AU2001237357A1 - Hollow cathode sputter ion source for generating high-intensity ion beams - Google Patents
Hollow cathode sputter ion source for generating high-intensity ion beamsInfo
- Publication number
- AU2001237357A1 AU2001237357A1 AU2001237357A AU3735701A AU2001237357A1 AU 2001237357 A1 AU2001237357 A1 AU 2001237357A1 AU 2001237357 A AU2001237357 A AU 2001237357A AU 3735701 A AU3735701 A AU 3735701A AU 2001237357 A1 AU2001237357 A1 AU 2001237357A1
- Authority
- AU
- Australia
- Prior art keywords
- hollow cathode
- generating high
- intensity
- cathode sputter
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/04—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10010706 | 2000-03-04 | ||
DE2000110706 DE10010706C2 (de) | 2000-03-04 | 2000-03-04 | Hohlkathoden-Sputter-Ionenquelle zur Erzeugung von Ionenstrahlen hoher Intensität |
PCT/EP2001/000996 WO2001067482A1 (de) | 2000-03-04 | 2001-01-31 | Hohlkathoden-sputter-ionenquelle zur erzeugung von ionenstrahlen hoher intensität |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001237357A1 true AU2001237357A1 (en) | 2001-09-17 |
Family
ID=7633575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001237357A Abandoned AU2001237357A1 (en) | 2000-03-04 | 2001-01-31 | Hollow cathode sputter ion source for generating high-intensity ion beams |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1261982A1 (de) |
AU (1) | AU2001237357A1 (de) |
DE (1) | DE10010706C2 (de) |
WO (1) | WO2001067482A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10306936B3 (de) * | 2003-02-19 | 2004-06-24 | Gesellschaft für Schwerionenforschung mbH | Multi-Mode-Metall-Ionenquelle mit der Struktur einer Hohlkathoden-Sputter-Ionenquelle mit radialer Ionenextraktion |
DE102008022145B4 (de) * | 2008-05-05 | 2015-03-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zum Hochleistungs-Puls-Gasfluß-Sputtern |
CN102497717A (zh) * | 2011-11-25 | 2012-06-13 | 北京大学 | 一种用于等离子体装置的磁铁及等离子体装置 |
CN102497721B (zh) * | 2011-11-29 | 2014-04-30 | 北京大学 | 双空心阴极以及双空心阴极等离子体装置和应用 |
DE102016119791A1 (de) * | 2016-10-18 | 2018-04-19 | scia Systems GmbH | Verfahren und Vorrichtung zum Bearbeiten einer Oberfläche eines Substrates mittels eines Teilchenstrahls |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3566185A (en) * | 1969-03-12 | 1971-02-23 | Atomic Energy Commission | Sputter-type penning discharge for metallic ions |
US4344019A (en) * | 1980-11-10 | 1982-08-10 | The United States Of America As Represented By The United States Department Of Energy | Penning discharge ion source with self-cleaning aperture |
JP3034076B2 (ja) * | 1991-04-18 | 2000-04-17 | 日本真空技術株式会社 | 金属イオン源 |
-
2000
- 2000-03-04 DE DE2000110706 patent/DE10010706C2/de not_active Expired - Fee Related
-
2001
- 2001-01-31 EP EP01909713A patent/EP1261982A1/de not_active Withdrawn
- 2001-01-31 WO PCT/EP2001/000996 patent/WO2001067482A1/de not_active Application Discontinuation
- 2001-01-31 AU AU2001237357A patent/AU2001237357A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2001067482A1 (de) | 2001-09-13 |
EP1261982A1 (de) | 2002-12-04 |
DE10010706A1 (de) | 2001-09-13 |
DE10010706C2 (de) | 2002-07-25 |
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