ATE507433T1 - AUFBEWAHRUNGSBEHÄLTER FÜR FLÜSSIGES CHLORSILAN UND SCHLIEßDECKEL DAFÜR - Google Patents

AUFBEWAHRUNGSBEHÄLTER FÜR FLÜSSIGES CHLORSILAN UND SCHLIEßDECKEL DAFÜR

Info

Publication number
ATE507433T1
ATE507433T1 AT09167580T AT09167580T ATE507433T1 AT E507433 T1 ATE507433 T1 AT E507433T1 AT 09167580 T AT09167580 T AT 09167580T AT 09167580 T AT09167580 T AT 09167580T AT E507433 T1 ATE507433 T1 AT E507433T1
Authority
AT
Austria
Prior art keywords
valve
storage container
liquid
chlorosilan
pipe
Prior art date
Application number
AT09167580T
Other languages
English (en)
Inventor
Go Sasaki
Takanori Ito
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Application granted granted Critical
Publication of ATE507433T1 publication Critical patent/ATE507433T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
    • F16K5/06—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary with plugs having spherical surfaces; Packings therefor
    • F16K5/0626—Easy mounting or dismounting means
    • F16K5/0631—Easy mounting or dismounting means between two flanges
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/06—Construction of housing; Use of materials therefor of taps or cocks
    • F16K27/067—Construction of housing; Use of materials therefor of taps or cocks with spherical plugs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/06—Closures, e.g. cap, breakable member
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4238—With cleaner, lubrication added to fluid or liquid sealing at valve interface
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y10T137/5283—Units interchangeable between alternate locations
AT09167580T 2008-08-13 2009-08-10 AUFBEWAHRUNGSBEHÄLTER FÜR FLÜSSIGES CHLORSILAN UND SCHLIEßDECKEL DAFÜR ATE507433T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008208320 2008-08-13

Publications (1)

Publication Number Publication Date
ATE507433T1 true ATE507433T1 (de) 2011-05-15

Family

ID=41278584

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09167580T ATE507433T1 (de) 2008-08-13 2009-08-10 AUFBEWAHRUNGSBEHÄLTER FÜR FLÜSSIGES CHLORSILAN UND SCHLIEßDECKEL DAFÜR

Country Status (7)

Country Link
US (1) US8297304B2 (de)
EP (1) EP2157353B1 (de)
JP (1) JP5316302B2 (de)
KR (1) KR101544618B1 (de)
CN (1) CN101649957B (de)
AT (1) ATE507433T1 (de)
DE (1) DE602009001159D1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112944205A (zh) * 2021-03-12 2021-06-11 中国恩菲工程技术有限公司 氯硅烷充装系统和充装方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8590705B2 (en) * 2010-06-11 2013-11-26 Air Products And Chemicals, Inc. Cylinder surface treated container for monochlorosilane
GB201109354D0 (en) * 2011-06-03 2011-07-20 Cordex Instr Ltd Fuel container
JP6450495B1 (ja) * 2018-08-23 2019-01-09 六菱ゴム株式会社 ベント配管閉塞用器具
CN110193223A (zh) * 2019-06-03 2019-09-03 南京宏匡硅材料有限公司 一种氯硅烷废液的储存装置
GB2588906A (en) 2019-11-13 2021-05-19 Edwards Ltd Gas purged valve
TWI766215B (zh) * 2019-12-05 2022-06-01 蔡孟學 高純度無機化合物二氯矽烷（ＳｉＨＣｌ）分裝儲存容器的填充方法
US11547846B2 (en) * 2021-02-23 2023-01-10 Ventriflo, Inc. Pump-valving assembly for a pulsatile fluid pump

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US4462568A (en) * 1982-03-15 1984-07-31 Xomox Corporation Valve construction and method of making the same
US4979643A (en) * 1985-06-21 1990-12-25 Air Products And Chemicals, Inc. Chemical refill system
DE3544260A1 (de) * 1985-12-14 1987-06-19 Merck Patent Gmbh Behaelter fuer aggressive fluessigkeiten
US5102010A (en) * 1988-02-16 1992-04-07 Now Technologies, Inc. Container and dispensing system for liquid chemicals
JPH0692558A (ja) * 1990-09-28 1994-04-05 Otis Elevator Co 発進時の揺れ及び過剰加速を低減するエレベータの発進制御装置
US5086804A (en) * 1991-01-23 1992-02-11 Solkatronic Chemicals, Inc. Emergency security device for head of a leaking gas cylinder
JPH05231598A (ja) 1992-02-18 1993-09-07 Toshiba Corp ガス充填容器
DE69523428T2 (de) * 1994-12-30 2002-07-11 Air Liquide Verfahren zum Verteilen von ultrareinen Gasen mit minimierter Korrosion
JP3805102B2 (ja) * 1997-05-07 2006-08-02 株式会社トクヤマ トリクロロシランおよび四塩化珪素の貯蔵方法
JPH10338293A (ja) * 1997-06-03 1998-12-22 Hitachi Ltd 槽内容物取出し装置
US6637475B2 (en) * 1997-07-11 2003-10-28 Advanced Technology Materials, Inc. Bulk chemical delivery system
EP1245527B1 (de) * 2001-03-29 2002-11-06 Cs Clean Systems Ag Vorratsbehälter für flüssige, hochreine Substanzen mit einer Einrichtung zur Reinigung der Anschlussstücke und Rohrleitungen des Vorratsbehälters
US6732535B2 (en) * 2001-05-07 2004-05-11 L'air Liquide - Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Device for closing and connecting to external conduits a reservoir of cryogenic fluid, and reservoir provided with such a device
US7448402B2 (en) 2006-10-31 2008-11-11 Air Products And Chemicals, Inc. Leak containment apparatus for reactive gases
JP4991362B2 (ja) 2007-01-29 2012-08-01 京セラ株式会社 蛍光体とその製造方法および波長変換器ならびに発光装置
JP2009263009A (ja) * 2008-04-25 2009-11-12 L'air Liquide-Sa Pour L'etude & L'exploitation Des Procedes Georges Claude 半導体産業に供給する液化材料の容器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112944205A (zh) * 2021-03-12 2021-06-11 中国恩菲工程技术有限公司 氯硅烷充装系统和充装方法

Also Published As

Publication number Publication date
US20100038362A1 (en) 2010-02-18
US8297304B2 (en) 2012-10-30
CN101649957A (zh) 2010-02-17
EP2157353B1 (de) 2011-04-27
CN101649957B (zh) 2012-11-28
JP5316302B2 (ja) 2013-10-16
DE602009001159D1 (de) 2011-06-09
EP2157353A1 (de) 2010-02-24
KR20100020913A (ko) 2010-02-23
JP2010064790A (ja) 2010-03-25
KR101544618B1 (ko) 2015-08-17

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