ATE304736T1 - Mikro-elektromechanisches system und verfahren zu dessen herstellung - Google Patents

Mikro-elektromechanisches system und verfahren zu dessen herstellung

Info

Publication number
ATE304736T1
ATE304736T1 AT02796487T AT02796487T ATE304736T1 AT E304736 T1 ATE304736 T1 AT E304736T1 AT 02796487 T AT02796487 T AT 02796487T AT 02796487 T AT02796487 T AT 02796487T AT E304736 T1 ATE304736 T1 AT E304736T1
Authority
AT
Austria
Prior art keywords
micro
electromechanical system
production
elements
bistable
Prior art date
Application number
AT02796487T
Other languages
German (de)
English (en)
Inventor
Ralf Struempler
Original Assignee
Abb Research Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US2002/001662 external-priority patent/WO2002058089A1/fr
Application filed by Abb Research Ltd filed Critical Abb Research Ltd
Application granted granted Critical
Publication of ATE304736T1 publication Critical patent/ATE304736T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate

Landscapes

  • Micromachines (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT02796487T 2002-01-18 2002-12-23 Mikro-elektromechanisches system und verfahren zu dessen herstellung ATE304736T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/US2002/001662 WO2002058089A1 (fr) 2001-01-19 2002-01-18 Techniques, mecanismes et applications d'actionnement bistables
EP02405334A EP1357571A1 (fr) 2002-04-24 2002-04-24 Système microélectromécanique et son procédé de fabrication
PCT/CH2002/000722 WO2003060940A1 (fr) 2002-01-18 2002-12-23 Systeme micro-electromecanique et procede de fabrication

Publications (1)

Publication Number Publication Date
ATE304736T1 true ATE304736T1 (de) 2005-09-15

Family

ID=28686037

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02796487T ATE304736T1 (de) 2002-01-18 2002-12-23 Mikro-elektromechanisches system und verfahren zu dessen herstellung

Country Status (4)

Country Link
EP (2) EP1357571A1 (fr)
AT (1) ATE304736T1 (fr)
AU (1) AU2002361920A1 (fr)
WO (1) WO2003060940A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999052006A2 (fr) 1998-04-08 1999-10-14 Etalon, Inc. Modulation interferometrique de rayonnement
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
EP1809568A2 (fr) * 2004-09-27 2007-07-25 Idc, Llc Micro-commutateurs electromecaniques a membranes deformables
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
EP1850360A1 (fr) 2006-04-26 2007-10-31 Seiko Epson Corporation Microrupteur avec une première pièce commandable et une seconde pièce de contact
US7724417B2 (en) 2006-12-19 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US8022896B2 (en) 2007-08-08 2011-09-20 Qualcomm Mems Technologies, Inc. ESD protection for MEMS display panels

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9309327D0 (en) * 1993-05-06 1993-06-23 Smith Charles G Bi-stable memory element
ATE294461T1 (de) * 1996-02-10 2005-05-15 Fraunhofer Ges Forschung Bistabiler microantrieb mit gekoppelten membranen

Also Published As

Publication number Publication date
AU2002361920A1 (en) 2003-07-30
WO2003060940A1 (fr) 2003-07-24
EP1357571A1 (fr) 2003-10-29
EP1468436B1 (fr) 2005-09-14
EP1468436A1 (fr) 2004-10-20

Similar Documents

Publication Publication Date Title
PH12013500599B1 (en) Polarizing photochromic devices and methods of making the same
WO2003027003A3 (fr) Films et articles de nanotubes et procedes associes
ATE414673T1 (de) Schichtstruktur und herstellungsverfahren dafür
WO2002084722A3 (fr) Substrat demontable a tenue mecanique controlee et procede de realisation
AU2003206552A1 (en) Deflectable microstructure and method of manufacturing the same through bonding of wafers
ATE480495T1 (de) Verfahren zur herstellung von ein gettermaterial enthaltenden mikromechanischen vorrichtungen und so hergestellte vorrichtungen
AU2003266700A1 (en) Porous article and method for production thereof and electrochemical element using the porous article
WO2004099068A3 (fr) Surfaces de nanofibres destinees a etre utilisees dans des applications de surface active amelioree
WO2003024865A8 (fr) Procede pour la production de composants micro-electromecaniques
AU2003252238A1 (en) Piezoelectric component and method for manufacturing the same
AU2003222142A1 (en) Micro/nano-embossing process and useful applications thereof
WO2005123277A3 (fr) Films optiques et leurs procedes de production
HK1094044A1 (en) Diffuser disk for lcd applications, method for the production and use thereof
AU2003229196A8 (en) Ceramic thin film on various substrates, and process for producing same
ATE502139T1 (de) Verfahren zur reformierung von verbundfasern und verwendungen
WO2004041918A3 (fr) Microstructures et leurs procedes de fabrication
WO2005101112A3 (fr) Films optiques et procedes de fabrication de ces derniers
WO2003083912A3 (fr) Assemblage par fusion assistee par champ
WO2006028734A3 (fr) Anneau refermable ameliore et procede de fabrication de cet anneau
ATE304736T1 (de) Mikro-elektromechanisches system und verfahren zu dessen herstellung
RS35304A (en) Method for producing an impact- resistant polymethylmethacr ylate, and corresponding polymethylmethacrylate (pmma)
DE50214272D1 (de) Piezoelektrisches bauelement und verfahren zu dessen herstellung
AU2003252239A1 (en) Piezoelectric component and method for manufacturing the same
AU2003304246A1 (en) Method of forming nanostructures on ceramics and the ceramics formed
AU2003272763A1 (en) Method for manufacturing polymer microstructures and polymer waveguides

Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee