AU2001233057A1 - Patterning of nanocrystalline diamond films for diamond microstructures useful in mems and other devices - Google Patents

Patterning of nanocrystalline diamond films for diamond microstructures useful in mems and other devices

Info

Publication number
AU2001233057A1
AU2001233057A1 AU2001233057A AU3305701A AU2001233057A1 AU 2001233057 A1 AU2001233057 A1 AU 2001233057A1 AU 2001233057 A AU2001233057 A AU 2001233057A AU 3305701 A AU3305701 A AU 3305701A AU 2001233057 A1 AU2001233057 A1 AU 2001233057A1
Authority
AU
Australia
Prior art keywords
diamond
mems
patterning
devices
nanocrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001233057A
Inventor
Orlando Auciello
Hans-Gerd Busmann
Dieter M. Gruen
Alan R. Krauss
Eva-Maria Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Chicago
Original Assignee
University of Chicago
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Chicago filed Critical University of Chicago
Publication of AU2001233057A1 publication Critical patent/AU2001233057A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • C30B29/605—Products containing multiple oriented crystallites, e.g. columnar crystallites
AU2001233057A 2000-01-27 2001-01-26 Patterning of nanocrystalline diamond films for diamond microstructures useful in mems and other devices Abandoned AU2001233057A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17842400P 2000-01-27 2000-01-27
US60/178,424 2000-01-27
PCT/US2001/002755 WO2001057295A1 (en) 2000-01-27 2001-01-26 Patterning of nanocrystalline diamond films for diamond microstructures useful in mems and other devices

Publications (1)

Publication Number Publication Date
AU2001233057A1 true AU2001233057A1 (en) 2001-08-14

Family

ID=22652507

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001233057A Abandoned AU2001233057A1 (en) 2000-01-27 2001-01-26 Patterning of nanocrystalline diamond films for diamond microstructures useful in mems and other devices

Country Status (3)

Country Link
US (1) US6811612B2 (en)
AU (1) AU2001233057A1 (en)
WO (1) WO2001057295A1 (en)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7128889B2 (en) * 2003-06-26 2006-10-31 Carlisle John A Method to grow carbon thin films consisting entirely of diamond grains 3-5 nm in size and high-energy grain boundaries
JP3624196B1 (en) * 2004-02-20 2005-03-02 株式会社フルヤ金属 Particle dispersion composite and solid electrolyte sensor using the same
US20050224807A1 (en) * 2004-03-25 2005-10-13 Ravi Kramadhati V Low dielectric constant carbon films
US20070257265A1 (en) * 2006-05-03 2007-11-08 The University Of Chicago Use of tungsten interlayer to enhance the initial nucleation and conformality of ultrananocrystalline diamond (UNCD) thin films
US7791201B2 (en) * 2006-11-30 2010-09-07 Uchicago Argonne, Llc Integration of dissimilar materials for advanced multifunctional devices
US20090050824A1 (en) * 2007-06-25 2009-02-26 The University Of Melbourne Method of fabricating a structure from diamond material or diamond-like carbon material
US20090017258A1 (en) * 2007-07-10 2009-01-15 Carlisle John A Diamond film deposition
DE102008035772B4 (en) * 2008-07-31 2015-02-12 Airbus Defence and Space GmbH Particle filter and manufacturing method thereof
JP5403519B2 (en) * 2010-02-22 2014-01-29 独立行政法人物質・材料研究機構 Method for producing crystalline diamond air gap structure
US8525185B2 (en) * 2010-04-07 2013-09-03 Uchicago Argonne, Llc RF-MEMS capacitive switches with high reliability
US8673164B2 (en) * 2011-09-29 2014-03-18 Uchicago Argonne, Llc Simple method to fabricate nano-porous diamond membranes
US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
US10416099B2 (en) 2013-09-19 2019-09-17 Sigray, Inc. Method of performing X-ray spectroscopy and X-ray absorption spectrometer system
US9449781B2 (en) 2013-12-05 2016-09-20 Sigray, Inc. X-ray illuminators with high flux and high flux density
US9448190B2 (en) 2014-06-06 2016-09-20 Sigray, Inc. High brightness X-ray absorption spectroscopy system
US10269528B2 (en) 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US9570265B1 (en) 2013-12-05 2017-02-14 Sigray, Inc. X-ray fluorescence system with high flux and high flux density
US10297359B2 (en) 2013-09-19 2019-05-21 Sigray, Inc. X-ray illumination system with multiple target microstructures
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
US9823203B2 (en) 2014-02-28 2017-11-21 Sigray, Inc. X-ray surface analysis and measurement apparatus
US9594036B2 (en) 2014-02-28 2017-03-14 Sigray, Inc. X-ray surface analysis and measurement apparatus
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
TWI656575B (en) * 2014-09-03 2019-04-11 美商應用材料股份有限公司 Nanocrystalline diamond carbon film for 3D NAND hard mask applications
US9441940B2 (en) * 2015-01-21 2016-09-13 Uchicago Argonne, Llc Piezoresistive boron doped diamond nanowire
US10352880B2 (en) 2015-04-29 2019-07-16 Sigray, Inc. Method and apparatus for x-ray microscopy
US9484474B1 (en) 2015-07-02 2016-11-01 Uchicago Argonne, Llc Ultrananocrystalline diamond contacts for electronic devices
US9741561B2 (en) 2015-07-10 2017-08-22 Uchicago Argonne, Llc Transparent nanocrystalline diamond coatings and devices
US10295486B2 (en) 2015-08-18 2019-05-21 Sigray, Inc. Detector for X-rays with high spatial and high spectral resolution
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
CN111417747A (en) * 2017-08-30 2020-07-14 洛桑联邦理工学院 Method for producing single crystal diamond parts for use in the production of individual single crystal mechanical and optical components
JP6989091B2 (en) * 2018-02-13 2022-01-05 国立研究開発法人物質・材料研究機構 Diamond Structures, Diamond Cantilever, and Methods for Manufacturing Diamond Structures
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
WO2019236384A1 (en) 2018-06-04 2019-12-12 Sigray, Inc. Wavelength dispersive x-ray spectrometer
WO2020023408A1 (en) 2018-07-26 2020-01-30 Sigray, Inc. High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
DE112019004433T5 (en) 2018-09-04 2021-05-20 Sigray, Inc. SYSTEM AND PROCEDURE FOR X-RAY FLUORESCENCE WITH FILTERING
DE112019004478T5 (en) 2018-09-07 2021-07-08 Sigray, Inc. SYSTEM AND PROCEDURE FOR X-RAY ANALYSIS WITH SELECTABLE DEPTH

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5989511A (en) * 1991-11-25 1999-11-23 The University Of Chicago Smooth diamond films as low friction, long wear surfaces
US5849079A (en) * 1991-11-25 1998-12-15 The University Of Chicago Diamond film growth argon-carbon plasmas
US5772760A (en) * 1991-11-25 1998-06-30 The University Of Chicago Method for the preparation of nanocrystalline diamond thin films

Also Published As

Publication number Publication date
WO2001057295A1 (en) 2001-08-09
WO2001057295A9 (en) 2002-10-31
US6811612B2 (en) 2004-11-02
US20040129202A1 (en) 2004-07-08

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