ATE418795T1 - Walking aktuator - Google Patents

Walking aktuator

Info

Publication number
ATE418795T1
ATE418795T1 AT01957053T AT01957053T ATE418795T1 AT E418795 T1 ATE418795 T1 AT E418795T1 AT 01957053 T AT01957053 T AT 01957053T AT 01957053 T AT01957053 T AT 01957053T AT E418795 T1 ATE418795 T1 AT E418795T1
Authority
AT
Austria
Prior art keywords
drive elements
driving
sets
gripping
present
Prior art date
Application number
AT01957053T
Other languages
English (en)
Inventor
Stefan Johansson
Mats Bexell
Per Lithell
Original Assignee
Piezomotor Uppsala Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Piezomotor Uppsala Ab filed Critical Piezomotor Uppsala Ab
Application granted granted Critical
Publication of ATE418795T1 publication Critical patent/ATE418795T1/de

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Catching Or Destruction (AREA)
  • Portable Nailing Machines And Staplers (AREA)
  • Vehicle Body Suspensions (AREA)
AT01957053T 2000-08-11 2001-07-25 Walking aktuator ATE418795T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0002885A SE0002885D0 (sv) 2000-08-11 2000-08-11 Fine walking actuator

Publications (1)

Publication Number Publication Date
ATE418795T1 true ATE418795T1 (de) 2009-01-15

Family

ID=20280676

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01957053T ATE418795T1 (de) 2000-08-11 2001-07-25 Walking aktuator

Country Status (9)

Country Link
EP (2) EP1310038B1 (de)
JP (2) JP5102929B2 (de)
KR (1) KR100895914B1 (de)
CN (1) CN1288831C (de)
AT (1) ATE418795T1 (de)
AU (1) AU2001278833A1 (de)
DE (1) DE60137135D1 (de)
SE (1) SE0002885D0 (de)
WO (1) WO2002015379A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6798117B2 (en) 2002-07-10 2004-09-28 Piezomotor Uppsala Ab Fine control of electromechanical motors
US6977461B2 (en) * 2003-12-15 2005-12-20 Asml Netherlands B.V. System and method for moving an object employing piezo actuators
EP1742344B1 (de) * 2005-07-05 2010-03-03 Stmicroelectronics Sa Steuerung für einen piezoelektrischen Motor
KR100791592B1 (ko) * 2006-12-21 2008-01-04 한국기계연구원 압전소자를 이용한 선형 구동기
WO2012087193A1 (en) * 2010-12-20 2012-06-28 Piezomotor Uppsala Ab Electromechanical motor
JP6186352B2 (ja) * 2011-05-30 2017-08-23 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ用の投影露光装置の光学素子を動かす方法
DE102012106846B4 (de) * 2012-07-27 2014-09-25 Leica Biosystems Nussloch Gmbh Mikrotom mit einem Piezolinearantrieb
US9290219B2 (en) * 2013-03-14 2016-03-22 The Boeing Company Locomotion system and method of controlling a robotic device
DE102014014997B4 (de) 2014-10-09 2018-05-17 Attocube Systems Ag Haft-Gleit-Antrieb, insbesondere piezo-aktuierter Trägheitsantrieb
JP6617450B2 (ja) * 2015-07-02 2019-12-11 セイコーエプソン株式会社 圧電駆動装置、モーターおよびロボット
CN105553327A (zh) * 2016-02-02 2016-05-04 吉林大学 一种压电振动式行走机构
EP3547529B1 (de) * 2018-03-29 2021-05-05 Physik Instrumente (PI) GmbH & Co. KG Zweimoden-bewegungssteuerungssystem und verfahren für einen piezomotor
CN114567203A (zh) * 2022-02-28 2022-05-31 宁波大学 一种粘滑驱动式压电直线驱动器
CN114977879A (zh) * 2022-04-12 2022-08-30 南京工程学院 双向运动的自走式行波型直线超声波电机
SE545844C2 (en) * 2022-10-17 2024-02-20 Precibeo Ab A drive element with two separate monolithic actuators for an electromechanical motor
WO2023244160A1 (en) 2022-06-17 2023-12-21 Precibeo Ab Drive elements for electromechanical motor
NL2033724B1 (en) * 2022-12-14 2024-06-20 Onnes Tech B V Positioner device.

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3902084A (en) 1974-05-30 1975-08-26 Burleigh Instr Piezoelectric electromechanical translation apparatus
JPS6281984A (ja) * 1985-10-01 1987-04-15 Rion Co Ltd 圧電アクチユエ−タ
JPS62186237A (ja) * 1986-02-12 1987-08-14 Minolta Camera Co Ltd バイモルフ駆動素子を有するカメラ
JPH0217875A (ja) * 1988-07-04 1990-01-22 Matsushita Electric Ind Co Ltd 超音波モータ
JP2525877B2 (ja) * 1988-08-12 1996-08-21 アルプス電気株式会社 超音波リニアモ―タ
JP2525876B2 (ja) * 1988-08-12 1996-08-21 アルプス電気株式会社 超音波ソレノイド
JPH0295181A (ja) * 1988-09-28 1990-04-05 Hitachi Ltd 圧電モータの駆動方法、圧電モータ及びデイスク記憶装置のヘッド駆動装置
JPH07108101B2 (ja) * 1989-02-28 1995-11-15 オ−クマ株式会社 リニアアクチュエータ駆動制御装置
JPH03222680A (ja) * 1990-01-24 1991-10-01 Ricoh Co Ltd 搬送装置
US5017820A (en) * 1990-04-23 1991-05-21 Rockwell International Corporation Piezoelectric rotary union system
JPH05276771A (ja) * 1992-03-19 1993-10-22 Koji Toda 超音波アクチュエータ
JPH0779578A (ja) * 1993-09-07 1995-03-20 Canon Inc 振動波モータ
DE4408618B4 (de) * 1994-03-15 2004-04-22 Physik Instrumente (Pi) Gmbh & Co Verstellantrieb aus Bimorphelementen
DE19605214A1 (de) * 1995-02-23 1996-08-29 Bosch Gmbh Robert Ultraschallantriebselement
US5751090A (en) 1995-05-17 1998-05-12 Burleigh Instruments Inc Peristaltic driver apparatus
AU5707796A (en) 1996-03-26 1997-10-17 Mats Bexell An actuator motor and a method for fabrication of such an actuator
RU2161364C2 (ru) * 1996-06-05 2000-12-27 Окатов Юрий Владимирович Пьезоэлектрический шаговый двигатель
JP3190633B2 (ja) * 1998-01-05 2001-07-23 セイコーインスツルメンツ株式会社 圧電アクチュエ−タ

Also Published As

Publication number Publication date
WO2002015379A1 (en) 2002-02-21
EP1310038A1 (de) 2003-05-14
JP2004506526A (ja) 2004-03-04
CN1446394A (zh) 2003-10-01
CN1288831C (zh) 2006-12-06
KR20030069163A (ko) 2003-08-25
AU2001278833A1 (en) 2002-02-25
EP1310038B1 (de) 2008-12-24
EP2053669A1 (de) 2009-04-29
SE0002885D0 (sv) 2000-08-11
DE60137135D1 (de) 2009-02-05
JP5102929B2 (ja) 2012-12-19
EP2053669B1 (de) 2013-06-26
KR100895914B1 (ko) 2009-05-07
JP2011188739A (ja) 2011-09-22

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties