ATE6946T1 - Beschichtungsvorrichtung. - Google Patents

Beschichtungsvorrichtung.

Info

Publication number
ATE6946T1
ATE6946T1 AT80102361T AT80102361T ATE6946T1 AT E6946 T1 ATE6946 T1 AT E6946T1 AT 80102361 T AT80102361 T AT 80102361T AT 80102361 T AT80102361 T AT 80102361T AT E6946 T1 ATE6946 T1 AT E6946T1
Authority
AT
Austria
Prior art keywords
rotors
rotor
housing
rotation
substrate carrying
Prior art date
Application number
AT80102361T
Other languages
English (en)
Inventor
Richard Ian Seddon
Original Assignee
Optical Coating Laboratory, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optical Coating Laboratory, Inc. filed Critical Optical Coating Laboratory, Inc.
Application granted granted Critical
Publication of ATE6946T1 publication Critical patent/ATE6946T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating Apparatus (AREA)
  • General Preparation And Processing Of Foods (AREA)
  • Formation And Processing Of Food Products (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
AT80102361T 1979-05-02 1980-04-30 Beschichtungsvorrichtung. ATE6946T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/035,396 US4276855A (en) 1979-05-02 1979-05-02 Coating apparatus
EP80102361A EP0018641B1 (de) 1979-05-02 1980-04-30 Beschichtungsvorrichtung

Publications (1)

Publication Number Publication Date
ATE6946T1 true ATE6946T1 (de) 1984-04-15

Family

ID=21882423

Family Applications (1)

Application Number Title Priority Date Filing Date
AT80102361T ATE6946T1 (de) 1979-05-02 1980-04-30 Beschichtungsvorrichtung.

Country Status (6)

Country Link
US (1) US4276855A (de)
EP (1) EP0018641B1 (de)
JP (1) JPS5929110B2 (de)
AT (1) ATE6946T1 (de)
CA (1) CA1146348A (de)
DE (1) DE3067319D1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4390571A (en) * 1981-06-30 1983-06-28 International Business Machines Corporation Boatless point source evaporation method
CA1264025A (en) * 1987-05-29 1989-12-27 James A.E. Bell Apparatus and process for coloring objects by plasma coating
US6413436B1 (en) * 1999-01-27 2002-07-02 Semitool, Inc. Selective treatment of the surface of a microelectronic workpiece
US6423642B1 (en) * 1998-03-13 2002-07-23 Semitool, Inc. Reactor for processing a semiconductor wafer
US20050217707A1 (en) * 1998-03-13 2005-10-06 Aegerter Brian K Selective processing of microelectronic workpiece surfaces
US7438788B2 (en) 1999-04-13 2008-10-21 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
US7264698B2 (en) 1999-04-13 2007-09-04 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
JP4288010B2 (ja) 1999-04-13 2009-07-01 セミトゥール・インコーポレイテッド 処理流体の流れ具合を向上させる処理チャンバを備えた加工物処理装置
AU2001282879A1 (en) 2000-07-08 2002-01-21 Semitool, Inc. Methods and apparatus for processing microelectronic workpieces using metrology
WO2003018874A2 (en) * 2001-08-31 2003-03-06 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
US7163586B2 (en) * 2003-11-12 2007-01-16 Specialty Coating Systems, Inc. Vapor deposition apparatus

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD91174A (de) *
US2912862A (en) * 1953-12-09 1959-11-17 Leeds & Northrup Co Radiation measurement of non-opaque bodies
US2909924A (en) * 1954-12-15 1959-10-27 Du Pont Radiation temperature measurement
DE1023652B (de) * 1956-04-28 1958-01-30 Balzers Geraeteverkaufsgesells Haltevorrichtung mit wendbarem Traeger fuer Gegenstaende, welche im Vakuum mit duennen Schichten belegt werden sollen
GB1017741A (en) * 1963-01-22 1966-01-19 Lignes Telegraph Telephon Improvements relating to vacuum coating processes
GB1157088A (en) * 1965-09-24 1969-07-02 Plessey Co Ltd Improvements in or relating to Vacuum Evaporation Processes and apparatus therefor
US3991707A (en) * 1968-08-06 1976-11-16 Optical Coating Laboratory, Inc. Vapor deposition apparatus with mask means
SE335294B (de) * 1969-06-13 1971-05-17 Aga Ab
US3643625A (en) * 1969-10-07 1972-02-22 Carl Herrmann Associates Inc Thin-film deposition apparatus
NL7205670A (de) * 1972-03-16 1973-09-18
US3858547A (en) * 1973-12-14 1975-01-07 Nils H Bergfelt Coating machine having an adjustable rotation system
DD117894A1 (de) * 1975-02-24 1976-02-05
CH599982A5 (de) * 1975-09-02 1978-06-15 Balzers Patent Beteilig Ag
CH626654A5 (en) * 1977-03-17 1981-11-30 Balzers Hochvakuum Vacuum vapour deposition system

Also Published As

Publication number Publication date
DE3067319D1 (en) 1984-05-10
CA1146348A (en) 1983-05-17
JPS5929110B2 (ja) 1984-07-18
EP0018641B1 (de) 1984-04-04
JPS55154572A (en) 1980-12-02
EP0018641A1 (de) 1980-11-12
US4276855A (en) 1981-07-07

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties