ATE470135T1 - Bolometrisches detetektionsverfahren für (sub- )millimeterwellen anhand eines antennengekoppelten bolometers mit einem hohlraum - Google Patents

Bolometrisches detetektionsverfahren für (sub- )millimeterwellen anhand eines antennengekoppelten bolometers mit einem hohlraum

Info

Publication number
ATE470135T1
ATE470135T1 AT04102263T AT04102263T ATE470135T1 AT E470135 T1 ATE470135 T1 AT E470135T1 AT 04102263 T AT04102263 T AT 04102263T AT 04102263 T AT04102263 T AT 04102263T AT E470135 T1 ATE470135 T1 AT E470135T1
Authority
AT
Austria
Prior art keywords
cavity
antenna
bolometer
sub
detection method
Prior art date
Application number
AT04102263T
Other languages
English (en)
Inventor
Patrick Agnese
Patrice Rey
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE470135T1 publication Critical patent/ATE470135T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0837—Microantennas, e.g. bow-tie
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Particle Accelerators (AREA)
  • Radar Systems Or Details Thereof (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
AT04102263T 2003-05-26 2004-05-24 Bolometrisches detetektionsverfahren für (sub- )millimeterwellen anhand eines antennengekoppelten bolometers mit einem hohlraum ATE470135T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0350176A FR2855609B1 (fr) 2003-05-26 2003-05-26 Dispositif de detection bolometrique a antenne, a cavite optimisee, pour ondes electromagnetiques millimetriques ou submillimetriques, et procede de fabrication de ce dispositif

Publications (1)

Publication Number Publication Date
ATE470135T1 true ATE470135T1 (de) 2010-06-15

Family

ID=33104529

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04102263T ATE470135T1 (de) 2003-05-26 2004-05-24 Bolometrisches detetektionsverfahren für (sub- )millimeterwellen anhand eines antennengekoppelten bolometers mit einem hohlraum

Country Status (6)

Country Link
US (1) US6985116B2 (de)
EP (1) EP1482289B1 (de)
JP (1) JP4571433B2 (de)
AT (1) ATE470135T1 (de)
DE (1) DE602004027441D1 (de)
FR (1) FR2855609B1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI114658B (fi) * 2002-06-03 2004-11-30 Metorex Internat Oy Suprajohtava antennikytketty kuumapistemikrobolometri, menetelmät sellaisen valmistamiseksi ja käyttämiseksi sekä bolometrinen kuvantamisjärjestely
US7038623B2 (en) * 2003-12-04 2006-05-02 Raytheon Company Method and apparatus for detecting radiation at one wavelength using a detector for a different wavelength
FR2884608B1 (fr) 2005-04-18 2007-05-25 Commissariat Energie Atomique Detecteur bolometrique, dispositif de detection d'ondes electromagnetiques submillimetriques et millimetriques mettant en oeuvre un tel detecteur
JP4221424B2 (ja) 2006-08-09 2009-02-12 株式会社東芝 固体撮像素子及びその製造方法並びに撮像装置
JP4398972B2 (ja) * 2006-12-11 2010-01-13 株式会社東芝 電磁波センサ、撮像素子及び撮像装置
JP5597862B2 (ja) * 2007-03-27 2014-10-01 日本電気株式会社 ボロメータ型ＴＨｚ波検出器
JP5219745B2 (ja) * 2007-11-14 2013-06-26 キヤノン株式会社 発光装置
US8130160B2 (en) * 2008-07-03 2012-03-06 The Boeing Company Composite dipole array assembly
FR2934044B1 (fr) * 2008-07-17 2014-08-15 Commissariat Energie Atomique Detecteur bolometrique d'ondes electromagnetiques.
FR2945119B1 (fr) * 2009-04-30 2011-04-08 Commissariat Energie Atomique Detecteur bolometrique d'un rayonnement electromagnetique dans le domaine du terahertz et dispositif de detection matriciel comportant de tels detecteurs
MD340Z (ro) * 2010-04-23 2011-09-30 Институт Электронной Инженерии И Промышленных Технологий Bolometru
FR2969284B1 (fr) * 2010-12-17 2012-12-14 Commissariat Energie Atomique Detecteur infrarouge a base de micro-planches bolometriques suspendues
JP5685980B2 (ja) * 2011-02-23 2015-03-18 セイコーエプソン株式会社 熱型光検出器、熱型光検出装置及び電子機器
US9759693B2 (en) * 2012-12-20 2017-09-12 International Business Machines Corporation Method of simulating the absorption of plane waves using FEM software tools
US20170030775A1 (en) * 2014-04-18 2017-02-02 Nec Corporation Terahertz-wave detector
US9476774B2 (en) 2014-12-17 2016-10-25 Institut National D'optique Uncooled microbolometer pixel and array for configurable broadband and multi-frequency terahertz detection
US11217874B2 (en) * 2019-04-15 2022-01-04 Analog Devices, Inc. Silicon cavity backed radiator structure
FR3101151B1 (fr) * 2019-09-24 2021-12-17 Office National Detudes Rech Aerospatiales Dispositif pour reveler des variations spatiales de polarisation d’un rayonnement electromagnetique

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5286976A (en) * 1988-11-07 1994-02-15 Honeywell Inc. Microstructure design for high IR sensitivity
JPH06317475A (ja) * 1991-07-19 1994-11-15 Terumo Corp 赤外線センサおよびその製造方法
US5397897A (en) * 1992-04-17 1995-03-14 Terumo Kabushiki Kaisha Infrared sensor and method for production thereof
JP3181363B2 (ja) * 1992-04-17 2001-07-03 テルモ株式会社 赤外線センサおよびその製造方法
US5572060A (en) * 1995-02-01 1996-11-05 Southern Methodist University Uncooled YBaCuO thin film infrared detector
FR2735574B1 (fr) 1995-06-15 1997-07-18 Commissariat Energie Atomique Dispositif de detection bolometrique pour ondes millimetriques et submillimetriques et procede de fabrication de ce dispositif
FR2752299B1 (fr) 1996-08-08 1998-09-11 Commissariat Energie Atomique Detecteur infrarouge et procede de fabication de celui-ci
FR2773215B1 (fr) 1997-12-31 2000-01-28 Commissariat Energie Atomique Detecteur thermique bolometrique
JPH11344377A (ja) * 1998-06-02 1999-12-14 Matsushita Electric Ind Co Ltd 赤外線検知素子およびその製造方法
FR2780784B1 (fr) 1998-07-06 2000-08-11 Commissariat Energie Atomique Detecteur thermique a amplification par effet bolometrique
US6329655B1 (en) 1998-10-07 2001-12-11 Raytheon Company Architecture and method of coupling electromagnetic energy to thermal detectors
FR2788129B1 (fr) * 1998-12-30 2001-02-16 Commissariat Energie Atomique Detecteur bolometrique a antenne
FR2796148B1 (fr) 1999-07-08 2001-11-23 Commissariat Energie Atomique Detecteur bolometrique a isolation electrique intermediaire et procede de fabrication de ce detecteur
US6300554B1 (en) * 1999-09-09 2001-10-09 Metrodyne Microsystem Corp. Method of fabricating thermoelectric sensor and thermoelectric sensor device
US6292140B1 (en) * 1999-11-03 2001-09-18 Hypres, Inc. Antenna for millimeter-wave imaging and bolometer employing the antenna
FI114658B (fi) * 2002-06-03 2004-11-30 Metorex Internat Oy Suprajohtava antennikytketty kuumapistemikrobolometri, menetelmät sellaisen valmistamiseksi ja käyttämiseksi sekä bolometrinen kuvantamisjärjestely

Also Published As

Publication number Publication date
EP1482289B1 (de) 2010-06-02
JP2004354380A (ja) 2004-12-16
JP4571433B2 (ja) 2010-10-27
DE602004027441D1 (de) 2010-07-15
EP1482289A1 (de) 2004-12-01
FR2855609B1 (fr) 2005-07-01
US20040252065A1 (en) 2004-12-16
FR2855609A1 (fr) 2004-12-03
US6985116B2 (en) 2006-01-10

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