ATE288506T1 - Vorrichtung zur vakuumbedampfung - Google Patents

Vorrichtung zur vakuumbedampfung

Info

Publication number
ATE288506T1
ATE288506T1 AT02745799T AT02745799T ATE288506T1 AT E288506 T1 ATE288506 T1 AT E288506T1 AT 02745799 T AT02745799 T AT 02745799T AT 02745799 T AT02745799 T AT 02745799T AT E288506 T1 ATE288506 T1 AT E288506T1
Authority
AT
Austria
Prior art keywords
fed
sources
cavities
substrate
vacuum steaming
Prior art date
Application number
AT02745799T
Other languages
English (en)
Inventor
Andrea Fusi
Original Assignee
Galileo Vacuum Systems S R L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Galileo Vacuum Systems S R L filed Critical Galileo Vacuum Systems S R L
Application granted granted Critical
Publication of ATE288506T1 publication Critical patent/ATE288506T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Commercial Cooking Devices (AREA)
  • Beans For Foods Or Fodder (AREA)
  • General Preparation And Processing Of Foods (AREA)
AT02745799T 2001-07-03 2002-06-21 Vorrichtung zur vakuumbedampfung ATE288506T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT2001FI000122A ITFI20010122A1 (it) 2001-07-03 2001-07-03 Impianto di vaporizzazione sottovuoto per la metallizzazione di un substrato nastriforme e relativa sorgente di vaporizzazione
PCT/IT2002/000411 WO2003004720A1 (en) 2001-07-03 2002-06-21 Apparatus for vacuum vaporization

Publications (1)

Publication Number Publication Date
ATE288506T1 true ATE288506T1 (de) 2005-02-15

Family

ID=11442229

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02745799T ATE288506T1 (de) 2001-07-03 2002-06-21 Vorrichtung zur vakuumbedampfung

Country Status (5)

Country Link
EP (1) EP1402082B1 (de)
AT (1) ATE288506T1 (de)
DE (1) DE60202870T2 (de)
IT (1) ITFI20010122A1 (de)
WO (1) WO2003004720A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004047938B4 (de) * 2004-10-01 2008-10-23 Leybold Optics Gmbh Vorrichtung für die Verdampferbeschichtung eines bandförmigen Substrates

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2969448A (en) * 1959-03-03 1961-01-24 Continental Can Co Heater vaporizer element support
GB1203069A (en) * 1967-10-24 1970-08-26 Hochvakuum Dresden Veb Improvements in or relating to vapour coating of materials in a vacuum
US3901647A (en) * 1974-04-26 1975-08-26 Xerox Corp Low radiation open-boat crucibles
JP2001172762A (ja) * 1999-12-13 2001-06-26 Toyobo Co Ltd 真空蒸着装置

Also Published As

Publication number Publication date
DE60202870D1 (de) 2005-03-10
EP1402082B1 (de) 2005-02-02
ITFI20010122A1 (it) 2003-01-03
DE60202870T2 (de) 2006-04-13
EP1402082A1 (de) 2004-03-31
WO2003004720A1 (en) 2003-01-16

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Legal Events

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