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Priority claimed from JP61155059Aexternal-prioritypatent/JPS6314086A/ja
Priority claimed from JP61188589Aexternal-prioritypatent/JPS6346389A/ja
Priority claimed from JP61214028Aexternal-prioritypatent/JPS6373091A/ja
Application filed by Ebara CorpfiledCriticalEbara Corp
Priority claimed from EP87100740Aexternal-prioritypatent/EP0230309B1/de
Application grantedgrantedCritical
Publication of ATE95289T1publicationCriticalpatent/ATE95289T1/de