AU1411800A - Wafer transfer device - Google Patents

Wafer transfer device

Info

Publication number
AU1411800A
AU1411800A AU14118/00A AU1411800A AU1411800A AU 1411800 A AU1411800 A AU 1411800A AU 14118/00 A AU14118/00 A AU 14118/00A AU 1411800 A AU1411800 A AU 1411800A AU 1411800 A AU1411800 A AU 1411800A
Authority
AU
Australia
Prior art keywords
transfer device
wafer transfer
wafer
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU14118/00A
Inventor
Tomoo Kato
Tatsuo Nirei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Publication of AU1411800A publication Critical patent/AU1411800A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67271—Sorting devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AU14118/00A 1998-11-30 1999-11-29 Wafer transfer device Abandoned AU1411800A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP33933298A JP3573634B2 (en) 1998-11-30 1998-11-30 Substrate transfer device
JP10/339332 1998-11-30
PCT/JP1999/006660 WO2000033377A1 (en) 1998-11-30 1999-11-29 Wafer transfer device

Publications (1)

Publication Number Publication Date
AU1411800A true AU1411800A (en) 2000-06-19

Family

ID=18326458

Family Applications (1)

Application Number Title Priority Date Filing Date
AU14118/00A Abandoned AU1411800A (en) 1998-11-30 1999-11-29 Wafer transfer device

Country Status (4)

Country Link
JP (1) JP3573634B2 (en)
AU (1) AU1411800A (en)
TW (1) TW445564B (en)
WO (1) WO2000033377A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4091380B2 (en) 2002-08-29 2008-05-28 東京エレクトロン株式会社 Load port compatible with multiple types of cassettes containing substrates to be processed
JP2018107312A (en) * 2016-12-27 2018-07-05 株式会社ディスコ Processing device
JP7105629B2 (en) * 2018-06-20 2022-07-25 東京エレクトロン株式会社 Automatic teaching method and control device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0724279B2 (en) * 1987-09-08 1995-03-15 東京エレクトロン東北株式会社 Wafer transfer device
JPH0424936A (en) * 1990-05-15 1992-01-28 Tokyo Electron Ltd Prove device
JP3674063B2 (en) * 1994-06-21 2005-07-20 東芝機械株式会社 Wafer transfer device
JPH09139415A (en) * 1995-11-14 1997-05-27 Nikon Corp Wafer housing device

Also Published As

Publication number Publication date
WO2000033377A1 (en) 2000-06-08
JP3573634B2 (en) 2004-10-06
TW445564B (en) 2001-07-11
JP2000164676A (en) 2000-06-16

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase