ATE399336T1 - Druckreferenzvorlage zur mehrschicht- oder mehrstruktur-registration und verfahren dafür - Google Patents
Druckreferenzvorlage zur mehrschicht- oder mehrstruktur-registration und verfahren dafürInfo
- Publication number
- ATE399336T1 ATE399336T1 AT05804583T AT05804583T ATE399336T1 AT E399336 T1 ATE399336 T1 AT E399336T1 AT 05804583 T AT05804583 T AT 05804583T AT 05804583 T AT05804583 T AT 05804583T AT E399336 T1 ATE399336 T1 AT E399336T1
- Authority
- AT
- Austria
- Prior art keywords
- reference template
- layer
- print reference
- structure registration
- registration print
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7007—Alignment other than original with workpiece
- G03F9/7011—Pre-exposure scan; original with original holder alignment; Prealignment, i.e. workpiece with workpiece holder
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7019—Calibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/04—Additives and treatments of the filtering material
- B01D2239/045—Deodorising additives
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/037,890 US20060157898A1 (en) | 2005-01-18 | 2005-01-18 | Imprint reference template for multilayer or multipattern registration and method therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE399336T1 true ATE399336T1 (de) | 2008-07-15 |
Family
ID=35539396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05804583T ATE399336T1 (de) | 2005-01-18 | 2005-10-18 | Druckreferenzvorlage zur mehrschicht- oder mehrstruktur-registration und verfahren dafür |
Country Status (7)
Country | Link |
---|---|
US (2) | US20060157898A1 (de) |
EP (1) | EP1839088B1 (de) |
JP (1) | JP2008527736A (de) |
CN (1) | CN101088045B (de) |
AT (1) | ATE399336T1 (de) |
DE (1) | DE602005007776D1 (de) |
WO (1) | WO2006078333A1 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080102225A1 (en) * | 2005-03-23 | 2008-05-01 | Braun Christopher P | Method for Manufacturing a Device Using Imprint Lithography and Direct Write Technology |
US20080023885A1 (en) * | 2006-06-15 | 2008-01-31 | Nanochip, Inc. | Method for forming a nano-imprint lithography template having very high feature counts |
US20070121477A1 (en) * | 2006-06-15 | 2007-05-31 | Nanochip, Inc. | Cantilever with control of vertical and lateral position of contact probe tip |
US20080074984A1 (en) * | 2006-09-21 | 2008-03-27 | Nanochip, Inc. | Architecture for a Memory Device |
JP5326806B2 (ja) * | 2009-05-21 | 2013-10-30 | 住友電気工業株式会社 | 半導体光素子を作製する方法 |
US7977655B2 (en) * | 2009-05-21 | 2011-07-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and system of monitoring E-beam overlay and providing advanced process control |
JP2012089636A (ja) * | 2010-10-19 | 2012-05-10 | Toshiba Corp | ナノインプリント法 |
CN102456540B (zh) * | 2010-10-19 | 2014-05-21 | 上海华虹宏力半导体制造有限公司 | 应用于外延工艺中的光刻套刻标记的制备方法 |
CN102848709B (zh) * | 2012-09-29 | 2015-05-13 | 信利光电股份有限公司 | 一种半自动丝网印刷对位方法 |
US9377683B2 (en) | 2013-03-22 | 2016-06-28 | HGST Netherlands B.V. | Imprint template with optically-detectable alignment marks and method for making using block copolymers |
US8900885B1 (en) | 2013-05-28 | 2014-12-02 | International Business Machines Corporation | Wafer bonding misalignment reduction |
US11075126B2 (en) * | 2019-02-15 | 2021-07-27 | Kla-Tencor Corporation | Misregistration measurements using combined optical and electron beam technology |
US11488949B1 (en) * | 2021-06-07 | 2022-11-01 | United Microelectronics Corp. | Method of generating dummy patterns for device-under-test and calibration kits |
WO2023172766A2 (en) * | 2022-03-11 | 2023-09-14 | Board Of Regents, The University Of Texas System | Nanoshape patterning techniques that allow high-throughput fabrication of functional nanostructures with complex geometries on planar and non-planar substrates |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR0138297B1 (ko) * | 1994-02-07 | 1998-06-01 | 김광호 | 포토 마스크 및 그 제조 방법 |
US5772905A (en) * | 1995-11-15 | 1998-06-30 | Regents Of The University Of Minnesota | Nanoimprint lithography |
US6300018B1 (en) * | 1999-09-21 | 2001-10-09 | Tyco Electronics Logistics Ag | Photolithography mask having a subresolution alignment mark window |
KR100862301B1 (ko) * | 2000-07-16 | 2008-10-13 | 보드 오브 리전츠, 더 유니버시티 오브 텍사스 시스템 | 임프린트 리소그래피를 위한 고분해능 오버레이 정렬 방법 및 시스템 |
KR101031528B1 (ko) * | 2000-10-12 | 2011-04-27 | 더 보드 오브 리전츠 오브 더 유니버시티 오브 텍사스 시스템 | 실온 저압 마이크로- 및 나노- 임프린트 리소그래피용템플릿 |
JP2002252157A (ja) * | 2001-02-22 | 2002-09-06 | Sony Corp | マスク作製用部材およびその製造方法ならびにマスクおよびその製造方法ならびに露光方法ならびに半導体装置の製造方法 |
KR20050084450A (ko) * | 2002-12-19 | 2005-08-26 | 코닌클리즈케 필립스 일렉트로닉스 엔.브이. | 무응력 복합기판 및 이러한 복합기판의 제조 방법 |
-
2005
- 2005-01-18 US US11/037,890 patent/US20060157898A1/en not_active Abandoned
- 2005-10-18 WO PCT/US2005/037278 patent/WO2006078333A1/en active Search and Examination
- 2005-10-18 EP EP05804583A patent/EP1839088B1/de not_active Not-in-force
- 2005-10-18 CN CN2005800445057A patent/CN101088045B/zh not_active Expired - Fee Related
- 2005-10-18 AT AT05804583T patent/ATE399336T1/de not_active IP Right Cessation
- 2005-10-18 JP JP2007551243A patent/JP2008527736A/ja active Pending
- 2005-10-18 DE DE602005007776T patent/DE602005007776D1/de active Active
-
2008
- 2008-04-03 US US12/061,904 patent/US20080180646A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CN101088045A (zh) | 2007-12-12 |
CN101088045B (zh) | 2011-04-13 |
EP1839088B1 (de) | 2008-06-25 |
EP1839088A1 (de) | 2007-10-03 |
WO2006078333A1 (en) | 2006-07-27 |
US20060157898A1 (en) | 2006-07-20 |
JP2008527736A (ja) | 2008-07-24 |
DE602005007776D1 (de) | 2008-08-07 |
US20080180646A1 (en) | 2008-07-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |