP2001/009924 WO2002041379A1 (en) 2000-11-17 2001-11-13 Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring

Publications (1)

Publication Number Publication Date
AU2002214283A1 true AU2002214283A1 (en) 2002-05-27

Family

ID=18824726

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002214283A Abandoned AU2002214283A1 (en) 2000-11-17 2001-11-13 Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring

Country Status (7)

Country Link
US (1) US6913996B2 (en)
JP (2) JP2004514289A (en)
KR (1) KR100479283B1 (en)
CN (2) CN100446218C (en)
AU (1) AU2002214283A1 (en)
TW (1) TWI281208B (en)
WO (1) WO2002041379A1 (en)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9076843B2 (en) 2001-05-22 2015-07-07 Novellus Systems, Inc. Method for producing ultra-thin tungsten layers with improved step coverage
JP4074461B2 (en) * 2002-02-06 2008-04-09 東京エレクトロン株式会社 Film forming method, film forming apparatus, and semiconductor device manufacturing method
JP4007822B2 (en) * 2002-02-14 2007-11-14 富士通株式会社 Method for forming wiring structure
JP4540939B2 (en) * 2003-03-24 2010-09-08 東京エレクトロン株式会社 Processing equipment
JP4770145B2 (en) * 2003-10-07 2011-09-14 東京エレクトロン株式会社 Film forming method and film forming apparatus
JP5135710B2 (en) * 2006-05-16 2013-02-06 東京エレクトロン株式会社 Film forming method and film forming apparatus
JP5384291B2 (en) 2008-11-26 2014-01-08 株式会社日立国際電気 Semiconductor device manufacturing method, substrate processing method, and substrate processing apparatus
US9159571B2 (en) 2009-04-16 2015-10-13 Lam Research Corporation Tungsten deposition process using germanium-containing reducing agent
US8623733B2 (en) 2009-04-16 2014-01-07 Novellus Systems, Inc. Methods for depositing ultra thin low resistivity tungsten film for small critical dimension contacts and interconnects
US10256142B2 (en) 2009-08-04 2019-04-09 Novellus Systems, Inc. Tungsten feature fill with nucleation inhibition
CN113862634A (en) 2012-03-27 2021-12-31 诺发系统公司 Tungsten feature fill
JP5887201B2 (en) * 2012-05-14 2016-03-16 東京エレクトロン株式会社 Substrate processing method, substrate processing apparatus, substrate processing program, and storage medium
US8853080B2 (en) 2012-09-09 2014-10-07 Novellus Systems, Inc. Method for depositing tungsten film with low roughness and low resistivity
US9153486B2 (en) 2013-04-12 2015-10-06 Lam Research Corporation CVD based metal/semiconductor OHMIC contact for high volume manufacturing applications
US9589808B2 (en) 2013-12-19 2017-03-07 Lam Research Corporation Method for depositing extremely low resistivity tungsten
JP6437324B2 (en) * 2014-03-25 2018-12-12 東京エレクトロン株式会社 Method for forming tungsten film and method for manufacturing semiconductor device
US9953984B2 (en) 2015-02-11 2018-04-24 Lam Research Corporation Tungsten for wordline applications
US9613818B2 (en) 2015-05-27 2017-04-04 Lam Research Corporation Deposition of low fluorine tungsten by sequential CVD process
US9978605B2 (en) 2015-05-27 2018-05-22 Lam Research Corporation Method of forming low resistivity fluorine free tungsten film without nucleation
US9754824B2 (en) 2015-05-27 2017-09-05 Lam Research Corporation Tungsten films having low fluorine content
US11348795B2 (en) 2017-08-14 2022-05-31 Lam Research Corporation Metal fill process for three-dimensional vertical NAND wordline
JP7009615B2 (en) * 2018-03-26 2022-01-25 株式会社Kokusai Electric Semiconductor device manufacturing methods, substrate processing methods, substrate processing equipment, and programs
US11549175B2 (en) 2018-05-03 2023-01-10 Lam Research Corporation Method of depositing tungsten and other metals in 3D NAND structures
JP7101204B2 (en) * 2020-01-31 2022-07-14 株式会社Kokusai Electric Semiconductor device manufacturing method, program, substrate processing device and substrate processing method

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2067565C (en) * 1992-04-29 1999-02-16 Ismail T. Emesh Deposition of tungsten
US5306666A (en) 1992-07-24 1994-04-26 Nippon Steel Corporation Process for forming a thin metal film by chemical vapor deposition
JP2684960B2 (en) 1993-07-01 1997-12-03 日本電気株式会社 Method for manufacturing semiconductor device
JPH0794727A (en) 1993-09-21 1995-04-07 Toshiba Corp Method for manufacturing semiconductor device
SG42438A1 (en) * 1995-09-27 1997-08-15 Motorola Inc Process for fabricating a CVD aluminium layer in a semiconductor device
JPH10303149A (en) * 1997-04-23 1998-11-13 Fuji Electric Co Ltd Formation of wiring for semiconductor device
JP4097747B2 (en) * 1997-08-07 2008-06-11 株式会社アルバック Barrier film formation method
KR100274603B1 (en) 1997-10-01 2001-01-15 윤종용 Method and apparatus for fabricating semiconductor device
TW367606B (en) * 1997-11-24 1999-08-21 United Microelectronics Corp Manufacturing method for metal plugs
JPH11307480A (en) 1998-04-10 1999-11-05 Applied Materials Inc Method for reducing stress of blanket tungsten film by chemical vapor deposition
US6200893B1 (en) * 1999-03-11 2001-03-13 Genus, Inc Radical-assisted sequential CVD
US6309966B1 (en) * 1999-09-03 2001-10-30 Motorola, Inc. Apparatus and method of a low pressure, two-step nucleation tungsten deposition
JP3628570B2 (en) * 1999-12-08 2005-03-16 旭化成マイクロシステム株式会社 Method for forming tungsten thin film and method for manufacturing semiconductor device
US6277744B1 (en) * 2000-01-21 2001-08-21 Advanced Micro Devices, Inc. Two-level silane nucleation for blanket tungsten deposition
US6551929B1 (en) * 2000-06-28 2003-04-22 Applied Materials, Inc. Bifurcated deposition process for depositing refractory metal layers employing atomic layer deposition and chemical vapor deposition techniques

Also Published As

Publication number Publication date
KR100479283B1 (en) 2005-03-28
CN1956166A (en) 2007-05-02
JP2008283220A (en) 2008-11-20
CN1295756C (en) 2007-01-17
CN1395743A (en) 2003-02-05
JP5068713B2 (en) 2012-11-07
CN100446218C (en) 2008-12-24
WO2002041379A1 (en) 2002-05-23
US20030003729A1 (en) 2003-01-02
KR20020079783A (en) 2002-10-19
TWI281208B (en) 2007-05-11
US6913996B2 (en) 2005-07-05
JP2004514289A (en) 2004-05-13

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