AU2001227296A1 - Anode assembly for plating and planarizing a conductive layer - Google Patents

Anode assembly for plating and planarizing a conductive layer

Info

Publication number
AU2001227296A1
AU2001227296A1 AU2001227296A AU2729601A AU2001227296A1 AU 2001227296 A1 AU2001227296 A1 AU 2001227296A1 AU 2001227296 A AU2001227296 A AU 2001227296A AU 2729601 A AU2729601 A AU 2729601A AU 2001227296 A1 AU2001227296 A1 AU 2001227296A1
Authority
AU
Australia
Prior art keywords
planarizing
plating
conductive layer
anode assembly
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001227296A
Inventor
Homayoun Talieh
Cyprian Uzoh
Konstantin Volodarsky
Rimma Volodarsky
Douglas W. Young
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASM Nutool Inc
Original Assignee
ASM Nutool Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASM Nutool Inc filed Critical ASM Nutool Inc
Publication of AU2001227296A1 publication Critical patent/AU2001227296A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/10—Electrodes, e.g. composition, counter electrode
    • C25D17/14—Electrodes, e.g. composition, counter electrode for pad-plating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)
AU2001227296A 2000-05-11 2000-12-20 Anode assembly for plating and planarizing a conductive layer Abandoned AU2001227296A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09568584 2000-05-11
US09/568,584 US6478936B1 (en) 2000-05-11 2000-05-11 Anode assembly for plating and planarizing a conductive layer
PCT/US2000/034536 WO2001086031A1 (en) 2000-05-11 2000-12-20 Anode assembly for plating and planarizing a conductive layer

Publications (1)

Publication Number Publication Date
AU2001227296A1 true AU2001227296A1 (en) 2001-11-20

Family

ID=24271871

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001227296A Abandoned AU2001227296A1 (en) 2000-05-11 2000-12-20 Anode assembly for plating and planarizing a conductive layer

Country Status (8)

Country Link
US (2) US6478936B1 (en)
EP (1) EP1287185A4 (en)
JP (1) JP2003532798A (en)
KR (1) KR100741197B1 (en)
CN (1) CN1454266A (en)
AU (1) AU2001227296A1 (en)
TW (1) TW543104B (en)
WO (1) WO2001086031A1 (en)

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Also Published As

Publication number Publication date
US6773576B2 (en) 2004-08-10
JP2003532798A (en) 2003-11-05
US20030015435A1 (en) 2003-01-23
EP1287185A1 (en) 2003-03-05
EP1287185A4 (en) 2003-07-30
CN1454266A (en) 2003-11-05
KR20020093145A (en) 2002-12-12
TW543104B (en) 2003-07-21
US6478936B1 (en) 2002-11-12
KR100741197B1 (en) 2007-07-19
WO2001086031A1 (en) 2001-11-15

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