ATE338935T1 - Massstab-vorrichtung - Google Patents

Massstab-vorrichtung

Info

Publication number
ATE338935T1
ATE338935T1 AT03022924T AT03022924T ATE338935T1 AT E338935 T1 ATE338935 T1 AT E338935T1 AT 03022924 T AT03022924 T AT 03022924T AT 03022924 T AT03022924 T AT 03022924T AT E338935 T1 ATE338935 T1 AT E338935T1
Authority
AT
Austria
Prior art keywords
scale
stationary part
detector
scale device
position signal
Prior art date
Application number
AT03022924T
Other languages
English (en)
Inventor
Gunichi Nakamura
Mitsuru Ohno
Original Assignee
Sony Mfg Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Mfg Systems Corp filed Critical Sony Mfg Systems Corp
Application granted granted Critical
Publication of ATE338935T1 publication Critical patent/ATE338935T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)
  • Polarising Elements (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Semiconductor Lasers (AREA)
AT03022924T 2003-02-10 2003-10-09 Massstab-vorrichtung ATE338935T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003032512A JP4223823B2 (ja) 2003-02-10 2003-02-10 スケール装置

Publications (1)

Publication Number Publication Date
ATE338935T1 true ATE338935T1 (de) 2006-09-15

Family

ID=32653045

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03022924T ATE338935T1 (de) 2003-02-10 2003-10-09 Massstab-vorrichtung

Country Status (5)

Country Link
US (1) US6931741B2 (de)
EP (1) EP1445584B1 (de)
JP (1) JP4223823B2 (de)
AT (1) ATE338935T1 (de)
DE (1) DE60308136T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10204611B4 (de) * 2002-02-05 2007-04-05 Dr. Johannes Heidenhain Gmbh Verfahren und Vorrichtung zum Anbringen eines Maßstabes oder Maßstabträgers
DE102005028872B3 (de) * 2005-06-22 2006-08-03 Siemens Ag Maschine mit einem entlang einer Traverse bewegbaren Maschinenelement
CN101532815B (zh) 2009-04-24 2011-05-11 广州市诺信数字测控设备有限公司 磁栅尺托板结构
DE102009044917A1 (de) * 2009-09-23 2011-04-07 Dr. Johannes Heidenhain Gmbh Längenmesseinrichtung
DE102012203220A1 (de) * 2012-03-01 2013-09-05 Dr. Johannes Heidenhain Gmbh Längenmesseinrichtung
JP5537685B2 (ja) * 2013-02-04 2014-07-02 ハイデンハイン株式会社 エンコーダヘッドの交換方法
EP3255384B1 (de) * 2016-06-07 2018-11-28 Dr. Johannes Heidenhain GmbH Massverkörperung sowie positionsmesseinrichtung
ES2702948T3 (es) * 2016-07-27 2019-03-06 Heidenhain Gmbh Dr Johannes Equipo para medir longitudes
JP6895332B2 (ja) * 2017-07-05 2021-06-30 株式会社ミツトヨ リニアスケール

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2807819A1 (de) * 1978-02-23 1979-08-30 Int Harvester Co Vorrichtung zum verschliessen von schlitzfoermigen oeffnungen zum hindurchfuehren von in einer ebene schwenkbar gelagerten, hand- oder fussbetaetigten bedienungshebeln mit einem jeder oeffnung zugeordneten dichtungselement
GB2094395B (en) 1981-03-06 1985-03-13 Mitutoyo Mfg Co Ltd Dust excluding fasteners
DE3315214A1 (de) * 1983-04-27 1984-10-31 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Laengen- oder winkelmesseinrichtung
DE3316082A1 (de) * 1983-05-03 1984-11-08 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Messeinrichtung
DE4216825C2 (de) 1992-05-21 1994-03-10 Zeiss Carl Jena Gmbh Gekapseltes translatorisches Meßsystem
JP3134590B2 (ja) * 1993-05-13 2001-02-13 ソニー・プレシジョン・テクノロジー株式会社 スケール装置
DE4323635C2 (de) 1993-07-15 2001-05-17 Heidenhain Gmbh Dr Johannes Gekapselte Meßeinrichtung
DE19526517C2 (de) * 1995-07-20 2000-08-24 Zeiss Carl Jena Gmbh Anordnung zur Befestigung einer Längenmeßeinrichtung
JPH0953638A (ja) * 1995-08-11 1997-02-25 Nippon Thompson Co Ltd 位置検出装置並びにこれを具備した軌道台ユニット及び案内ユニット
DE69830950T2 (de) * 1997-05-28 2006-05-24 Sony Manufacturing Systems Corp. Träger für eine magnetische Skala
JP4174096B2 (ja) * 1998-03-31 2008-10-29 ソニーマニュファクチュアリングシステムズ株式会社 位置検出装置
DE19912310B4 (de) * 1999-03-19 2007-11-29 Dr. Johannes Heidenhain Gmbh Positionsmeßeinrichtung
US6772531B1 (en) * 1999-11-30 2004-08-10 Renishaw Plc Measurement apparatus including a track for a measurement scale and apparatus for tensioning the scale
JP4434452B2 (ja) * 2000-08-15 2010-03-17 ソニーマニュファクチュアリングシステムズ株式会社 測尺装置
JP3668111B2 (ja) * 2000-09-06 2005-07-06 株式会社ミツトヨ ユニット型リニアスケール

Also Published As

Publication number Publication date
JP4223823B2 (ja) 2009-02-12
DE60308136D1 (de) 2006-10-19
DE60308136T2 (de) 2007-08-30
US20040154181A1 (en) 2004-08-12
EP1445584B1 (de) 2006-09-06
JP2004245591A (ja) 2004-09-02
US6931741B2 (en) 2005-08-23
EP1445584A1 (de) 2004-08-11

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