ATE498900T1 - Vorrichtung zur bereitstellung einer schutzschicht zur bearbeitung eines geladenen teilchenstrahls - Google Patents

Vorrichtung zur bereitstellung einer schutzschicht zur bearbeitung eines geladenen teilchenstrahls

Info

Publication number
ATE498900T1
ATE498900T1 AT07119686T AT07119686T ATE498900T1 AT E498900 T1 ATE498900 T1 AT E498900T1 AT 07119686 T AT07119686 T AT 07119686T AT 07119686 T AT07119686 T AT 07119686T AT E498900 T1 ATE498900 T1 AT E498900T1
Authority
AT
Austria
Prior art keywords
protective layer
charged particle
particle beam
providing
processing
Prior art date
Application number
AT07119686T
Other languages
English (en)
Inventor
Jeff Blackwood
Stacey Stone
Original Assignee
Fei Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fei Co filed Critical Fei Co
Application granted granted Critical
Publication of ATE498900T1 publication Critical patent/ATE498900T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3174—Etching microareas
    • H01J2237/31745—Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers

Landscapes

  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Ink Jet Recording Methods And Recording Media Thereof (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Inks, Pencil-Leads, Or Crayons (AREA)
  • Electron Beam Exposure (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Drying Of Semiconductors (AREA)
AT07119686T 2006-10-31 2007-10-31 Vorrichtung zur bereitstellung einer schutzschicht zur bearbeitung eines geladenen teilchenstrahls ATE498900T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US85553606P 2006-10-31 2006-10-31

Publications (1)

Publication Number Publication Date
ATE498900T1 true ATE498900T1 (de) 2011-03-15

Family

ID=38927575

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07119686T ATE498900T1 (de) 2006-10-31 2007-10-31 Vorrichtung zur bereitstellung einer schutzschicht zur bearbeitung eines geladenen teilchenstrahls

Country Status (5)

Country Link
US (2) US8097308B2 (de)
EP (1) EP1918981B1 (de)
JP (1) JP2008171800A (de)
AT (1) ATE498900T1 (de)
DE (1) DE602007012501D1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008171800A (ja) 2006-10-31 2008-07-24 Fei Co 荷電粒子ビーム処理用保護層
CN104141112B (zh) * 2008-05-07 2017-09-19 普林斯顿大学理事会 用于电子器件或其他物品上的涂层中的混合层
EP2151848A1 (de) * 2008-08-07 2010-02-10 FEI Company Verfahren zur Fertigung eines Werkstücks mit einem fokussierten Teilchenstrahl
EP2278306A1 (de) * 2009-07-13 2011-01-26 Fei Company Verfahren zur Untersuchung einer Probe
US20110048931A1 (en) * 2009-08-25 2011-03-03 Makarov Vladimir V FIB Process for Selective and Clean Etching of Copper
DE102013012225A1 (de) 2013-07-23 2015-01-29 Carl Zeiss Microscopy Gmbh Verfahren zur TEM-Lamellen-Herstellung und Anordnung für TEM-Lamellen-Schutzvorrichtung

