ATE87640T1 - Verfahren zur herstellung von polysilazanen und silicium-nitriden. - Google Patents

Verfahren zur herstellung von polysilazanen und silicium-nitriden.

Info

Publication number
ATE87640T1
ATE87640T1 AT87104014T AT87104014T ATE87640T1 AT E87640 T1 ATE87640 T1 AT E87640T1 AT 87104014 T AT87104014 T AT 87104014T AT 87104014 T AT87104014 T AT 87104014T AT E87640 T1 ATE87640 T1 AT E87640T1
Authority
AT
Austria
Prior art keywords
sub
polymer
amine
carbon atoms
silicon nitride
Prior art date
Application number
AT87104014T
Other languages
English (en)
Inventor
Roswell Easton King Iii
Bernard Kanner
Steven Philip Hopper
Curtis Louis Schilling Jr
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Application granted granted Critical
Publication of ATE87640T1 publication Critical patent/ATE87640T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
    • C08G77/62—Nitrogen atoms
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/589—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/10—Compounds having one or more C—Si linkages containing nitrogen having a Si-N linkage

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Structural Engineering (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Silicon Polymers (AREA)
  • Ceramic Products (AREA)
  • Inorganic Fibers (AREA)
AT87104014T 1986-03-19 1987-03-18 Verfahren zur herstellung von polysilazanen und silicium-nitriden. ATE87640T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/841,545 US4675424A (en) 1986-03-19 1986-03-19 Method for making polysilazanes
EP87104014A EP0238078B1 (de) 1986-03-19 1987-03-18 Verfahren zur Herstellung von Polysilazanen und Silicium-Nitriden

Publications (1)

Publication Number Publication Date
ATE87640T1 true ATE87640T1 (de) 1993-04-15

Family

ID=25285149

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87104014T ATE87640T1 (de) 1986-03-19 1987-03-18 Verfahren zur herstellung von polysilazanen und silicium-nitriden.

Country Status (6)

Country Link
US (1) US4675424A (de)
EP (1) EP0238078B1 (de)
JP (1) JPS62225534A (de)
AT (1) ATE87640T1 (de)
CA (1) CA1256632A (de)
DE (1) DE3785065T2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5008422A (en) * 1985-04-26 1991-04-16 Sri International Polysilazanes and related compositions, processes and uses
FR2590580B1 (fr) * 1985-11-28 1988-05-13 Rhone Poulenc Spec Chim Procede de traitement catalytique d'un polysilazane comportant en moyenne au moins deux groupes hydrocarbone a insaturation aliphatique par molecule
US5120686A (en) * 1985-12-20 1992-06-09 The Dexter Corporation Method of preparing a polysilazane
US5166104A (en) * 1986-02-12 1992-11-24 Toa Nenryo Kogyo Kabushiki Kaisha Polysiloxazanes, silicon oxynitride fibers and processes for producing same
JPH0618885B2 (ja) * 1986-02-12 1994-03-16 東燃株式会社 ポリシロキサザンおよびその製法
JPS62290730A (ja) * 1986-06-10 1987-12-17 Shin Etsu Chem Co Ltd 有機シラザン重合体の製造方法
US4916200A (en) * 1987-06-08 1990-04-10 Dow Corning Corporation Silane modified polysilacyclobutasilazanes
US4861569A (en) * 1987-08-13 1989-08-29 Petroleum Energy Center Reformed, inorganic polysilazane and method of producing same
US4895889A (en) * 1988-05-12 1990-01-23 Ethyl Corporation Preceramic compositions
DE3832933A1 (de) * 1988-09-28 1990-03-29 Wacker Chemie Gmbh Verfahren zur herstellung von polysilazanen
US4929742A (en) * 1988-11-28 1990-05-29 Dow Corning Corporation Silane modified polysilacyclobutasilazanes
US5189132A (en) * 1988-12-03 1993-02-23 Hoechst Aktiengesellschaft Polymeric hydridochlorosilazanes, process for their preparation, ceramic materials containing silicon nitride which can be manufactured therefrom, and their manufacture
US5097364A (en) * 1988-12-12 1992-03-17 Mitsubishi Denki Kabushiki Kaisha Magnetic recording and reproducing apparatus and method of recording and reproducing
US4929704A (en) * 1988-12-20 1990-05-29 Hercules Incorporated Isocyanate- and isothiocyanate-modified polysilazane ceramic precursors
FR2642431A1 (fr) * 1989-01-30 1990-08-03 Rhone Poulenc Chimie Procede de reticulation de polysilazanes
US5198519A (en) * 1991-04-25 1993-03-30 The Standard Oil Company Silazane polymers and method of making same
US5612414A (en) * 1993-11-05 1997-03-18 Lanxide Technology Company, Lp Organic/inorganic polymers
US5616650A (en) * 1993-11-05 1997-04-01 Lanxide Technology Company, Lp Metal-nitrogen polymer compositions comprising organic electrophiles
EP3049499B1 (de) 2013-09-27 2020-07-22 L'air Liquide, Société Anonyme Pour L'Étude Et L'exploitation Des Procédés Georges Claude Aminsubstituierte trisilylamin- und tridisilylamin-verbindungen
US11124876B2 (en) 2015-03-30 2021-09-21 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Si-containing film forming precursors and methods of using the same
US9777025B2 (en) 2015-03-30 2017-10-03 L'Air Liquide, Société pour l'Etude et l'Exploitation des Procédés Georges Claude Si-containing film forming precursors and methods of using the same
US9593210B1 (en) * 2015-06-03 2017-03-14 General Electric Company Methods of preparing polysilazane resin with low halogen content
TWI754626B (zh) * 2015-12-18 2022-02-11 中國大陸商南大光電半導體材料有限公司 高純度三矽烷胺、製造方法、及用途
US10192734B2 (en) 2016-12-11 2019-01-29 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploration des Procédés Georges Claude Short inorganic trisilylamine-based polysilazanes for thin film deposition

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4404153A (en) * 1981-01-15 1983-09-13 Dow Corning Corporation Process for the preparation of poly(disilyl)silazane polymers and the polymers therefrom
US4540803A (en) * 1983-11-28 1985-09-10 Dow Corning Corporation Hydrosilazane polymers from [R3 Si]2 NH and HSiCl3
US4482669A (en) * 1984-01-19 1984-11-13 Massachusetts Institute Of Technology Preceramic organosilazane polymers
US4482689A (en) * 1984-03-12 1984-11-13 Dow Corning Corporation Process for the preparation of polymetallo(disily)silazane polymers and the polymers therefrom
US4535007A (en) * 1984-07-02 1985-08-13 Dow Corning Corporation Silicon nitride-containing ceramics
JPS61287930A (ja) * 1985-06-17 1986-12-18 Chisso Corp ポリシラザンの製造方法
JPS61295274A (ja) * 1985-06-24 1986-12-26 チッソ株式会社 セラミツク成形体の製造方法

Also Published As

Publication number Publication date
CA1256632A (en) 1989-06-27
DE3785065D1 (de) 1993-05-06
JPH0460492B2 (de) 1992-09-28
DE3785065T2 (de) 1993-07-08
EP0238078A3 (en) 1990-04-11
EP0238078B1 (de) 1993-03-31
EP0238078A2 (de) 1987-09-23
JPS62225534A (ja) 1987-10-03
US4675424A (en) 1987-06-23

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Legal Events

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