ATE403845T1 - Verfahren zur bestimmung von eigenschaften von strukturierten dünnfilm-metallstrukturen unter verwendung eines transienten thermischen ansprechverhaltens - Google Patents
Verfahren zur bestimmung von eigenschaften von strukturierten dünnfilm-metallstrukturen unter verwendung eines transienten thermischen ansprechverhaltensInfo
- Publication number
- ATE403845T1 ATE403845T1 AT03813254T AT03813254T ATE403845T1 AT E403845 T1 ATE403845 T1 AT E403845T1 AT 03813254 T AT03813254 T AT 03813254T AT 03813254 T AT03813254 T AT 03813254T AT E403845 T1 ATE403845 T1 AT E403845T1
- Authority
- AT
- Austria
- Prior art keywords
- thin film
- thermal response
- metal structures
- film metal
- transient thermal
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0666—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using an exciting beam and a detection beam including surface acoustic waves [SAW]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Acoustics & Sound (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating And Analyzing Materials By Characteristic Methods (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US43331202P | 2002-12-13 | 2002-12-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE403845T1 true ATE403845T1 (de) | 2008-08-15 |
Family
ID=32595154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT03813254T ATE403845T1 (de) | 2002-12-13 | 2003-12-10 | Verfahren zur bestimmung von eigenschaften von strukturierten dünnfilm-metallstrukturen unter verwendung eines transienten thermischen ansprechverhaltens |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US7365864B2 (de) |
| EP (1) | EP1573267B1 (de) |
| JP (1) | JP2006510018A (de) |
| KR (1) | KR20050084255A (de) |
| CN (1) | CN1726380A (de) |
| AT (1) | ATE403845T1 (de) |
| AU (1) | AU2003302975A1 (de) |
| DE (1) | DE60322741D1 (de) |
| WO (1) | WO2004055476A1 (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070109540A1 (en) * | 2003-04-16 | 2007-05-17 | Koninklijke Philips Electronics N.V. | Method for measuring thin films |
| US10684128B2 (en) * | 2015-03-09 | 2020-06-16 | Alliance For Sustainable Energy, Llc | Batch and continuous methods for evaluating the physical and thermal properties of films |
| WO2018009517A1 (en) | 2016-07-05 | 2018-01-11 | Massachusetts Institute Of Technology | Systems and methods for quality control of a periodic structure |
| WO2018137925A1 (en) | 2017-01-25 | 2018-08-02 | Stichting Vu | Method and apparatus for measuring a structure on a substrate |
| CN109239125B (zh) * | 2018-08-07 | 2022-03-22 | 东旭光电科技股份有限公司 | 热收缩率测量方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6256100B1 (en) * | 1998-04-27 | 2001-07-03 | Active Impulse Systems, Inc. | Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure |
| US6174739B1 (en) * | 1999-06-30 | 2001-01-16 | Advanced Micro Devices, Inc. | Method of monitoring via and trench profiles during manufacture |
| US6587794B1 (en) * | 1999-07-30 | 2003-07-01 | Koninklijke Philips Electronics N.V. | Method for measuring thin metal films |
| EP1150173B1 (de) * | 2000-04-28 | 2006-11-08 | ASML Netherlands B.V. | Bestimmung der Position einer Substrat-Ausrichtungsmarke |
| US7095511B2 (en) * | 2000-07-06 | 2006-08-22 | Filmetrics, Inc. | Method and apparatus for high-speed thickness mapping of patterned thin films |
-
2003
- 2003-12-10 WO PCT/IB2003/005876 patent/WO2004055476A1/en active IP Right Grant
- 2003-12-10 DE DE60322741T patent/DE60322741D1/de not_active Expired - Fee Related
- 2003-12-10 AU AU2003302975A patent/AU2003302975A1/en not_active Abandoned
- 2003-12-10 AT AT03813254T patent/ATE403845T1/de not_active IP Right Cessation
- 2003-12-10 CN CNA2003801058550A patent/CN1726380A/zh active Pending
- 2003-12-10 KR KR1020057010647A patent/KR20050084255A/ko not_active Application Discontinuation
- 2003-12-10 US US10/547,637 patent/US7365864B2/en not_active Expired - Fee Related
- 2003-12-10 EP EP03813254A patent/EP1573267B1/de not_active Expired - Lifetime
- 2003-12-10 JP JP2004560077A patent/JP2006510018A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20060203876A1 (en) | 2006-09-14 |
| WO2004055476A1 (en) | 2004-07-01 |
| EP1573267B1 (de) | 2008-08-06 |
| EP1573267A1 (de) | 2005-09-14 |
| JP2006510018A (ja) | 2006-03-23 |
| US7365864B2 (en) | 2008-04-29 |
| CN1726380A (zh) | 2006-01-25 |
| KR20050084255A (ko) | 2005-08-26 |
| DE60322741D1 (de) | 2008-09-18 |
| AU2003302975A1 (en) | 2004-07-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |