ATE515678T1 - Optisches messgerät und messverfahren - Google Patents
Optisches messgerät und messverfahrenInfo
- Publication number
- ATE515678T1 ATE515678T1 AT10159535T AT10159535T ATE515678T1 AT E515678 T1 ATE515678 T1 AT E515678T1 AT 10159535 T AT10159535 T AT 10159535T AT 10159535 T AT10159535 T AT 10159535T AT E515678 T1 ATE515678 T1 AT E515678T1
- Authority
- AT
- Austria
- Prior art keywords
- light
- measurement
- received
- optical measuring
- basis
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 2
- 238000005259 measurement Methods 0.000 abstract 7
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009098113A JP2010249604A (ja) | 2009-04-14 | 2009-04-14 | 光学式測定装置、光学式測定方法、及び光学式測定処理プログラム |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE515678T1 true ATE515678T1 (de) | 2011-07-15 |
Family
ID=42126385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT10159535T ATE515678T1 (de) | 2009-04-14 | 2010-04-09 | Optisches messgerät und messverfahren |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7948642B2 (de) |
| EP (1) | EP2241855B1 (de) |
| JP (1) | JP2010249604A (de) |
| AT (1) | ATE515678T1 (de) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102927920A (zh) * | 2012-10-31 | 2013-02-13 | 昆山允可精密工业技术有限公司 | 圆柱材测量装置 |
| JP6178617B2 (ja) | 2013-05-20 | 2017-08-09 | 株式会社ミツトヨ | 光学式測定装置 |
| JP6862303B2 (ja) * | 2017-06-30 | 2021-04-21 | 株式会社ミツトヨ | 光学測定装置 |
| EP3450097A1 (de) | 2017-09-05 | 2019-03-06 | Renishaw PLC | Otische vorrichtung und optisches verfahren zur kontaktlosen werkzeugeinrichtung |
| EP3537100B1 (de) * | 2018-03-01 | 2020-08-05 | Mitutoyo Corporation | Verfahren und vorrichtungen zur brechungsindexmessung eines transparenten rohrs |
| JP7240937B2 (ja) * | 2019-04-05 | 2023-03-16 | 株式会社ミツトヨ | 光学式測定装置および光学式測定方法 |
| JP7503465B2 (ja) | 2020-09-23 | 2024-06-20 | 株式会社ミツトヨ | 光学式測定装置および光学式測定方法 |
| JP7478084B2 (ja) * | 2020-11-20 | 2024-05-02 | 株式会社キーエンス | 光学測定装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3905705A (en) * | 1972-01-31 | 1975-09-16 | Techmet Co | Optical measuring apparatus |
| US4007992A (en) * | 1975-06-02 | 1977-02-15 | Techmet Company | Light beam shape control in optical measuring apparatus |
| JPH06249618A (ja) | 1993-03-01 | 1994-09-09 | Mitsutoyo Corp | 光学式寸法測定装置 |
| JPH0915156A (ja) * | 1995-06-28 | 1997-01-17 | Kdk Corp | 分光測定方法及び測定装置 |
| JP4191953B2 (ja) | 2002-05-09 | 2008-12-03 | 株式会社ミツトヨ | レ−ザ走査型寸法測定機の校正方法 |
| JP2006038487A (ja) * | 2004-07-22 | 2006-02-09 | Mitsutoyo Corp | 光学式測定装置 |
-
2009
- 2009-04-14 JP JP2009098113A patent/JP2010249604A/ja not_active Withdrawn
-
2010
- 2010-04-09 EP EP10159535A patent/EP2241855B1/de not_active Not-in-force
- 2010-04-09 AT AT10159535T patent/ATE515678T1/de not_active IP Right Cessation
- 2010-04-13 US US12/759,159 patent/US7948642B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US20100259769A1 (en) | 2010-10-14 |
| US7948642B2 (en) | 2011-05-24 |
| JP2010249604A (ja) | 2010-11-04 |
| EP2241855B1 (de) | 2011-07-06 |
| EP2241855A1 (de) | 2010-10-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ATE515678T1 (de) | Optisches messgerät und messverfahren | |
| ATE520005T1 (de) | Vorrichtung und verfahren zur optischen distanzmessung | |
| ATE493632T1 (de) | Vorrichtung zur dreidimensionalen optischen vermessung | |
| EP2482040A3 (de) | Optischer Kodierer mit Fehlausrichtungserkennung und damit assoziiertes Anpassverfahren | |
| FR2930334B1 (fr) | Dispositif et procede d'analyse optique, appareil et procede de mesure chromatique associes | |
| WO2011107302A3 (en) | Imprint lithography | |
| EA201291288A1 (ru) | Способ и устройство измерения оптических характеристик оптически изменяемой маркировки, нанесенной на объект | |
| WO2008058281A3 (en) | Method and apparatus for obtaining the distance from an optical measurement instrument to and object under test | |
| ATE514919T1 (de) | Distanzmessendes verfahren für ein referenzlinienprojizierendes gerät und ebensolches gerät | |
| WO2014056708A3 (en) | Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method | |
| ATE511075T1 (de) | Interferometrische vorrichtung zum messen von formen | |
| DE602008000765D1 (de) | Optisches Bildmessgerät | |
| ATE499618T1 (de) | Laserscanner | |
| RU2015117776A (ru) | Спектроскопическое измерительное устройство | |
| WO2009057114A3 (en) | Optical sensor measurement and crosstalk evaluation | |
| DE602007012182D1 (de) | Vorrichtung zur Messung der Empfangszeit eines Lichtimpulses sowie Abstandsmessung damit | |
| ATE465426T1 (de) | Optoelektronischer sensor zur entfernungsmessung | |
| EP2219012A3 (de) | Ursprungserkennungsvorrichtung, Verschiebungsmessvorrichtung und optische Vorrichtung | |
| ATE518153T1 (de) | Bearbeitungsanordnung für impulssignal, bearbeitungsverfahren und programme dafür | |
| ATE543116T1 (de) | Fokuserkennungsvorrichtung und damit versehene bildaufnahmevorrichtung | |
| WO2009016405A3 (en) | Optical measurement apparatus and method therefor | |
| FI20105476A7 (fi) | Ilmakehän kosteus- tai lämpötilaprofiilin tai pilvenkorkeuden mittausmenetelmä ja -laitteisto | |
| EP2122865A4 (de) | Verfahren und vorrichtung zum erzeugen von optischen duobinärsignalen mit verbesserter empfängerempfindlichkeit und spektraleffizienz | |
| CN103983341B (zh) | 一种高精度激光散斑微振动测量系统及测量方法 | |
| EP2529181A4 (de) | Verfahren und vorrichtung zur sondierung eines objekts, mediums oder optischen pfades mithilfe von rauschendem licht |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |