ATE508370T1 - Verfahren zur herstellung einer brücke in einer mikro-anordnung - Google Patents

Verfahren zur herstellung einer brücke in einer mikro-anordnung

Info

Publication number
ATE508370T1
ATE508370T1 AT99946321T AT99946321T ATE508370T1 AT E508370 T1 ATE508370 T1 AT E508370T1 AT 99946321 T AT99946321 T AT 99946321T AT 99946321 T AT99946321 T AT 99946321T AT E508370 T1 ATE508370 T1 AT E508370T1
Authority
AT
Austria
Prior art keywords
micro
infill
bridge
producing
contacts
Prior art date
Application number
AT99946321T
Other languages
English (en)
Inventor
Mark Mcnie
Original Assignee
Qinetiq Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qinetiq Ltd filed Critical Qinetiq Ltd
Application granted granted Critical
Publication of ATE508370T1 publication Critical patent/ATE508370T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00095—Interconnects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/07—Interconnects

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Defrosting Systems (AREA)
  • Treatment And Processing Of Natural Fur Or Leather (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
AT99946321T 1998-09-12 1999-09-13 Verfahren zur herstellung einer brücke in einer mikro-anordnung ATE508370T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9819817.9A GB9819817D0 (en) 1998-09-12 1998-09-12 Improvements relating to micro-machining
PCT/GB1999/003026 WO2000016105A1 (en) 1998-09-12 1999-09-13 Formation of a bridge in a micro-device

Publications (1)

Publication Number Publication Date
ATE508370T1 true ATE508370T1 (de) 2011-05-15

Family

ID=10838705

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99946321T ATE508370T1 (de) 1998-09-12 1999-09-13 Verfahren zur herstellung einer brücke in einer mikro-anordnung

Country Status (11)

Country Link
US (1) US6846426B1 (de)
EP (1) EP1116038B1 (de)
JP (1) JP2002525212A (de)
KR (1) KR20010075057A (de)
AT (1) ATE508370T1 (de)
AU (1) AU5873899A (de)
CA (1) CA2343308A1 (de)
DE (1) DE69943412D1 (de)
GB (1) GB9819817D0 (de)
NO (1) NO322454B1 (de)
WO (1) WO2000016105A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100837987B1 (ko) * 2000-06-21 2008-06-16 텍사스 인스트루먼츠 인코포레이티드 용해 수지를 이용하는 마이크로 전기기계 시스템 장치의재코팅 방법
ITTO20020793A1 (it) * 2002-09-12 2004-03-13 Olivetti Jet Spa Metodo per ricoprire selettivamente una superficie microlavorata.
US7573547B2 (en) 2004-09-27 2009-08-11 Idc, Llc System and method for protecting micro-structure of display array using spacers in gap within display device
US7424198B2 (en) * 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US8709264B2 (en) 2010-06-25 2014-04-29 International Business Machines Corporation Planar cavity MEMS and related structures, methods of manufacture and design structures
US9630836B2 (en) * 2015-09-30 2017-04-25 Mems Drive, Inc. Simplified MEMS device fabrication process

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3560893A (en) * 1968-12-27 1971-02-02 Rca Corp Surface strip transmission line and microwave devices using same
US4289846A (en) * 1979-12-28 1981-09-15 General Electric Company Process for forming low-reactance interconnections on semiconductors
US4997521A (en) 1987-05-20 1991-03-05 Massachusetts Institute Of Technology Electrostatic micromotor
US4851080A (en) * 1987-06-29 1989-07-25 Massachusetts Institute Of Technology Resonant accelerometer
US4945069A (en) 1988-12-16 1990-07-31 Texas Instruments, Incorporated Organic space holder for trench processing
GB8921722D0 (en) * 1989-09-26 1989-11-08 British Telecomm Micromechanical switch
US5473945A (en) * 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
US5090254A (en) 1990-04-11 1992-02-25 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers
DE69113632T2 (de) * 1990-08-17 1996-03-21 Analog Devices Inc Monolithischer beschleunigungsmesser.
US5198385A (en) * 1991-01-11 1993-03-30 Harris Corporation Photolithographic formation of die-to-package airbridge in a semiconductor device
US5337606A (en) * 1992-08-10 1994-08-16 Motorola, Inc. Laterally sensitive accelerometer and method for making
US5479042A (en) * 1993-02-01 1995-12-26 Brooktree Corporation Micromachined relay and method of forming the relay
US5275973A (en) * 1993-03-01 1994-01-04 Motorola, Inc. Method for forming metallization in an integrated circuit
US5324553A (en) * 1993-04-30 1994-06-28 Energy Conversion Devices, Inc. Method for the improved microwave deposition of thin films
US5427975A (en) * 1993-05-10 1995-06-27 Delco Electronics Corporation Method of micromachining an integrated sensor on the surface of a silicon wafer
US5324683A (en) 1993-06-02 1994-06-28 Motorola, Inc. Method of forming a semiconductor structure having an air region
US5364497A (en) * 1993-08-04 1994-11-15 Analog Devices, Inc. Method for fabricating microstructures using temporary bridges
US5516720A (en) 1994-02-14 1996-05-14 United Microelectronics Corporation Stress relaxation in dielectric before metallization
US5725729A (en) * 1994-09-26 1998-03-10 The Charles Stark Draper Laboratory, Inc. Process for micromechanical fabrication
US5563105A (en) * 1994-09-30 1996-10-08 International Business Machines Corporation PECVD method of depositing fluorine doped oxide using a fluorine precursor containing a glass-forming element
US5656123A (en) * 1995-06-07 1997-08-12 Varian Associates, Inc. Dual-frequency capacitively-coupled plasma reactor for materials processing
US5798283A (en) * 1995-09-06 1998-08-25 Sandia Corporation Method for integrating microelectromechanical devices with electronic circuitry
US5738757A (en) * 1995-11-22 1998-04-14 Northrop Grumman Corporation Planar masking for multi-depth silicon etching
JPH09190764A (ja) * 1996-01-08 1997-07-22 Yamaha Corp 電界放射型素子の製造方法
JPH09264900A (ja) * 1996-03-29 1997-10-07 Murata Mfg Co Ltd 熱式流速センサの製造方法
JPH09279365A (ja) * 1996-04-11 1997-10-28 Mitsubishi Materials Corp 微細構造部品を製造する方法
US5747353A (en) * 1996-04-16 1998-05-05 National Semiconductor Corporation Method of making surface micro-machined accelerometer using silicon-on-insulator technology
US5686743A (en) * 1996-07-10 1997-11-11 Trw Inc. Method of forming airbridged metallization for integrated circuit fabrication
US5871655A (en) * 1998-03-19 1999-02-16 International Business Machines Corporation Integrated conductor magnetic recording head and suspension having cross-over integrated circuits for noise reduction

Also Published As

Publication number Publication date
NO20011229L (no) 2001-05-11
DE69943412D1 (de) 2011-06-16
EP1116038A1 (de) 2001-07-18
NO20011229D0 (no) 2001-03-09
WO2000016105A1 (en) 2000-03-23
EP1116038B1 (de) 2011-05-04
NO322454B1 (no) 2006-10-09
GB9819817D0 (en) 1998-11-04
JP2002525212A (ja) 2002-08-13
KR20010075057A (ko) 2001-08-09
CA2343308A1 (en) 2000-03-23
US6846426B1 (en) 2005-01-25
AU5873899A (en) 2000-04-03

Similar Documents

Publication Publication Date Title
SE9304145D0 (sv) Sätt att tillverka hålrumsstrukturer
DE69910133D1 (de) Verfahren zur herstellung vorfabrizierter bauelemente und vorgespannte baukonstruktion aus solchen elementen hergestellt
ATE350333T1 (de) Verfahren zur herstellung aufgehängter poröser siliziummikrostrukturen und anwendung in gassensoren
DE69528387D1 (de) Herstellung elektrischer leitungen durch löcher
SE9500849D0 (sv) Methods for the manufacturing of micromachined structures and micromachined structures manufactured using such methods
DE60223193D1 (de) Herstellung von intergrierten fluidischen Vorrichtungen
ATE122799T1 (de) Mikromechanischer schalter.
KR960013394A (ko) 스텐트 제조 방법
WO2003095358A3 (en) Method of forming manofluidic channels
BR9809724A (pt) Gabarito deformado de múltiplos poços e processo de uso
DK1051290T3 (da) Fremgangsmåde til fremstilling af en prop eller et stop-element
DE69943348D1 (de) Verfahren zur Erzeugung von abgestuften Strukturen unter Einsatz von eingebetteten Ätzstopschichten
DE60128437D1 (de) Verfahren zur Herstellung von mikromechanischen und mikrooptomechanischen Strukturen mit Rückseitenmetallisierung
SE0003799D0 (sv) Method of makin gholes and structures comprising such holes
ID29053A (id) Metode untuk menghasilkan 3-alkanoilindola dan 3-alkilindola
ATE508370T1 (de) Verfahren zur herstellung einer brücke in einer mikro-anordnung
DE69838610D1 (de) Halbleiter-dichtharzzusammensetzung, damit versiegelte halbleiteranordnung, und verfahren zur herstellung einer halbleiteranordnung.
ATE358218T1 (de) Grundelement für die einrichtung eines thermischen unterbrechers zwischen einer wand und einer betonplatte und gebäudestruktur mit entsprechender anwendung
WO1996036067A3 (en) Self-alignment technique for junction isolation and wells
DK1089950T3 (da) Fremgangsmåde til forbedring af en undergrunds egenskaber
WO2002051742A3 (de) Mikromechanisches bauelement und entsprechendes herstellungsverfahren
DE59912460D1 (de) Vorrichtung und verfahren zur lagestabilen befestigung eines dichtungselementes an einer schalung
WO2002051988A3 (en) Thymic epithelial progenitor cells and uses thereof
DE502004004487D1 (de) Verfahren und Vorrichtung zur Herstellung einer dentalkeramischen Struktur
EP0628993A3 (de) Methode für die selektive Entfernung von harten Masken in der Herstellung von Graten.

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties