ATE61499T1 - Gaslaser mit thermisch stabiler optischer halterung. - Google Patents

Gaslaser mit thermisch stabiler optischer halterung.

Info

Publication number
ATE61499T1
ATE61499T1 AT86100790T AT86100790T ATE61499T1 AT E61499 T1 ATE61499 T1 AT E61499T1 AT 86100790 T AT86100790 T AT 86100790T AT 86100790 T AT86100790 T AT 86100790T AT E61499 T1 ATE61499 T1 AT E61499T1
Authority
AT
Austria
Prior art keywords
housing
gas
mirrors
plates
optical resonator
Prior art date
Application number
AT86100790T
Other languages
English (en)
Inventor
Ethan D Hoag
Original Assignee
American Laser Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Laser Corp filed Critical American Laser Corp
Application granted granted Critical
Publication of ATE61499T1 publication Critical patent/ATE61499T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Semiconductor Lasers (AREA)
AT86100790T 1985-06-06 1986-01-22 Gaslaser mit thermisch stabiler optischer halterung. ATE61499T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/741,756 US4686685A (en) 1985-06-06 1985-06-06 Gas laser having thermally stable optical mount
EP86100790A EP0205729B1 (de) 1985-06-06 1986-01-22 Gaslaser mit thermisch stabiler optischer Halterung

Publications (1)

Publication Number Publication Date
ATE61499T1 true ATE61499T1 (de) 1991-03-15

Family

ID=24982044

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86100790T ATE61499T1 (de) 1985-06-06 1986-01-22 Gaslaser mit thermisch stabiler optischer halterung.

Country Status (5)

Country Link
US (1) US4686685A (de)
EP (1) EP0205729B1 (de)
JP (1) JPH084161B2 (de)
AT (1) ATE61499T1 (de)
DE (1) DE3677825D1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4760581A (en) * 1986-05-08 1988-07-26 Laser Corporation Of America Laser oscillating apparatus
JP2673510B2 (ja) * 1987-03-19 1997-11-05 株式会社小松製作所 エキシマレーザ装置
DE3813951A1 (de) * 1988-04-26 1989-11-09 Heraeus Gmbh W C Laser mit einem multipass-resonator
US5214658A (en) * 1990-07-27 1993-05-25 Ion Laser Technology Mixed gas ion laser
FR2772650B1 (fr) * 1997-12-23 2000-07-28 Roquefeuil Hugues De Procede de nettoyage photonique et dispositif convenant a sa mise en oeuvre.
US6493375B1 (en) * 2000-02-22 2002-12-10 Tuilaser Ag Adjustable mounting unit for an optical element of a gas laser
US6782029B1 (en) 2000-02-22 2004-08-24 Tuilaser Ag Dedusting unit for a laser optical element of a gas laser and method for assembling
US6603790B1 (en) 2000-02-22 2003-08-05 Hans Kodeda Gas laser and a dedusting unit thereof
US6859482B1 (en) * 2000-02-22 2005-02-22 Tuilaser Ag Modular gas laser discharge unit
US6804284B1 (en) 2000-02-22 2004-10-12 Tuilaser Ag Optical element holding and extraction device
US6480517B1 (en) 2000-02-22 2002-11-12 Tuilaser Ag Shadow device for a gas laser
US6522679B1 (en) * 2000-02-22 2003-02-18 Tuilaser Gas laser discharge unit
US6668126B2 (en) * 2001-05-17 2003-12-23 3M Innovative Properties Company Temperature stabilized optical fiber package
DE602004027429D1 (de) * 2003-02-12 2010-07-15 Coherent Gmbh Elementensatz zur chirurgischen Ablation von Augengewebe
JP2013207004A (ja) * 2012-03-27 2013-10-07 Gigaphoton Inc レーザ装置
JP5985059B2 (ja) * 2013-07-18 2016-09-06 三菱電機株式会社 ガスレーザ装置
US10153215B2 (en) 2016-08-04 2018-12-11 Kla-Tencor Corporation Oven enclosure for optical components with integrated purge gas pre-heater
US11670490B2 (en) 2017-09-29 2023-06-06 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated circuit fabrication system with adjustable gas injector

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099143A (en) * 1977-01-14 1978-07-04 Universal Laser Corp. Gas recirculating stabilized laser
EP0001032B1 (de) * 1977-08-18 1981-02-25 ELTRO GmbH Gesellschaft für Strahlungstechnik Gaslaser mit transversaler Anregung
EP0065761B1 (de) * 1981-05-29 1985-11-27 Battelle-Institut e.V. Laseranordnung
JPS5860957A (ja) * 1981-10-05 1983-04-11 Mitsui Toatsu Chem Inc 動物用飼料添加剤、又は飼料
US4578792A (en) * 1982-09-30 1986-03-25 Metalworking Lasers International Ltd. High-power lasers
JPS5963785A (ja) * 1982-10-01 1984-04-11 Matsushita Electric Ind Co Ltd ガスレ−ザ装置
JPH06101596B2 (ja) * 1983-02-21 1994-12-12 株式会社小松製作所 クロスフロ−型レ−ザ装置
JPS59207676A (ja) * 1983-05-11 1984-11-24 Daihen Corp ガスレ−ザ装置
US4618960A (en) * 1984-01-23 1986-10-21 Laser Science, Inc. Gas laser with acoustic baffle

Also Published As

Publication number Publication date
US4686685A (en) 1987-08-11
DE3677825D1 (de) 1991-04-11
EP0205729B1 (de) 1991-03-06
JPS61284981A (ja) 1986-12-15
EP0205729A2 (de) 1986-12-30
JPH084161B2 (ja) 1996-01-17
EP0205729A3 (en) 1987-09-16

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties