ATE360200T1 - Zelle zur messung der konzentration einer komponente einer zwei-komponenten flüssigkeitsmischung, eine vorrichtung und eine ätzanlage - Google Patents
Zelle zur messung der konzentration einer komponente einer zwei-komponenten flüssigkeitsmischung, eine vorrichtung und eine ätzanlageInfo
- Publication number
- ATE360200T1 ATE360200T1 AT01122756T AT01122756T ATE360200T1 AT E360200 T1 ATE360200 T1 AT E360200T1 AT 01122756 T AT01122756 T AT 01122756T AT 01122756 T AT01122756 T AT 01122756T AT E360200 T1 ATE360200 T1 AT E360200T1
- Authority
- AT
- Austria
- Prior art keywords
- component
- temperature
- liquid mixture
- concentration
- mixture
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/02—Investigating or analyzing materials by the use of thermal means by investigating changes of state or changes of phase; by investigating sintering
- G01N25/08—Investigating or analyzing materials by the use of thermal means by investigating changes of state or changes of phase; by investigating sintering of boiling point
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/02—Investigating or analyzing materials by the use of thermal means by investigating changes of state or changes of phase; by investigating sintering
- G01N25/08—Investigating or analyzing materials by the use of thermal means by investigating changes of state or changes of phase; by investigating sintering of boiling point
- G01N25/10—Analysis by measuring change of boiling point
Landscapes
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Weting (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01122756A EP1296132B1 (de) | 2001-09-21 | 2001-09-21 | Zelle zur Messung der Konzentration einer Komponente einer zwei-komponenten Flüssigkeitsmischung, eine Vorrichtung und eine Ätzanlage |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE360200T1 true ATE360200T1 (de) | 2007-05-15 |
Family
ID=8178692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT01122756T ATE360200T1 (de) | 2001-09-21 | 2001-09-21 | Zelle zur messung der konzentration einer komponente einer zwei-komponenten flüssigkeitsmischung, eine vorrichtung und eine ätzanlage |
Country Status (4)
Country | Link |
---|---|
US (1) | US20030056577A1 (de) |
EP (1) | EP1296132B1 (de) |
AT (1) | ATE360200T1 (de) |
DE (1) | DE60127957T2 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004051972B3 (de) * | 2004-10-25 | 2006-08-03 | Brandenburgische Technische Universität Cottbus | Verfahren zur kontinuierlichen Bestimmung des temperaturabhängigen Verlaufs von Dampf-Flüssig-Gleichgewichten von Mehr-Stoff-Gemischen |
BRPI1015785B1 (pt) | 2010-09-23 | 2017-12-12 | Robert Bosch Limitada | System and method of identification of the composition of a fuel and method of identification of the composition of a fluid |
KR102204850B1 (ko) | 2013-03-15 | 2021-01-18 | 티이엘 매뉴팩처링 앤드 엔지니어링 오브 아메리카, 인크. | 가열된 에칭 용액을 제공하기 위한 시스템 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2900816A (en) * | 1958-03-20 | 1959-08-25 | Foxboro Co | Boiling point temperature measuring system |
US4092211A (en) * | 1976-11-18 | 1978-05-30 | Northern Telecom Limited | Control of etch rate of silicon dioxide in boiling phosphoric acid |
FR2636430B1 (fr) * | 1988-09-09 | 1990-12-07 | Agronomique Inst Nat Rech | Ebulliometre universel permettant de mesurer les parametres numeriques d'une solution alcoolique |
JPH0296334A (ja) * | 1988-10-01 | 1990-04-09 | Nisso Eng Kk | 高温エッチング液の循環方法 |
DE4031008C1 (en) * | 1990-10-01 | 1992-04-30 | Pierburg Gmbh, 4040 Neuss, De | Utilising alcohol-contg. fuel in I.C. engine - with fuel mix compsn. correction using fuel sensor signals |
JPH04188728A (ja) * | 1990-11-22 | 1992-07-07 | Hitachi Ltd | 湿式エッチング装置 |
US5443695A (en) * | 1993-02-26 | 1995-08-22 | Athens Corporation | Distillation apparatus for concentrating less volatile liquids |
JPH08152207A (ja) * | 1994-11-29 | 1996-06-11 | Sanyo Electric Co Ltd | 空気調和機 |
JPH09275091A (ja) * | 1996-04-03 | 1997-10-21 | Mitsubishi Electric Corp | 半導体窒化膜エッチング装置 |
US5830375A (en) * | 1996-06-10 | 1998-11-03 | Taiwan Semiconductor Manufacturing Company Ltd. | Automated method for monitoring and controlling the orthophosphoric acid etch rate of silicon nitride insulator layers |
US5779927A (en) * | 1997-01-27 | 1998-07-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Modified reflux etcher controlled by pH or conductivity sensing loop |
DE19945928C1 (de) * | 1999-09-24 | 2001-06-21 | Siemens Ag | Bestimmung der Alkoholkonzentration im Elektrolyt von Brennstoffzellen |
-
2001
- 2001-09-21 AT AT01122756T patent/ATE360200T1/de not_active IP Right Cessation
- 2001-09-21 EP EP01122756A patent/EP1296132B1/de not_active Expired - Lifetime
- 2001-09-21 DE DE60127957T patent/DE60127957T2/de not_active Expired - Fee Related
-
2002
- 2002-09-23 US US10/252,994 patent/US20030056577A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20030056577A1 (en) | 2003-03-27 |
EP1296132A1 (de) | 2003-03-26 |
DE60127957D1 (de) | 2007-05-31 |
EP1296132B1 (de) | 2007-04-18 |
DE60127957T2 (de) | 2008-01-17 |
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Legal Events
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RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |