ATE544883T1 - Vorrichtung zur herstellung eines blocks aus kristallinem material mit modulation der wärmeleitfähigkeit - Google Patents
Vorrichtung zur herstellung eines blocks aus kristallinem material mit modulation der wärmeleitfähigkeitInfo
- Publication number
- ATE544883T1 ATE544883T1 AT08354045T AT08354045T ATE544883T1 AT E544883 T1 ATE544883 T1 AT E544883T1 AT 08354045 T AT08354045 T AT 08354045T AT 08354045 T AT08354045 T AT 08354045T AT E544883 T1 ATE544883 T1 AT E544883T1
- Authority
- AT
- Austria
- Prior art keywords
- crucible
- unit
- thermal conductivity
- plates
- producing
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/003—Heating or cooling of the melt or the crystallised material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1092—Shape defined by a solid member other than seed or product [e.g., Bridgman-Stockbarger]
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0704979A FR2918675B1 (fr) | 2007-07-10 | 2007-07-10 | Dispositif de fabrication d'un bloc de materiau cristallin avec modulation de la conductivite thermique. |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE544883T1 true ATE544883T1 (de) | 2012-02-15 |
Family
ID=38786968
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT08354045T ATE544883T1 (de) | 2007-07-10 | 2008-06-26 | Vorrichtung zur herstellung eines blocks aus kristallinem material mit modulation der wärmeleitfähigkeit |
Country Status (6)
Country | Link |
---|---|
US (1) | US8172944B2 (de) |
EP (1) | EP2014803B1 (de) |
JP (1) | JP5405063B2 (de) |
AT (1) | ATE544883T1 (de) |
ES (1) | ES2382493T3 (de) |
FR (1) | FR2918675B1 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2940806B1 (fr) * | 2009-01-05 | 2011-04-08 | Commissariat Energie Atomique | Procede de solidification de semi-conducteur avec ajout de charges de semi-conducteur dope au cours de la cristallisation |
FR2968127B1 (fr) | 2010-11-29 | 2013-11-22 | Commissariat Energie Atomique | Échangeur thermique d'un système de solidification et/ou de cristallisation d'un matériau semi-conducteur |
RU2560439C1 (ru) * | 2011-08-01 | 2015-08-20 | ДжиТиЭйТи Корпорейшн | Теплообменник жидкостного охлаждения |
FR2979638A1 (fr) * | 2011-09-05 | 2013-03-08 | Commissariat Energie Atomique | Dispositif de fabrication de materiau cristallin a partir d'un creuset a resistance thermique non uniforme |
WO2013040219A1 (en) * | 2011-09-14 | 2013-03-21 | Memc Singapore Pte, Ltd. | Directional solidification furnace having movable heat exchangers |
KR101362362B1 (ko) * | 2012-01-02 | 2014-02-13 | 비아이신소재 주식회사 | 사파이어 잉곳 제조용 성장로의 하부 실드 |
TWM448496U (zh) * | 2012-09-04 | 2013-03-11 | C Sun Mfg Ltd | 晶體生長裝置 |
US20150090181A1 (en) * | 2013-09-30 | 2015-04-02 | Gt Crystal Systems, Llc | Automated heat exchanger alignment |
GB201319671D0 (en) * | 2013-11-07 | 2013-12-25 | Ebner Ind Ofenbau | Controlling a temperature of a crucible inside an oven |
DE102014102980B4 (de) * | 2014-03-06 | 2017-12-21 | Ald Vacuum Technologies Gmbh | Hybridtiegel zur Kristallisation von Materialien, Verwendung des Hybridtiegels, Verfahren zur Herstellung von kristallinem Material sowie kristallines Produkt |
JP6641317B2 (ja) * | 2017-03-02 | 2020-02-05 | 不二越機械工業株式会社 | 単結晶製造装置 |
JP6989855B2 (ja) * | 2019-10-24 | 2022-01-12 | 不二越機械工業株式会社 | β-Ga2O3単結晶製造装置およびこれに用いる発熱体 |
JP2023064374A (ja) * | 2021-10-26 | 2023-05-11 | 株式会社ノベルクリスタルテクノロジー | 単結晶育成装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3898051A (en) * | 1973-12-28 | 1975-08-05 | Crystal Syst | Crystal growing |
US4015657A (en) * | 1975-09-03 | 1977-04-05 | Dmitry Andreevich Petrov | Device for making single-crystal products |
GB2041236A (en) * | 1979-01-18 | 1980-09-10 | Crystal Syst | Method and apparatus for growing crystals |
DE3323896A1 (de) * | 1983-07-02 | 1985-01-17 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren und vorrichtung zum gerichteten erstarren von schmelzen |
FR2553232B1 (fr) * | 1983-10-05 | 1985-12-27 | Comp Generale Electricite | Procede et dispositif pour elaborer un lingot d'un materiau semi-conducteur polycristallin |
JP3523986B2 (ja) * | 1997-07-02 | 2004-04-26 | シャープ株式会社 | 多結晶半導体の製造方法および製造装置 |
US6572700B2 (en) * | 1997-12-26 | 2003-06-03 | Sumitomo Electric Industries, Ltd. | Semiconductor crystal, and method and apparatus of production thereof |
JP2001048696A (ja) * | 1999-08-06 | 2001-02-20 | Mitsubishi Materials Corp | 結晶シリコン製造装置 |
FR2853913B1 (fr) | 2003-04-17 | 2006-09-29 | Apollon Solar | Creuset pour un dispositif de fabrication d'un bloc de materiau cristallin et procede de fabrication |
US7293994B2 (en) * | 2005-12-08 | 2007-11-13 | International Business Machines Corporation | Method and apparatus for electrically connecting two substrates using a resilient wire bundle captured in an aperture of an interposer by a retention member |
US8057598B2 (en) * | 2006-06-13 | 2011-11-15 | Young Sang Cho | Manufacturing equipment for polysilicon ingot |
-
2007
- 2007-07-10 FR FR0704979A patent/FR2918675B1/fr not_active Expired - Fee Related
-
2008
- 2008-06-26 EP EP08354045A patent/EP2014803B1/de active Active
- 2008-06-26 AT AT08354045T patent/ATE544883T1/de active
- 2008-06-26 ES ES08354045T patent/ES2382493T3/es active Active
- 2008-07-03 US US12/216,420 patent/US8172944B2/en active Active
- 2008-07-10 JP JP2008180025A patent/JP5405063B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20090013925A1 (en) | 2009-01-15 |
ES2382493T3 (es) | 2012-06-08 |
US8172944B2 (en) | 2012-05-08 |
FR2918675A1 (fr) | 2009-01-16 |
EP2014803A1 (de) | 2009-01-14 |
JP2009018987A (ja) | 2009-01-29 |
FR2918675B1 (fr) | 2009-08-28 |
EP2014803B1 (de) | 2012-02-08 |
JP5405063B2 (ja) | 2014-02-05 |
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