ATE329271T1 - Kombinierte struktur mit verbesserter fähigkeit zur schockaufnahme und stress isolation für einen verbesserten mikromechanischen silizium beschleunigungsaufnehmer - Google Patents
Kombinierte struktur mit verbesserter fähigkeit zur schockaufnahme und stress isolation für einen verbesserten mikromechanischen silizium beschleunigungsaufnehmerInfo
- Publication number
- ATE329271T1 ATE329271T1 AT00942986T AT00942986T ATE329271T1 AT E329271 T1 ATE329271 T1 AT E329271T1 AT 00942986 T AT00942986 T AT 00942986T AT 00942986 T AT00942986 T AT 00942986T AT E329271 T1 ATE329271 T1 AT E329271T1
- Authority
- AT
- Austria
- Prior art keywords
- improved
- shock absorption
- combined structure
- absorption capability
- stress isolation
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14052699P | 1999-06-22 | 1999-06-22 | |
US09/432,306 US6257060B1 (en) | 1999-06-22 | 1999-11-02 | Combined enhanced shock load capability and stress isolation structure for an improved performance silicon micro-machined accelerometer |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE329271T1 true ATE329271T1 (de) | 2006-06-15 |
Family
ID=26838256
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00942986T ATE329271T1 (de) | 1999-06-22 | 2000-06-16 | Kombinierte struktur mit verbesserter fähigkeit zur schockaufnahme und stress isolation für einen verbesserten mikromechanischen silizium beschleunigungsaufnehmer |
Country Status (5)
Country | Link |
---|---|
US (1) | US6257060B1 (de) |
EP (1) | EP1218756B1 (de) |
AT (1) | ATE329271T1 (de) |
DE (1) | DE60028587T2 (de) |
WO (1) | WO2000079287A1 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004530134A (ja) | 2001-05-15 | 2004-09-30 | ハネウェル・インターナショナル・インコーポレーテッド | 加速度計歪軽減構造体 |
EP1419396B1 (de) * | 2001-08-20 | 2009-05-06 | Honeywell International Inc. | Bogenförmige federelemente für mikro-elektromechanischen beschleunigungssensor |
US6892578B2 (en) * | 2002-11-29 | 2005-05-17 | Hitachi Metals Ltd. | Acceleration sensor |
US7073380B2 (en) * | 2004-02-17 | 2006-07-11 | Honeywell International, Inc. | Pyramid socket suspension |
EP1953814B1 (de) * | 2005-11-25 | 2017-09-06 | Panasonic Intellectual Property Management Co., Ltd. | Kapselungsstruktur auf waferniveau und herstellungsverfahren dafür |
WO2007061062A1 (ja) * | 2005-11-25 | 2007-05-31 | Matsushita Electric Works, Ltd. | ウェハレベルパッケージ構造体の製造方法 |
US20070246665A1 (en) * | 2006-04-20 | 2007-10-25 | Lafond Peter H | Mechanical isolation for mems devices |
US7280262B1 (en) * | 2006-05-24 | 2007-10-09 | Honeywell International Inc. | Integrated die level isolation for a MEMS device |
DE102007049561A1 (de) * | 2007-10-16 | 2009-04-23 | Austriamicrosystems Ag | Halbleiterkörper und Verfahren zum Bearbeiten eines Halbleiterkörpers |
JP5652775B2 (ja) * | 2009-05-29 | 2015-01-14 | トレックス・セミコンダクター株式会社 | 加速度センサー素子およびこれを有する加速度センサー |
IL215656A0 (en) * | 2011-10-10 | 2011-11-30 | Israel Aerospace Ind Ltd | Accelerometer |
JP6252241B2 (ja) * | 2014-02-27 | 2017-12-27 | セイコーエプソン株式会社 | 力検出装置、およびロボット |
JP6476869B2 (ja) * | 2015-01-06 | 2019-03-06 | セイコーエプソン株式会社 | 電子デバイス、電子機器および移動体 |
US10278281B1 (en) * | 2015-10-30 | 2019-04-30 | Garmin International, Inc. | MEMS stress isolation and stabilization system |
GB2555412A (en) | 2016-10-25 | 2018-05-02 | Atlantic Inertial Systems Ltd | Inertial sensor |
US10859596B2 (en) | 2018-07-20 | 2020-12-08 | Honeywell International Inc. | Mechanically-isolated in-plane pendulous vibrating beam accelerometer |
CN117929782B (zh) * | 2024-03-21 | 2024-06-07 | 中国工程物理研究院电子工程研究所 | 一种低应力摆式微加速度计 |
CN118011043B (zh) * | 2024-04-10 | 2024-06-18 | 中国工程物理研究院电子工程研究所 | 具有一体式应力隔离下极板的微加速度计及其加工方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01239466A (ja) * | 1988-03-18 | 1989-09-25 | Fujikura Ltd | 半導体加速度センサの製造方法 |
US5005413A (en) * | 1989-02-27 | 1991-04-09 | Sundstrand Data Control, Inc. | Accelerometer with coplanar push-pull force transducers |
US5205171A (en) * | 1991-01-11 | 1993-04-27 | Northrop Corporation | Miniature silicon accelerometer and method |
FR2698447B1 (fr) * | 1992-11-23 | 1995-02-03 | Suisse Electronique Microtech | Cellule de mesure micro-usinée. |
US5777226A (en) * | 1994-03-28 | 1998-07-07 | I/O Sensors, Inc. | Sensor structure with L-shaped spring legs |
US6316796B1 (en) * | 1995-05-24 | 2001-11-13 | Lucas Novasensor | Single crystal silicon sensor with high aspect ratio and curvilinear structures |
US5948981A (en) * | 1996-05-21 | 1999-09-07 | Alliedsignal Inc. | Vibrating beam accelerometer |
US5996411A (en) * | 1996-11-25 | 1999-12-07 | Alliedsignal Inc. | Vibrating beam accelerometer and method for manufacturing the same |
US5948982A (en) * | 1998-02-23 | 1999-09-07 | Alliedsignal Inc. | Vibrating beam accelerometers and methods of forming vibrating beam accelerometers |
JPH11311631A (ja) * | 1998-04-28 | 1999-11-09 | Matsushita Electric Works Ltd | 半導体加速度センサ |
-
1999
- 1999-11-02 US US09/432,306 patent/US6257060B1/en not_active Expired - Lifetime
-
2000
- 2000-06-16 EP EP00942986A patent/EP1218756B1/de not_active Expired - Lifetime
- 2000-06-16 WO PCT/US2000/016994 patent/WO2000079287A1/en active IP Right Grant
- 2000-06-16 DE DE60028587T patent/DE60028587T2/de not_active Expired - Lifetime
- 2000-06-16 AT AT00942986T patent/ATE329271T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1218756B1 (de) | 2006-06-07 |
WO2000079287A1 (en) | 2000-12-28 |
EP1218756A4 (de) | 2003-10-15 |
EP1218756A1 (de) | 2002-07-03 |
DE60028587T2 (de) | 2007-06-21 |
DE60028587D1 (de) | 2006-07-20 |
US6257060B1 (en) | 2001-07-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |