ATE333162T1 - Akustische oberflächenwellenvorrichtung - Google Patents
Akustische oberflächenwellenvorrichtungInfo
- Publication number
- ATE333162T1 ATE333162T1 AT99970800T AT99970800T ATE333162T1 AT E333162 T1 ATE333162 T1 AT E333162T1 AT 99970800 T AT99970800 T AT 99970800T AT 99970800 T AT99970800 T AT 99970800T AT E333162 T1 ATE333162 T1 AT E333162T1
- Authority
- AT
- Austria
- Prior art keywords
- plane
- acoustic wave
- surface acoustic
- electrodes
- wave device
- Prior art date
Links
- 238000010897 surface acoustic wave method Methods 0.000 title abstract 2
- 239000013078 crystal Substances 0.000 abstract 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 4
- 229910052782 aluminium Inorganic materials 0.000 abstract 4
- 239000010453 quartz Substances 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
- Electrophonic Musical Instruments (AREA)
- Bridges Or Land Bridges (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31409898 | 1998-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE333162T1 true ATE333162T1 (de) | 2006-08-15 |
Family
ID=18049224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT99970800T ATE333162T1 (de) | 1998-10-16 | 1999-10-12 | Akustische oberflächenwellenvorrichtung |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US6339277B1 (de) |
| EP (1) | EP1041716B1 (de) |
| JP (1) | JP3800959B2 (de) |
| KR (1) | KR100455493B1 (de) |
| CN (1) | CN1130824C (de) |
| AT (1) | ATE333162T1 (de) |
| DE (1) | DE69932316T2 (de) |
| MY (1) | MY117200A (de) |
| WO (1) | WO2000024123A1 (de) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3846221B2 (ja) * | 2000-07-14 | 2006-11-15 | 株式会社村田製作所 | 弾性表面波素子 |
| JP3797144B2 (ja) * | 2001-06-25 | 2006-07-12 | 株式会社村田製作所 | 弾性表面波装置 |
| JP2003069357A (ja) * | 2001-08-28 | 2003-03-07 | Murata Mfg Co Ltd | 弾性表面波素子の製造方法および弾性表面波素子 |
| TWI282660B (en) * | 2001-12-27 | 2007-06-11 | Murata Manufacturing Co | Surface acoustic wave device and manufacturing method therefor |
| JP4359535B2 (ja) * | 2004-02-06 | 2009-11-04 | アルプス電気株式会社 | 弾性表面波素子 |
| JP4049195B2 (ja) | 2005-09-30 | 2008-02-20 | エプソントヨコム株式会社 | 弾性表面波デバイスの製造方法 |
| GB2450168B (en) * | 2007-06-15 | 2012-03-07 | Transense Technologies Plc | A SAW torque and temperature sensor with improved temperature sensitivity |
| WO2009150786A1 (ja) | 2008-06-09 | 2009-12-17 | 株式会社村田製作所 | 弾性表面波装置及びその製造方法 |
| CN101403096B (zh) * | 2008-11-06 | 2010-06-02 | 哈尔滨工程大学 | 一种具有高耐蚀性纳米孪晶铝表面膜材料的制备方法 |
| DE102009056663B4 (de) * | 2009-12-02 | 2022-08-11 | Tdk Electronics Ag | Metallisierung mit hoher Leistungsverträglichkeit und hoher elektrischer Leitfähigkeit und Verfahren zur Herstellung |
| WO2011077942A1 (ja) * | 2009-12-24 | 2011-06-30 | 株式会社村田製作所 | 磁気センサ素子及びその製造方法並びに磁気センサ装置 |
| US9153764B2 (en) * | 2011-03-08 | 2015-10-06 | Nokia Technologies Oy | Apparatus for transducing a surface acoustic wave |
| WO2017111170A1 (ja) * | 2015-12-25 | 2017-06-29 | 京セラ株式会社 | 弾性波素子および通信装置 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4189516A (en) * | 1978-07-17 | 1980-02-19 | National Research Development Corporation | Epitaxial crystalline aluminium nitride |
| JPS6173409A (ja) * | 1984-09-18 | 1986-04-15 | Nec Kansai Ltd | 弾性表面波装置 |
| JPS6480113A (en) * | 1987-09-22 | 1989-03-27 | Hitachi Ltd | Surface acoustic wave device |
| JPH0388406A (ja) | 1989-04-11 | 1991-04-12 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| US5162690A (en) * | 1989-04-14 | 1992-11-10 | Murata Manufacturing Co., Ltd. | Surface acoustic wave device |
| JP2545983B2 (ja) | 1989-04-14 | 1996-10-23 | 株式会社村田製作所 | 弾性表面波装置 |
| JPH0340510A (ja) * | 1989-07-06 | 1991-02-21 | Murata Mfg Co Ltd | 弾性表面波装置 |
| JPH0746074A (ja) * | 1993-07-26 | 1995-02-14 | Nec Corp | 弾性表面波装置及びその製造方法 |
| JPH07283682A (ja) * | 1994-04-13 | 1995-10-27 | Murata Mfg Co Ltd | 弾性表面波共振子フィルタ |
| JPH08148966A (ja) * | 1994-11-18 | 1996-06-07 | Hitachi Ltd | 弾性表面波素子電極 |
| CN1110132C (zh) * | 1995-09-21 | 2003-05-28 | Tdk株式会社 | 弹性表面波器件及其制造方法 |
-
1999
- 1999-10-12 US US09/581,470 patent/US6339277B1/en not_active Expired - Lifetime
- 1999-10-12 MY MYPI99004391A patent/MY117200A/en unknown
- 1999-10-12 JP JP2000577768A patent/JP3800959B2/ja not_active Expired - Lifetime
- 1999-10-12 AT AT99970800T patent/ATE333162T1/de not_active IP Right Cessation
- 1999-10-12 CN CN99801792A patent/CN1130824C/zh not_active Expired - Lifetime
- 1999-10-12 KR KR10-2000-7006442A patent/KR100455493B1/ko not_active Expired - Fee Related
- 1999-10-12 WO PCT/JP1999/005624 patent/WO2000024123A1/ja not_active Ceased
- 1999-10-12 EP EP99970800A patent/EP1041716B1/de not_active Expired - Lifetime
- 1999-10-12 DE DE69932316T patent/DE69932316T2/de not_active Expired - Lifetime
-
2001
- 2001-10-02 US US09/967,978 patent/US6566788B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE69932316D1 (de) | 2006-08-24 |
| US20020017837A1 (en) | 2002-02-14 |
| US6566788B2 (en) | 2003-05-20 |
| JP3800959B2 (ja) | 2006-07-26 |
| EP1041716B1 (de) | 2006-07-12 |
| MY117200A (en) | 2004-05-31 |
| CN1287713A (zh) | 2001-03-14 |
| DE69932316T2 (de) | 2007-07-19 |
| EP1041716A4 (de) | 2001-11-28 |
| WO2000024123A1 (en) | 2000-04-27 |
| KR100455493B1 (ko) | 2004-11-08 |
| CN1130824C (zh) | 2003-12-10 |
| KR20010033081A (ko) | 2001-04-25 |
| US6339277B1 (en) | 2002-01-15 |
| EP1041716A1 (de) | 2000-10-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |