ATE317552T1 - Spiegel für laserabtastsystem - Google Patents

Spiegel für laserabtastsystem

Info

Publication number
ATE317552T1
ATE317552T1 AT99965815T AT99965815T ATE317552T1 AT E317552 T1 ATE317552 T1 AT E317552T1 AT 99965815 T AT99965815 T AT 99965815T AT 99965815 T AT99965815 T AT 99965815T AT E317552 T1 ATE317552 T1 AT E317552T1
Authority
AT
Austria
Prior art keywords
mirror
bottom end
laser scanning
scanning system
stiffer
Prior art date
Application number
AT99965815T
Other languages
English (en)
Inventor
Felix Stukalin
Original Assignee
Gen Scanning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Scanning Inc filed Critical Gen Scanning Inc
Application granted granted Critical
Publication of ATE317552T1 publication Critical patent/ATE317552T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
AT99965815T 1998-11-16 1999-11-15 Spiegel für laserabtastsystem ATE317552T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/192,824 US6243188B1 (en) 1998-11-16 1998-11-16 Light beam scanning system

Publications (1)

Publication Number Publication Date
ATE317552T1 true ATE317552T1 (de) 2006-02-15

Family

ID=22711175

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99965815T ATE317552T1 (de) 1998-11-16 1999-11-15 Spiegel für laserabtastsystem

Country Status (8)

Country Link
US (1) US6243188B1 (de)
EP (1) EP1131657B1 (de)
JP (1) JP2002530694A (de)
KR (1) KR100640131B1 (de)
CN (1) CN1158543C (de)
AT (1) ATE317552T1 (de)
DE (1) DE69929832T2 (de)
WO (1) WO2000029894A2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6770546B2 (en) * 2001-07-30 2004-08-03 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing semiconductor device
US7339712B2 (en) * 2005-03-22 2008-03-04 3D Systems, Inc. Laser scanning and power control in a rapid prototyping system
US8290239B2 (en) * 2005-10-21 2012-10-16 Orbotech Ltd. Automatic repair of electric circuits
US10734857B2 (en) 2011-09-26 2020-08-04 Pangolin Laser Systems, Inc. Electromechanical limited rotation rotary actuator and method employing segmented coils
US9077219B2 (en) 2011-09-26 2015-07-07 Pangolin Laser Systems, Inc. Electromechanical limited rotation rotary actuator
US9270144B2 (en) 2011-09-26 2016-02-23 William R. Benner, Jr. High torque low inductance rotary actuator
US10284038B1 (en) 2011-09-26 2019-05-07 Pangolin Laser Systems, Inc. Electromechanical limited rotation rotary actuator and method employing segmented coils
US9195061B1 (en) 2013-01-28 2015-11-24 William R. Benner, Jr. Scanning mirror system and associated methods
US9530559B2 (en) 2013-01-30 2016-12-27 William R. Benner, Jr. Multi-turn electrical coil and fabricating device and associated methods
US9366860B1 (en) 2013-02-04 2016-06-14 William R. Benner, Jr. Mirror scanning control system and method
DE102017128356A1 (de) * 2017-11-30 2019-06-06 Trumpf Laser Gmbh Scanspiegel, Spiegelhalter und Scanspiegel-Einheit für ein Laser-Scansystem
JP7151630B2 (ja) * 2019-06-11 2022-10-12 株式会社デンソー 測距装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3998530A (en) 1975-07-28 1976-12-21 Westinghouse Electric Corporation Angularly movable mirror assembly
US4364000A (en) 1975-08-29 1982-12-14 Mfe Corporation Limited rotation device having two degrees of freedom
JPS54119259A (en) * 1978-03-08 1979-09-17 Matsushita Electric Ind Co Ltd Light polarizer
US4655543A (en) 1985-05-08 1987-04-07 General Scanning, Inc. Mount for attaching an optical element to a rotating shaft
US4874215A (en) 1987-04-23 1989-10-17 General Scanning, Inc. Tunable resonant mechanical system
US5150249A (en) * 1990-07-06 1992-09-22 General Scanning, Inc. Two-mirror scanner with pincushion error correction

Also Published As

Publication number Publication date
KR20010086030A (ko) 2001-09-07
WO2000029894A2 (en) 2000-05-25
EP1131657B1 (de) 2006-02-08
CN1328646A (zh) 2001-12-26
CN1158543C (zh) 2004-07-21
DE69929832D1 (de) 2006-04-20
DE69929832T2 (de) 2006-10-26
WO2000029894A3 (en) 2000-10-12
US6243188B1 (en) 2001-06-05
WO2000029894B1 (en) 2000-11-16
KR100640131B1 (ko) 2006-10-31
JP2002530694A (ja) 2002-09-17
EP1131657A2 (de) 2001-09-12

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties