AU2001296560A1 - Differential numerical aperture methods and device - Google Patents

Differential numerical aperture methods and device

Info

Publication number
AU2001296560A1
AU2001296560A1 AU2001296560A AU9656001A AU2001296560A1 AU 2001296560 A1 AU2001296560 A1 AU 2001296560A1 AU 2001296560 A AU2001296560 A AU 2001296560A AU 9656001 A AU9656001 A AU 9656001A AU 2001296560 A1 AU2001296560 A1 AU 2001296560A1
Authority
AU
Australia
Prior art keywords
numerical aperture
differential numerical
aperture methods
methods
differential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001296560A
Inventor
John V. Sandusky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanometrics Inc
Original Assignee
Accent Optical Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Accent Optical Technologies Inc filed Critical Accent Optical Technologies Inc
Publication of AU2001296560A1 publication Critical patent/AU2001296560A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/214—Variangle incidence arrangement

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
AU2001296560A 2000-10-03 2001-10-03 Differential numerical aperture methods and device Abandoned AU2001296560A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US23795000P 2000-10-03 2000-10-03
US60237950 2000-10-03
US09/969,939 US6750968B2 (en) 2000-10-03 2001-10-02 Differential numerical aperture methods and device
US09969939 2001-10-02
PCT/US2001/030989 WO2002029374A1 (en) 2000-10-03 2001-10-03 Differential numerical aperture methods and device

Publications (1)

Publication Number Publication Date
AU2001296560A1 true AU2001296560A1 (en) 2002-04-15

Family

ID=26931199

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001296560A Abandoned AU2001296560A1 (en) 2000-10-03 2001-10-03 Differential numerical aperture methods and device

Country Status (8)

Country Link
US (2) US6750968B2 (en)
EP (1) EP1327126A1 (en)
JP (1) JP2004510972A (en)
KR (1) KR20030041147A (en)
CN (1) CN1224829C (en)
AU (1) AU2001296560A1 (en)
IL (2) IL155187A0 (en)
WO (1) WO2002029374A1 (en)

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Also Published As

Publication number Publication date
US20040246481A1 (en) 2004-12-09
US20020039184A1 (en) 2002-04-04
US7053991B2 (en) 2006-05-30
CN1468367A (en) 2004-01-14
IL155187A0 (en) 2003-11-23
CN1224829C (en) 2005-10-26
IL155187A (en) 2006-10-31
EP1327126A1 (en) 2003-07-16
US6750968B2 (en) 2004-06-15
KR20030041147A (en) 2003-05-23
WO2002029374A1 (en) 2002-04-11
JP2004510972A (en) 2004-04-08

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