ATE275724T1 - Anordnung zum verbinden eines tiefdruckeinganges eines gasanalysegerätes - Google Patents

Anordnung zum verbinden eines tiefdruckeinganges eines gasanalysegerätes

Info

Publication number
ATE275724T1
ATE275724T1 AT97906970T AT97906970T ATE275724T1 AT E275724 T1 ATE275724 T1 AT E275724T1 AT 97906970 T AT97906970 T AT 97906970T AT 97906970 T AT97906970 T AT 97906970T AT E275724 T1 ATE275724 T1 AT E275724T1
Authority
AT
Austria
Prior art keywords
connection
arrangement
line
gas flow
gas analyzer
Prior art date
Application number
AT97906970T
Other languages
English (en)
Inventor
Gerhard Rettinghaus
Original Assignee
Unaxis Balzers Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unaxis Balzers Ag filed Critical Unaxis Balzers Ag
Application granted granted Critical
Publication of ATE275724T1 publication Critical patent/ATE275724T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011—Sample conditioning
    • G01N33/0016—Sample conditioning by regulating a physical variable, e.g. pressure or temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495—Vacuum locks; Valves

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Medicinal Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Food Science & Technology (AREA)
  • Combustion & Propulsion (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Electron Tubes For Measurement (AREA)
  • Examining Or Testing Airtightness (AREA)
AT97906970T 1996-03-27 1997-03-24 Anordnung zum verbinden eines tiefdruckeinganges eines gasanalysegerätes ATE275724T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29605650U DE29605650U1 (de) 1996-03-27 1996-03-27 Anordnung zum Verbinden eines Tiefdruckeinganges eines Gasanalysegerätes
PCT/CH1997/000122 WO1997036177A1 (de) 1996-03-27 1997-03-24 Anordnung zum verbinden eines tiefdruckeinganges eines gasanalysegerätes

Publications (1)

Publication Number Publication Date
ATE275724T1 true ATE275724T1 (de) 2004-09-15

Family

ID=8021755

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97906970T ATE275724T1 (de) 1996-03-27 1997-03-24 Anordnung zum verbinden eines tiefdruckeinganges eines gasanalysegerätes

Country Status (6)

Country Link
US (1) US6310340B1 (de)
EP (1) EP0890100B1 (de)
JP (1) JP4079997B2 (de)
AT (1) ATE275724T1 (de)
DE (2) DE29605650U1 (de)
WO (1) WO1997036177A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6518581B1 (en) 2000-03-31 2003-02-11 Air Products And Chemicals, Inc. Apparatus for control of gas flow into a mass spectrometer using a series of small orifices
US7036904B2 (en) * 2003-10-30 2006-05-02 Lexmark International, Inc. Printhead swath height measurement and compensation for ink jet printing
KR101046520B1 (ko) 2007-09-07 2011-07-04 어플라이드 머티어리얼스, 인코포레이티드 내부 챔버 상의 부산물 막 증착을 제어하기 위한 ｐｅｃｖｄ 시스템에서의 소스 가스 흐름 경로 제어
US7810376B2 (en) 2007-11-06 2010-10-12 Picarro, Inc. Mitigation of gas memory effects in gas analysis
US20160334517A1 (en) * 2014-01-28 2016-11-17 Shimadzu Corporation Radiation detector

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE325726B (de) * 1969-04-21 1970-07-06 Lkb Produkter Ab
JPS5843692B2 (ja) * 1976-06-30 1983-09-28 株式会社日立製作所 液体クロマトグラフと質量分析計とを結合した分析装置
US4201913A (en) * 1978-10-06 1980-05-06 Honeywell Inc. Sampling system for mass spectrometer
DE3224801C2 (de) * 1982-07-02 1986-04-30 Edward William Prof. Dr. 8000 München Schlag Verfahren und Einrichtung zum Erzeugen von gepulsten Molekularstrahlen, die große, thermisch instabile Moleküle enthalten
US4933548A (en) * 1985-04-24 1990-06-12 Compagnie Generale Des Matieres Nucleaires Method and device for introducing samples for a mass spectrometer
US5205845A (en) * 1990-09-28 1993-04-27 The Regents Of The University Of Michigan Mechanical gas chromatography injection valves and column multiplexing techniques
US5318752A (en) * 1993-01-22 1994-06-07 Jan Visser Method and apparatus for sampling a reactive atmosphere into a vacuum chamber of an analyzer

Also Published As

Publication number Publication date
DE29605650U1 (de) 1996-07-25
DE59711901D1 (de) 2004-10-14
EP0890100A1 (de) 1999-01-13
JP2000508065A (ja) 2000-06-27
US6310340B1 (en) 2001-10-30
WO1997036177A1 (de) 1997-10-02
JP4079997B2 (ja) 2008-04-23
EP0890100B1 (de) 2004-09-08

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Legal Events

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REN Ceased due to non-payment of the annual fee