ATE376710T1 - Laser mit automatisierter steuerung der strahlqualität - Google Patents
Laser mit automatisierter steuerung der strahlqualitätInfo
- Publication number
- ATE376710T1 ATE376710T1 AT00102800T AT00102800T ATE376710T1 AT E376710 T1 ATE376710 T1 AT E376710T1 AT 00102800 T AT00102800 T AT 00102800T AT 00102800 T AT00102800 T AT 00102800T AT E376710 T1 ATE376710 T1 AT E376710T1
- Authority
- AT
- Austria
- Prior art keywords
- laser
- automatic
- bandwidth
- wavelength
- pulse energy
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70025—Production of exposure light, i.e. light sources by lasers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1828—Diffraction gratings having means for producing variable diffraction
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70575—Wavelength control, e.g. control of bandwidth, multiple wavelength, selection of wavelength or matching of optical components to wavelength
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08081—Unstable resonators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
- H01S3/1055—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length one of the reflectors being constituted by a diffraction grating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08004—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection
- H01S3/08009—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection using a diffraction grating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/134—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/139—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
- H01S3/1392—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length by using a passive reference, e.g. absorption cell
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Lasers (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/248,466 US6094448A (en) | 1997-07-01 | 1999-02-11 | Grating assembly with bi-directional bandwidth control |
US09/390,579 US6212217B1 (en) | 1997-07-01 | 1999-09-03 | Smart laser with automated beam quality control |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE376710T1 true ATE376710T1 (de) | 2007-11-15 |
Family
ID=26939374
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00102800T ATE376710T1 (de) | 1999-02-11 | 2000-02-10 | Laser mit automatisierter steuerung der strahlqualität |
Country Status (7)
Country | Link |
---|---|
US (1) | US6212217B1 (de) |
EP (1) | EP1028502B1 (de) |
JP (1) | JP3837005B2 (de) |
KR (1) | KR100329958B1 (de) |
AT (1) | ATE376710T1 (de) |
DE (1) | DE60036828T2 (de) |
TW (1) | TW447182B (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6493374B1 (en) * | 1999-09-03 | 2002-12-10 | Cymer, Inc. | Smart laser with fast deformable grating |
US20020127497A1 (en) * | 1998-09-10 | 2002-09-12 | Brown Daniel J. W. | Large diffraction grating for gas discharge laser |
JP2000208848A (ja) * | 1999-01-19 | 2000-07-28 | Komatsu Ltd | 反射型波長選択素子の曲げ機構の固定装置 |
JP2000205966A (ja) * | 1999-01-20 | 2000-07-28 | Komatsu Ltd | 真空紫外レ―ザの波長測定装置 |
US6298080B1 (en) | 1999-03-12 | 2001-10-02 | Lambda Physik Ag | Narrow band excimer or molecular fluorine laser with adjustable bandwidth |
US6700915B2 (en) | 1999-03-12 | 2004-03-02 | Lambda Physik Ag | Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections |
US6882674B2 (en) * | 1999-12-27 | 2005-04-19 | Cymer, Inc. | Four KHz gas discharge laser system |
US6865210B2 (en) * | 2001-05-03 | 2005-03-08 | Cymer, Inc. | Timing control for two-chamber gas discharge laser system |
US6496528B2 (en) | 1999-09-03 | 2002-12-17 | Cymer, Inc. | Line narrowing unit with flexural grating mount |
DE60032017T2 (de) * | 1999-12-22 | 2007-05-03 | Cymer, Inc., San Diego | Schmalbandiger laser mit bidirektionaler strahlerweiterung |
JP3357341B2 (ja) * | 2000-05-19 | 2002-12-16 | 知夫 藤岡 | 円筒ストレートスラブ型ガス・レーザー |
US6603789B1 (en) | 2000-07-05 | 2003-08-05 | Lambda Physik Ag | Narrow band excimer or molecular fluorine laser with improved beam parameters |
US6801561B2 (en) | 2000-09-25 | 2004-10-05 | Lambda Physik Ag | Laser system and method for spectral narrowing through wavefront correction |
US6856638B2 (en) * | 2000-10-23 | 2005-02-15 | Lambda Physik Ag | Resonator arrangement for bandwidth control |
US6839372B2 (en) * | 2000-11-17 | 2005-01-04 | Cymer, Inc. | Gas discharge ultraviolet laser with enclosed beam path with added oxidizer |
US20050286599A1 (en) * | 2004-06-29 | 2005-12-29 | Rafac Robert J | Method and apparatus for gas discharge laser output light coherency reduction |
US7366219B2 (en) * | 2004-11-30 | 2008-04-29 | Cymer, Inc. | Line narrowing module |
US20060114956A1 (en) * | 2004-11-30 | 2006-06-01 | Sandstrom Richard L | High power high pulse repetition rate gas discharge laser system bandwidth management |
US7643522B2 (en) * | 2004-11-30 | 2010-01-05 | Cymer, Inc. | Method and apparatus for gas discharge laser bandwidth and center wavelength control |
JP4911558B2 (ja) | 2005-06-29 | 2012-04-04 | 株式会社小松製作所 | 狭帯域化レーザ装置 |
US8379687B2 (en) | 2005-06-30 | 2013-02-19 | Cymer, Inc. | Gas discharge laser line narrowing module |
US7321607B2 (en) * | 2005-11-01 | 2008-01-22 | Cymer, Inc. | External optics and chamber support system |
US8259764B2 (en) | 2006-06-21 | 2012-09-04 | Cymer, Inc. | Bandwidth control device |
US8144739B2 (en) * | 2008-10-24 | 2012-03-27 | Cymer, Inc. | System method and apparatus for selecting and controlling light source bandwidth |
GB0920752D0 (en) * | 2009-11-26 | 2010-01-13 | Univ St Andrews | Laser |
CN107968305A (zh) * | 2017-11-23 | 2018-04-27 | 黑龙江工程学院 | 一种四端泵窄脉宽固体激光发生装置 |
CN115395349B (zh) * | 2022-10-27 | 2023-02-03 | 中国航天三江集团有限公司 | 一种大口径激光系统及其光束质量诊断方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5025445A (en) * | 1989-11-22 | 1991-06-18 | Cymer Laser Technologies | System for, and method of, regulating the wavelength of a light beam |
US5095492A (en) | 1990-07-17 | 1992-03-10 | Cymer Laser Technologies | Spectral narrowing technique |
US5230005A (en) * | 1991-11-05 | 1993-07-20 | The United States Of America As Represented By The Secretary Of The Navy | Electronic tuning of a broadband laser |
JP3397337B2 (ja) * | 1992-04-02 | 2003-04-14 | 株式会社小松製作所 | 狭帯域レーザ装置 |
US5297155A (en) * | 1993-03-29 | 1994-03-22 | E-Tek Dynamics, Inc. | Tunable laser assembly |
US5856991A (en) * | 1997-06-04 | 1999-01-05 | Cymer, Inc. | Very narrow band laser |
KR100546483B1 (ko) * | 1997-07-01 | 2006-01-26 | 사이머 인코포레이티드 | 불안정한 공진공동을 가진 초 협대역 레이저 |
US6055348A (en) * | 1998-09-23 | 2000-04-25 | Lucent Technologies Inc. | Tunable grating device and optical communication devices and systems comprising same |
-
1999
- 1999-09-03 US US09/390,579 patent/US6212217B1/en not_active Expired - Lifetime
-
2000
- 2000-02-10 DE DE60036828T patent/DE60036828T2/de not_active Expired - Lifetime
- 2000-02-10 AT AT00102800T patent/ATE376710T1/de not_active IP Right Cessation
- 2000-02-10 EP EP00102800A patent/EP1028502B1/de not_active Expired - Lifetime
- 2000-02-10 KR KR1020000006210A patent/KR100329958B1/ko not_active IP Right Cessation
- 2000-02-14 JP JP2000077242A patent/JP3837005B2/ja not_active Expired - Lifetime
- 2000-03-24 TW TW089102319A patent/TW447182B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US6212217B1 (en) | 2001-04-03 |
JP2000294864A (ja) | 2000-10-20 |
TW447182B (en) | 2001-07-21 |
DE60036828D1 (de) | 2007-12-06 |
EP1028502B1 (de) | 2007-10-24 |
KR20000058000A (ko) | 2000-09-25 |
DE60036828T2 (de) | 2008-02-07 |
EP1028502A2 (de) | 2000-08-16 |
EP1028502A3 (de) | 2003-08-27 |
KR100329958B1 (ko) | 2002-03-22 |
JP3837005B2 (ja) | 2006-10-25 |
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Legal Events
Date | Code | Title | Description |
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RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |