ATE373315T1 - Reinraum - Google Patents

Reinraum

Info

Publication number
ATE373315T1
ATE373315T1 AT99114988T AT99114988T ATE373315T1 AT E373315 T1 ATE373315 T1 AT E373315T1 AT 99114988 T AT99114988 T AT 99114988T AT 99114988 T AT99114988 T AT 99114988T AT E373315 T1 ATE373315 T1 AT E373315T1
Authority
AT
Austria
Prior art keywords
chamber
air
absorbing
installing
inject
Prior art date
Application number
AT99114988T
Other languages
English (en)
Inventor
Manfred Renz
Original Assignee
M & W Zander Facility Eng Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19835538A external-priority patent/DE19835538A1/de
Application filed by M & W Zander Facility Eng Gmbh filed Critical M & W Zander Facility Eng Gmbh
Application granted granted Critical
Publication of ATE373315T1 publication Critical patent/ATE373315T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/28—Arrangement or mounting of filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/30—Arrangement or mounting of heat-exchangers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ventilation (AREA)
  • Filters For Electric Vacuum Cleaners (AREA)
  • Professional, Industrial, Or Sporting Protective Garments (AREA)
  • Types And Forms Of Lifts (AREA)
AT99114988T 1998-08-06 1999-07-31 Reinraum ATE373315T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19835538A DE19835538A1 (de) 1998-08-06 1998-08-06 Reinraum

Publications (1)

Publication Number Publication Date
ATE373315T1 true ATE373315T1 (de) 2007-09-15

Family

ID=7876654

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99114988T ATE373315T1 (de) 1998-08-06 1999-07-31 Reinraum

Country Status (3)

Country Link
KR (1) KR100689019B1 (de)
AT (1) ATE373315T1 (de)
DE (1) DE59914496D1 (de)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6124933A (ja) * 1984-07-12 1986-02-03 Toshiba Corp 空気調和システム

Also Published As

Publication number Publication date
KR100689019B1 (ko) 2007-03-08
DE59914496D1 (de) 2007-10-25
KR20000016985A (ko) 2000-03-25

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee