AU2001236894A1 - Acceleration sensor and method of manufacture - Google Patents

Acceleration sensor and method of manufacture

Info

Publication number
AU2001236894A1
AU2001236894A1 AU2001236894A AU3689401A AU2001236894A1 AU 2001236894 A1 AU2001236894 A1 AU 2001236894A1 AU 2001236894 A AU2001236894 A AU 2001236894A AU 3689401 A AU3689401 A AU 3689401A AU 2001236894 A1 AU2001236894 A1 AU 2001236894A1
Authority
AU
Australia
Prior art keywords
manufacture
acceleration sensor
acceleration
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001236894A
Inventor
Gary J. O'brien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of AU2001236894A1 publication Critical patent/AU2001236894A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0888—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values for indicating angular acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
AU2001236894A 2000-02-11 2001-02-08 Acceleration sensor and method of manufacture Abandoned AU2001236894A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/502,806 US6401536B1 (en) 2000-02-11 2000-02-11 Acceleration sensor and method of manufacture
US09502806 2000-02-11
PCT/US2001/004387 WO2001059465A1 (en) 2000-02-11 2001-02-08 Acceleration sensor and method of manufacture

Publications (1)

Publication Number Publication Date
AU2001236894A1 true AU2001236894A1 (en) 2001-08-20

Family

ID=23999501

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001236894A Abandoned AU2001236894A1 (en) 2000-02-11 2001-02-08 Acceleration sensor and method of manufacture

Country Status (5)

Country Link
US (1) US6401536B1 (en)
JP (1) JP4738695B2 (en)
KR (1) KR100767615B1 (en)
AU (1) AU2001236894A1 (en)
WO (1) WO2001059465A1 (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6715352B2 (en) * 2001-06-26 2004-04-06 Microsensors, Inc. Method of designing a flexure system for tuning the modal response of a decoupled micromachined gyroscope and a gyroscoped designed according to the method
US6666092B2 (en) * 2002-02-28 2003-12-23 Delphi Technologies, Inc. Angular accelerometer having balanced inertia mass
US6718826B2 (en) * 2002-02-28 2004-04-13 Delphi Technologies, Inc. Balanced angular accelerometer
US6770506B2 (en) * 2002-12-23 2004-08-03 Motorola, Inc. Release etch method for micromachined sensors
US7122395B2 (en) * 2002-12-23 2006-10-17 Motorola, Inc. Method of forming semiconductor devices through epitaxy
US6916728B2 (en) * 2002-12-23 2005-07-12 Freescale Semiconductor, Inc. Method for forming a semiconductor structure through epitaxial growth
US7005193B2 (en) * 2003-04-29 2006-02-28 Motorola, Inc. Method of adding mass to MEMS structures
US20050235751A1 (en) * 2004-04-27 2005-10-27 Zarabadi Seyed R Dual-axis accelerometer
US7337671B2 (en) 2005-06-03 2008-03-04 Georgia Tech Research Corp. Capacitive microaccelerometers and fabrication methods
US7578189B1 (en) * 2006-05-10 2009-08-25 Qualtre, Inc. Three-axis accelerometers
CN100335906C (en) * 2006-05-16 2007-09-05 北京航空航天大学 Pendulous silicon MEMS angular acceleration transducer
DE102007047592B4 (en) * 2007-10-05 2022-01-05 Robert Bosch Gmbh Accelerometer
US8413509B2 (en) * 2008-04-14 2013-04-09 Freescale Semiconductor, Inc. Spring member for use in a microelectromechanical systems sensor
DE102008001863A1 (en) * 2008-05-19 2009-11-26 Robert Bosch Gmbh Accelerometer with encompassing seismic mass
DE102009002702B4 (en) * 2009-04-28 2018-01-18 Hanking Electronics, Ltd. Micromechanical sensor
DE102009002701B4 (en) * 2009-04-28 2018-01-18 Hanking Electronics, Ltd. Micromechanical sensor
GB2498520A (en) * 2012-01-13 2013-07-24 Secr Defence Accelerometer
US9866200B2 (en) * 2014-10-22 2018-01-09 Microchip Technology Incorporated Multiple coil spring MEMS resonator
US9923545B2 (en) 2014-10-22 2018-03-20 Microchip Technology Incorporated Compound spring MEMS resonators for frequency and timing generation
DE102015211387A1 (en) * 2015-06-19 2016-12-22 Robert Bosch Gmbh Three-axis spin sensor
EP3546954B1 (en) * 2016-01-07 2022-12-14 Analog Devices, Inc. 3-axis angular accelerometer
US10732198B2 (en) 2017-08-09 2020-08-04 Analog Devices, Inc. Integrated linear and angular MEMS accelerometers
CN109212261B (en) * 2018-10-28 2023-11-24 曲靖师范学院 Triaxial threshold accelerometer capable of effectively avoiding false triggering in non-sensitive direction

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4022464C2 (en) * 1990-07-14 2000-12-28 Bosch Gmbh Robert Acceleration sensor
US5233213A (en) 1990-07-14 1993-08-03 Robert Bosch Gmbh Silicon-mass angular acceleration sensor
US5329815A (en) 1991-12-19 1994-07-19 Motorola, Inc. Vibration monolithic gyroscope
US5377544A (en) 1991-12-19 1995-01-03 Motorola, Inc. Rotational vibration gyroscope
US5359893A (en) 1991-12-19 1994-11-01 Motorola, Inc. Multi-axes gyroscope
US5555765A (en) * 1993-02-10 1996-09-17 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
US5450751A (en) 1993-05-04 1995-09-19 General Motors Corporation Microstructure for vibratory gyroscope
JPH09145740A (en) * 1995-09-22 1997-06-06 Denso Corp Acceleration sensor
US5806365A (en) 1996-04-30 1998-09-15 Motorola, Inc. Acceleration sensing device on a support substrate and method of operation
WO1998001722A1 (en) * 1996-07-10 1998-01-15 Wacoh Corporation Angular velocity sensor
US5955668A (en) * 1997-01-28 1999-09-21 Irvine Sensors Corporation Multi-element micro gyro
US5872313A (en) 1997-04-07 1999-02-16 Delco Electronics Corporation Temperature-compensated surface micromachined angular rate sensor

Also Published As

Publication number Publication date
JP4738695B2 (en) 2011-08-03
US6401536B1 (en) 2002-06-11
WO2001059465A1 (en) 2001-08-16
JP2003524163A (en) 2003-08-12
KR20020077679A (en) 2002-10-12
KR100767615B1 (en) 2007-10-18

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