ATE505807T1 - Ionenquelle mit hoher stromdichte - Google Patents

Ionenquelle mit hoher stromdichte

Info

Publication number
ATE505807T1
ATE505807T1 AT05450024T AT05450024T ATE505807T1 AT E505807 T1 ATE505807 T1 AT E505807T1 AT 05450024 T AT05450024 T AT 05450024T AT 05450024 T AT05450024 T AT 05450024T AT E505807 T1 ATE505807 T1 AT E505807T1
Authority
AT
Austria
Prior art keywords
plasma
plasma chamber
current density
high current
ion source
Prior art date
Application number
AT05450024T
Other languages
English (en)
Inventor
Tantraporn Wirojana
Original Assignee
Thailand Res Fund
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thailand Res Fund filed Critical Thailand Res Fund
Application granted granted Critical
Publication of ATE505807T1 publication Critical patent/ATE505807T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
AT05450024T 2005-02-10 2005-02-10 Ionenquelle mit hoher stromdichte ATE505807T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05450024A EP1693877B1 (de) 2005-02-10 2005-02-10 Ionenquelle mit hoher Stromdichte

Publications (1)

Publication Number Publication Date
ATE505807T1 true ATE505807T1 (de) 2011-04-15

Family

ID=34943308

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05450024T ATE505807T1 (de) 2005-02-10 2005-02-10 Ionenquelle mit hoher stromdichte

Country Status (3)

Country Link
EP (1) EP1693877B1 (de)
AT (1) ATE505807T1 (de)
DE (1) DE602005027435D1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111272792A (zh) * 2020-03-24 2020-06-12 深圳市速普仪器有限公司 电镜样品前处理设备
CN117711909B (zh) * 2024-02-04 2024-04-12 中国科学院合肥物质科学研究院 一种非均匀场的离子化器和离子聚焦方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH547549A (de) * 1972-01-24 1974-03-29 Balzers Patent Beteilig Ag Anordnung zur erzeugung von ionen.
JPH09223594A (ja) * 1996-02-16 1997-08-26 Ebara Corp ビーム源及び微細加工方法
US6388381B2 (en) * 1996-09-10 2002-05-14 The Regents Of The University Of California Constricted glow discharge plasma source
DE10047688B4 (de) * 2000-09-24 2004-10-28 Roentdek-Handels Gmbh Ionenquelle

Also Published As

Publication number Publication date
EP1693877B1 (de) 2011-04-13
DE602005027435D1 (de) 2011-05-26
EP1693877A1 (de) 2006-08-23

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Legal Events

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