AU2001233057A1 - Patterning of nanocrystalline diamond films for diamond microstructures useful in mems and other devices - Google Patents

Patterning of nanocrystalline diamond films for diamond microstructures useful in mems and other devices

Info

Publication number
AU2001233057A1
AU2001233057A1 AU2001233057A AU3305701A AU2001233057A1 AU 2001233057 A1 AU2001233057 A1 AU 2001233057A1 AU 2001233057 A AU2001233057 A AU 2001233057A AU 3305701 A AU3305701 A AU 3305701A AU 2001233057 A1 AU2001233057 A1 AU 2001233057A1
Authority
AU
Australia
Prior art keywords
diamond
mems
patterning
devices
nanocrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001233057A
Inventor
Orlando Auciello
Hans-Gerd Busmann
Dieter M. Gruen
Alan R. Krauss
Eva-Maria Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Chicago
Original Assignee
University of Chicago
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Chicago filed Critical University of Chicago
Publication of AU2001233057A1 publication Critical patent/AU2001233057A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • C30B29/605—Products containing multiple oriented crystallites, e.g. columnar crystallites

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AU2001233057A 2000-01-27 2001-01-26 Patterning of nanocrystalline diamond films for diamond microstructures useful in mems and other devices Abandoned AU2001233057A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17842400P 2000-01-27 2000-01-27
US60/178,424 2000-01-27
PCT/US2001/002755 WO2001057295A1 (en) 2000-01-27 2001-01-26 Patterning of nanocrystalline diamond films for diamond microstructures useful in mems and other devices

Publications (1)

Publication Number Publication Date
AU2001233057A1 true AU2001233057A1 (en) 2001-08-14

Family

ID=22652507

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001233057A Abandoned AU2001233057A1 (en) 2000-01-27 2001-01-26 Patterning of nanocrystalline diamond films for diamond microstructures useful in mems and other devices

Country Status (3)

Country Link
US (1) US6811612B2 (en)
AU (1) AU2001233057A1 (en)
WO (1) WO2001057295A1 (en)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7128889B2 (en) * 2003-06-26 2006-10-31 Carlisle John A Method to grow carbon thin films consisting entirely of diamond grains 3-5 nm in size and high-energy grain boundaries
JP3624196B1 (en) * 2004-02-20 2005-03-02 株式会社フルヤ金属 Particle dispersion composite and solid electrolyte sensor using the same
US20050224807A1 (en) * 2004-03-25 2005-10-13 Ravi Kramadhati V Low dielectric constant carbon films
US20070257265A1 (en) * 2006-05-03 2007-11-08 The University Of Chicago Use of tungsten interlayer to enhance the initial nucleation and conformality of ultrananocrystalline diamond (UNCD) thin films
US7791201B2 (en) * 2006-11-30 2010-09-07 Uchicago Argonne, Llc Integration of dissimilar materials for advanced multifunctional devices
US20090050824A1 (en) * 2007-06-25 2009-02-26 The University Of Melbourne Method of fabricating a structure from diamond material or diamond-like carbon material
US20090017258A1 (en) * 2007-07-10 2009-01-15 Carlisle John A Diamond film deposition
DE102008035772B4 (en) * 2008-07-31 2015-02-12 Airbus Defence and Space GmbH Particle filter and manufacturing method thereof
JP5403519B2 (en) * 2010-02-22 2014-01-29 独立行政法人物質・材料研究機構 Method for producing crystalline diamond air gap structure
US8525185B2 (en) * 2010-04-07 2013-09-03 Uchicago Argonne, Llc RF-MEMS capacitive switches with high reliability
US8673164B2 (en) * 2011-09-29 2014-03-18 Uchicago Argonne, Llc Simple method to fabricate nano-porous diamond membranes
US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
US10297359B2 (en) 2013-09-19 2019-05-21 Sigray, Inc. X-ray illumination system with multiple target microstructures
US9449781B2 (en) 2013-12-05 2016-09-20 Sigray, Inc. X-ray illuminators with high flux and high flux density
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US9448190B2 (en) 2014-06-06 2016-09-20 Sigray, Inc. High brightness X-ray absorption spectroscopy system
US9570265B1 (en) 2013-12-05 2017-02-14 Sigray, Inc. X-ray fluorescence system with high flux and high flux density
US10269528B2 (en) 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US9594036B2 (en) 2014-02-28 2017-03-14 Sigray, Inc. X-ray surface analysis and measurement apparatus
US9823203B2 (en) 2014-02-28 2017-11-21 Sigray, Inc. X-ray surface analysis and measurement apparatus
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
TWI670831B (en) 2014-09-03 2019-09-01 美商應用材料股份有限公司 Nanocrystalline diamond carbon film for 3d nand hardmask application
US9441940B2 (en) * 2015-01-21 2016-09-13 Uchicago Argonne, Llc Piezoresistive boron doped diamond nanowire
US10352880B2 (en) 2015-04-29 2019-07-16 Sigray, Inc. Method and apparatus for x-ray microscopy
US9484474B1 (en) 2015-07-02 2016-11-01 Uchicago Argonne, Llc Ultrananocrystalline diamond contacts for electronic devices
US9741561B2 (en) 2015-07-10 2017-08-22 Uchicago Argonne, Llc Transparent nanocrystalline diamond coatings and devices
US10295486B2 (en) 2015-08-18 2019-05-21 Sigray, Inc. Detector for X-rays with high spatial and high spectral resolution
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
WO2018175570A1 (en) 2017-03-22 2018-09-27 Sigray, Inc. Method of performing x-ray spectroscopy and x-ray absorption spectrometer system
WO2019043432A1 (en) * 2017-08-30 2019-03-07 Ecole Polytechnique Federale De Lausanne (Epfl) Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production
JP6989091B2 (en) * 2018-02-13 2022-01-05 国立研究開発法人物質・材料研究機構 Diamond Structures, Diamond Cantilever, and Methods for Manufacturing Diamond Structures
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
US10845491B2 (en) 2018-06-04 2020-11-24 Sigray, Inc. Energy-resolving x-ray detection system
GB2591630B (en) 2018-07-26 2023-05-24 Sigray Inc High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
CN112638261A (en) 2018-09-04 2021-04-09 斯格瑞公司 System and method for utilizing filtered x-ray fluorescence
US11056308B2 (en) 2018-09-07 2021-07-06 Sigray, Inc. System and method for depth-selectable x-ray analysis

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5849079A (en) * 1991-11-25 1998-12-15 The University Of Chicago Diamond film growth argon-carbon plasmas
US5772760A (en) * 1991-11-25 1998-06-30 The University Of Chicago Method for the preparation of nanocrystalline diamond thin films
US5989511A (en) * 1991-11-25 1999-11-23 The University Of Chicago Smooth diamond films as low friction, long wear surfaces

Also Published As

Publication number Publication date
US6811612B2 (en) 2004-11-02
WO2001057295A9 (en) 2002-10-31
WO2001057295A1 (en) 2001-08-09
US20040129202A1 (en) 2004-07-08

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