ATE505679T1 - Verfahren zur herstellung einer magnet-fluid- dichtung mit präziser fluidmengensteuerung auf jeder dichtungsstufe - Google Patents

Verfahren zur herstellung einer magnet-fluid- dichtung mit präziser fluidmengensteuerung auf jeder dichtungsstufe

Info

Publication number
ATE505679T1
ATE505679T1 AT08840056T AT08840056T ATE505679T1 AT E505679 T1 ATE505679 T1 AT E505679T1 AT 08840056 T AT08840056 T AT 08840056T AT 08840056 T AT08840056 T AT 08840056T AT E505679 T1 ATE505679 T1 AT E505679T1
Authority
AT
Austria
Prior art keywords
producing
pole ring
fluid seal
quantity control
magnetic fluid
Prior art date
Application number
AT08840056T
Other languages
English (en)
Inventor
David Mahoney
Walter Helgeland
Original Assignee
Rigaku Innovative Technologies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Innovative Technologies filed Critical Rigaku Innovative Technologies
Application granted granted Critical
Publication of ATE505679T1 publication Critical patent/ATE505679T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/43—Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49229—Prime mover or fluid pump making
    • Y10T29/49297—Seal or packing making

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
AT08840056T 2007-10-18 2008-10-16 Verfahren zur herstellung einer magnet-fluid- dichtung mit präziser fluidmengensteuerung auf jeder dichtungsstufe ATE505679T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US98097707P 2007-10-18 2007-10-18
PCT/US2008/080157 WO2009052282A2 (en) 2007-10-18 2008-10-16 Method for making a magnetic fluid seal and magnetic fluid seal with precise control of fluid volume at each seal stage

Publications (1)

Publication Number Publication Date
ATE505679T1 true ATE505679T1 (de) 2011-04-15

Family

ID=40260599

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08840056T ATE505679T1 (de) 2007-10-18 2008-10-16 Verfahren zur herstellung einer magnet-fluid- dichtung mit präziser fluidmengensteuerung auf jeder dichtungsstufe

Country Status (7)

Country Link
US (1) US8430409B2 (de)
EP (1) EP2203666B1 (de)
JP (2) JP5346945B2 (de)
AT (1) ATE505679T1 (de)
CA (2) CA2912100C (de)
DE (1) DE602008006240D1 (de)
WO (1) WO2009052282A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9360118B2 (en) * 2011-02-03 2016-06-07 Eagle Industry Co., Ltd. Magnetic fluid seal
JP6031102B2 (ja) * 2012-06-14 2016-11-24 イーグル工業株式会社 磁性流体シール
CN106461089B (zh) * 2014-05-13 2019-01-15 日本伊格尔博格曼有限公司 磁性流体密封的组装方法及磁性流体密封

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4440402A (en) * 1982-03-25 1984-04-03 Mechanical Technology Incorporated Ferrofin magnetic seal with opposed fin-like projections
JPS5950275A (ja) * 1982-09-16 1984-03-23 Rigaku Keisoku Kk 磁性流体軸封装置
US4445696A (en) * 1983-02-22 1984-05-01 Ferrofluidics Corporation Nonbursting magnetic liquid seals for high vacuum applications
US4501566A (en) * 1983-09-19 1985-02-26 Technicare Corporation Method for assembling a high vacuum rotating anode X-ray tube
JPS61236971A (ja) * 1985-04-15 1986-10-22 Nippon Telegr & Teleph Corp <Ntt> 磁性流体シ−ルの封止方法
US4830384A (en) * 1987-06-29 1989-05-16 Ferrofluidics Corporation Compact long-life magnetic fluid seal
DE3922356A1 (de) * 1989-07-07 1991-01-17 Freudenberg Carl Fa Ferrofluiddichtung fuer eine welle
US5007513A (en) * 1990-04-03 1991-04-16 Lord Corporation Electroactive fluid torque transmission apparatus with ferrofluid seal
US5474302A (en) * 1992-08-27 1995-12-12 Ferrofluidics Corporation On-site fillable ferrofluidic seal
US5346122A (en) * 1992-12-23 1994-09-13 Royal Sound Co., Inc. Oval shaped box
JP2584951Y2 (ja) * 1993-06-11 1998-11-11 日本精工株式会社 磁性流体シール装置付転がり軸受ユニット
JPH0814402A (ja) * 1994-06-24 1996-01-16 Sankyo Seiki Mfg Co Ltd 磁性流体シール
JPH1019138A (ja) * 1996-07-04 1998-01-23 Rigaku Corp 排気室を備えた磁気シール装置
EP0818702A1 (de) * 1996-07-10 1998-01-14 Seo, Jong-wook Anzeigeschirm mit magnetischer Flüssigkeit
US5826885A (en) * 1996-10-02 1998-10-27 Rigaku/Usa, Inc. Magnetic fluid sealing device
JPH10169789A (ja) * 1996-12-03 1998-06-26 Rigaku Corp 磁気シール装置
JP3256458B2 (ja) * 1997-01-31 2002-02-12 エヌオーケー株式会社 磁性流体を利用した密封装置
US5975536A (en) * 1997-09-30 1999-11-02 Rigaku/Usa, Inc. Rotary motion feedthrough with rotating magnet system
US6199867B1 (en) * 1997-09-30 2001-03-13 Rigaku/Usa, Inc. Rotary motion feedthrough device
JP4073064B2 (ja) * 1997-12-02 2008-04-09 株式会社リガク 耐磁場磁性流体シール装置
JP2001311473A (ja) * 2000-04-28 2001-11-09 Rigaku Corp 軸封装置
US6543782B1 (en) * 2001-04-11 2003-04-08 Ferrotec (Usa) Corporation Non-bursting ferrofluid seal
JP4140309B2 (ja) * 2002-07-31 2008-08-27 Ｎｏｋ株式会社 磁性流体を利用した密封装置
US20060192345A1 (en) * 2003-07-07 2006-08-31 Zhixin Li Magnetic Fluidic Seal with Improved Pressure Capacity
US7236233B2 (en) * 2003-10-27 2007-06-26 Asml Netherlands B.V. Assembly of a reticle holder and a reticle
JP2005212067A (ja) * 2004-01-30 2005-08-11 Matsushita Electric Ind Co Ltd 超音波研磨方法及びその装置
GB0409687D0 (en) 2004-04-30 2004-06-02 Leuven K U Res & Dev Liquid seal
US7974384B2 (en) * 2009-04-14 2011-07-05 General Electric Company X-ray tube having a ferrofluid seal and method of assembling same

Also Published As

Publication number Publication date
JP2011501063A (ja) 2011-01-06
US8430409B2 (en) 2013-04-30
CA2703013C (en) 2016-01-26
WO2009052282A2 (en) 2009-04-23
CA2703013A1 (en) 2009-04-23
WO2009052282A3 (en) 2009-09-24
CA2912100A1 (en) 2009-04-23
DE602008006240D1 (de) 2011-05-26
JP2014029208A (ja) 2014-02-13
CA2912100C (en) 2017-02-28
US20090127794A1 (en) 2009-05-21
JP5346945B2 (ja) 2013-11-20
EP2203666B1 (de) 2011-04-13
JP5555797B2 (ja) 2014-07-23
EP2203666A2 (de) 2010-07-07

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