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US4981625A (en) * 1988-03-14 1991-01-01 California Institute Of Technology Monodisperse, polymeric microspheres produced by irradiation of slowly thawing frozen drops
JP2774884B2 (ja) 1991-08-22 1998-07-09 株式会社日立製作所 試料の分離方法及びこの分離方法で得た分離試料の分析方法
JP3117836B2 (ja) * 1993-03-02 2000-12-18 セイコーインスツルメンツ株式会社 集束イオンビーム装置
DE4343212A1 (de) * 1993-12-17 1995-06-22 Walter Schindlegger Trinkgefäß
JPH08142330A (ja) * 1994-11-14 1996-06-04 Fujitsu Ltd インクジェットヘッド
JPH11154479A (ja) * 1997-11-20 1999-06-08 Hitachi Ltd ２次電子画像検出方法及びその装置並びに集束荷電粒子ビームによる処理方法及びその装置
US6406921B1 (en) * 1998-07-14 2002-06-18 Zyomyx, Incorporated Protein arrays for high-throughput screening
US6066357A (en) * 1998-12-21 2000-05-23 Eastman Kodak Company Methods of making a full-color organic light-emitting display
JP2001264225A (ja) * 2000-03-15 2001-09-26 Hitachi Ltd 試料作製方法
DE60144508D1 (de) * 2000-11-06 2011-06-09 Hitachi Ltd Verfahren zur Herstellung von Proben
WO2002042087A2 (en) * 2000-11-13 2002-05-30 Imaging Alternatives, Inc. Wood surface inkjet receptor medium and method of making and using same
WO2003012551A1 (en) * 2001-07-27 2003-02-13 Fei Company Electron beam processing
US6555284B1 (en) * 2001-12-27 2003-04-29 Eastman Kodak Company In situ vacuum method for making OLED devices
US20030185889A1 (en) * 2002-03-27 2003-10-02 Jixiong Yan Colloidal nanosilver solution and method for making the same
JP2003288839A (ja) * 2002-03-28 2003-10-10 Canon Inc 液体塗布装置及び液体塗布方法、描画装置及び描画方法
US6922118B2 (en) * 2002-11-01 2005-07-26 Hrl Laboratories, Llc Micro electrical mechanical system (MEMS) tuning using focused ion beams
FI116318B (fi) * 2003-02-27 2005-10-31 Avantone Oy Painetut TTI-indikaattorit
US6926935B2 (en) * 2003-06-27 2005-08-09 Fei Company Proximity deposition
JP2007527218A (ja) 2003-07-01 2007-09-27 バイオレックス インク ウキクサ葉緑体の形質転換
US7701138B2 (en) * 2003-07-02 2010-04-20 Canon Kabushiki Kaisha Information acquisition method, information acquisition apparatus and disease diagnosis method
DE10362116B4 (de) * 2003-09-17 2008-08-28 Carl Zeiss Nts Gmbh Verfahren zur Präparation einer Probe für elektronenmikroskopische Untersuchungen, sowie dabei verwendeter Greifer
US7241361B2 (en) 2004-02-20 2007-07-10 Fei Company Magnetically enhanced, inductively coupled plasma source for a focused ion beam system
JP4051631B2 (ja) * 2004-08-20 2008-02-27 セイコーエプソン株式会社 エッチング方法、微細構造体の製造方法、導電線の形成方法、薄膜トランジスタの製造方法及び電子機器の製造方法
US7601246B2 (en) * 2004-09-29 2009-10-13 Lam Research Corporation Methods of sputtering a protective coating on a semiconductor substrate
JP4888991B2 (ja) * 2005-01-18 2012-02-29 新科實業有限公司 面形状形成方法及び装置、磁気ヘッドの浮上面形成方法及び装置
US7202006B2 (en) * 2005-06-20 2007-04-10 Xerox Corporation Protective layer for reimageable medium
JP5600371B2 (ja) 2006-02-15 2014-10-01 エフ・イ−・アイ・カンパニー 荷電粒子ビーム処理のための保護層のスパッタリング・コーティング
US20070278180A1 (en) * 2006-06-01 2007-12-06 Williamson Mark J Electron induced chemical etching for materials characterization
JP2008171800A (ja) 2006-10-31 2008-07-24 Fei Co 荷電粒子ビーム処理用保護層

Also Published As

Publication number Publication date
EP1918981A2 (de) 2008-05-07
EP1918981A3 (de) 2009-07-22
JP2008171800A (ja) 2008-07-24
US8097308B2 (en) 2012-01-17
EP1918981B1 (de) 2011-02-16
US9263306B2 (en) 2016-02-16
DE602007012501D1 (de) 2011-03-31
US20080102224A1 (en) 2008-05-01
US20120107521A1 (en) 2012-05-03

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Legal Events

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