ATE373781T1 - Vakuumpumpanordnung - Google Patents

Vakuumpumpanordnung

Info

Publication number
ATE373781T1
ATE373781T1 AT04000831T AT04000831T ATE373781T1 AT E373781 T1 ATE373781 T1 AT E373781T1 AT 04000831 T AT04000831 T AT 04000831T AT 04000831 T AT04000831 T AT 04000831T AT E373781 T1 ATE373781 T1 AT E373781T1
Authority
AT
Austria
Prior art keywords
vacuum pumping
pumping arrangement
arrangement
flange
pump
Prior art date
Application number
AT04000831T
Other languages
English (en)
Inventor
Robert Watz
Original Assignee
Pfeiffer Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32668001&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE373781(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum Gmbh filed Critical Pfeiffer Vacuum Gmbh
Application granted granted Critical
Publication of ATE373781T1 publication Critical patent/ATE373781T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressor (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
AT04000831T 2003-02-07 2004-01-16 Vakuumpumpanordnung ATE373781T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10305038A DE10305038A1 (de) 2003-02-07 2003-02-07 Vakuumpumpanordnung

Publications (1)

Publication Number Publication Date
ATE373781T1 true ATE373781T1 (de) 2007-10-15

Family

ID=32668001

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04000831T ATE373781T1 (de) 2003-02-07 2004-01-16 Vakuumpumpanordnung

Country Status (5)

Country Link
US (1) US7500821B2 (de)
EP (1) EP1447567B1 (de)
JP (1) JP2004239258A (de)
AT (1) ATE373781T1 (de)
DE (2) DE10305038A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008011489U1 (de) * 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe
DE102013203421A1 (de) * 2013-02-28 2014-08-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE202013008468U1 (de) * 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpengehäuse
JP5772994B2 (ja) * 2014-01-10 2015-09-02 株式会社島津製作所 ターボ分子ポンプ
JP2022134773A (ja) * 2021-03-04 2022-09-15 エドワーズ株式会社 真空ポンプ

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1136957A (en) * 1914-01-06 1915-04-27 Carl F Hettinger Rotary compressor.
US1288728A (en) * 1915-09-18 1918-12-24 Spencer Turbine Co Rotary blower.
US1601531A (en) * 1925-05-11 1926-09-28 Jeannin Electric Company Electric-motor casing
CA584954A (en) * 1954-07-01 1959-10-13 Westinghouse Electric Corporation Motor pump unit
US3142155A (en) * 1961-11-29 1964-07-28 Gen Electric Gas turbine engine cooling arrangement
US4073338A (en) * 1973-06-26 1978-02-14 Toyota Chuo Kenkyusho Heat exchangers
JP2538796B2 (ja) * 1989-05-09 1996-10-02 株式会社東芝 真空排気装置および真空排気方法
USRE36610E (en) * 1989-05-09 2000-03-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
DE4020015C1 (de) 1990-06-20 1991-09-26 Mannesmann Ag, 4000 Duesseldorf, De
US5154573A (en) * 1991-09-12 1992-10-13 Ingersoll-Rand Company Cooling system for centrifugal pump components
DE4237972C2 (de) * 1992-11-11 1997-06-12 Leybold Ag Vakuumpumpe mit Rotor
DE4220015A1 (de) * 1992-06-19 1993-12-23 Leybold Ag Gasreibungsvakuumpumpe
FR2739574B1 (fr) * 1995-10-04 1997-11-14 Cit Alcatel Groupe de pompage secondaire
IT1287016B1 (it) * 1996-07-18 1998-07-24 Varian Spa Pompa da vuoto.
DE19724323A1 (de) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flanschverbindung
JPH11315794A (ja) * 1998-05-01 1999-11-16 Kashiyama Kogyo Kk 冷却機構付スクリュードライ真空ポンプ
CN1119511C (zh) * 1998-08-18 2003-08-27 西门子公司 透平机壳体和避免其在关停透平机后发生弯曲变形的方法
JP4657463B2 (ja) * 2001-02-01 2011-03-23 エドワーズ株式会社 真空ポンプ

Also Published As

Publication number Publication date
EP1447567A3 (de) 2005-06-15
EP1447567A2 (de) 2004-08-18
DE502004004989D1 (de) 2007-10-31
JP2004239258A (ja) 2004-08-26
US7500821B2 (en) 2009-03-10
US20040156713A1 (en) 2004-08-12
DE10305038A1 (de) 2004-08-19
EP1447567B1 (de) 2007-09-19

Similar Documents

Publication Publication Date Title
ATE372464T1 (de) Pumpe mit integriertem motor
DE502004000059D1 (de) Vakuumsauger
SG158151A1 (en) Suction pump with air release valve
EP1335133A3 (de) Zweistufige Verdichter
EP2551527A3 (de) Verdichtergeräuchsunterdrückung
DE50312630D1 (de) Turbomolekularvakuumpumpe
PL1582607T3 (pl) Układ śluzy dla urządzenia do obróbki próżniowej i sposób jego eksploatacji
ATE373781T1 (de) Vakuumpumpanordnung
DE50309460D1 (de) Vakuumpumpsystem
DE60313493D1 (de) Vakuumpumpe
AU2003218667A1 (en) Turbomolecular pump with a high-vacuum sided circular suction surface
ITTO20020370A1 (it) Stadio di pompaggio per pompa da vuoto.
AU2003269614A8 (en) Suction valve for a small hermetic compressor
ATE333050T1 (de) Integrierte drehzahlminderer- und pumpenanordnung
ITTO20020859A1 (it) Stadio di pompaggio vibrante per pompe da vuoto e pompa da vuoto a stadi di pompaggio vibranti.
DE602005016515D1 (de) Seitenkanalverdichter
DE60328652D1 (de) Mehrstufige Roots-Type-Vakuumpumpe
DE69911257D1 (de) Vakuumpumpe
DE50302222D1 (de) Schlauchmembran-kolbenpumpe
ATE408236T1 (de) System zur plasmabehandlung von gasen in einer vakuumpumpe
EP2014922A3 (de) Abwasserförderungsstation
ATE365275T1 (de) Selbstansaugende kreiselpumpe
DE10295529D2 (de) Vakuumpumpe mit Schalldämpfungskammer
TW200420836A (en) Small-sized pump
SE0100085L (sv) Sughuvud för golvdammsugare

Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee