ATE26744T1 - Molekularpumpe fuer hochvakuum. - Google Patents

Molekularpumpe fuer hochvakuum.

Info

Publication number
ATE26744T1
ATE26744T1 AT84201622T AT84201622T ATE26744T1 AT E26744 T1 ATE26744 T1 AT E26744T1 AT 84201622 T AT84201622 T AT 84201622T AT 84201622 T AT84201622 T AT 84201622T AT E26744 T1 ATE26744 T1 AT E26744T1
Authority
AT
Austria
Prior art keywords
gas supply
elements
supply chamber
helical groove
annular gas
Prior art date
Application number
AT84201622T
Other languages
English (en)
Inventor
W J T H Luijten
J J E Moonen
Original Assignee
Ultra Centrifuge Nederland Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultra Centrifuge Nederland Nv filed Critical Ultra Centrifuge Nederland Nv
Application granted granted Critical
Publication of ATE26744T1 publication Critical patent/ATE26744T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
AT84201622T 1983-11-16 1984-11-08 Molekularpumpe fuer hochvakuum. ATE26744T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8303927A NL8303927A (nl) 1983-11-16 1983-11-16 Hoog-vacuum moleculair pomp.
EP84201622A EP0142208B1 (de) 1983-11-16 1984-11-08 Molekularpumpe für Hochvakuum

Publications (1)

Publication Number Publication Date
ATE26744T1 true ATE26744T1 (de) 1987-05-15

Family

ID=19842719

Family Applications (1)

Application Number Title Priority Date Filing Date
AT84201622T ATE26744T1 (de) 1983-11-16 1984-11-08 Molekularpumpe fuer hochvakuum.

Country Status (8)

Country Link
US (1) US4684317A (de)
EP (1) EP0142208B1 (de)
JP (1) JPS60113091A (de)
AT (1) ATE26744T1 (de)
AU (1) AU565173B2 (de)
CA (1) CA1239912A (de)
DE (1) DE3463289D1 (de)
NL (1) NL8303927A (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3627642C3 (de) * 1985-08-14 1996-03-21 Rikagaku Kenkyusho Vakuumpumpe mit Gewindekanal
FR2611818B1 (fr) * 1987-02-26 1991-04-19 Cit Alcatel Pompe rotative a vide moleculaire du type a canal de gaede
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
WO1989006319A1 (en) * 1987-12-25 1989-07-13 Sholokhov Valery B Molecular vacuum pump
EP0363503B1 (de) * 1988-10-10 1993-11-24 Leybold Aktiengesellschaft Pumpenstufe für eine Hochvakuumpumpe
DE58907244D1 (de) * 1989-07-20 1994-04-21 Leybold Ag Reibungspumpe mit glockenförmigem Rotor.
DE9111278U1 (de) * 1991-09-11 1991-10-24 Fa. Andreas Stihl, 7050 Waiblingen, De
US5514366A (en) * 1993-04-07 1996-05-07 Diamond; Jeffrey H. Dental and oral preparation for smokers for solubilizing and removing tobacco tars as well as onion and garlic essential oils
DE19632874A1 (de) 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Reibungsvakuumpumpe
DE29717079U1 (de) 1997-09-24 1997-11-06 Leybold Vakuum Gmbh Compoundpumpe
US8764424B2 (en) 2010-05-17 2014-07-01 Tuthill Corporation Screw pump with field refurbishment provisions
GB2482861B (en) 2010-07-30 2014-12-17 Hivis Pumps As Pump/motor assembly
JP7015106B2 (ja) 2016-08-30 2022-02-02 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わる回転円筒体

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US940103A (en) * 1909-08-31 1909-11-16 Walther Feld Gas-washer.
DE242084C (de) * 1909-10-23
DE633847C (de) * 1935-03-28 1936-08-07 Siemens Schuckertwerke Akt Ges Schraubenpumpe mit kegelfoermigem Kreisel
US2569563A (en) * 1946-06-10 1951-10-02 Phillips Petroleum Co Centrifugal pump
DE1010235B (de) * 1955-04-22 1957-06-13 Arthur Pfeiffer Fa Molekularpumpe
FR2224009A5 (de) * 1973-03-30 1974-10-25 Cit Alcatel
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.

Also Published As

Publication number Publication date
EP0142208B1 (de) 1987-04-22
AU3542184A (en) 1985-05-23
US4684317A (en) 1987-08-04
AU565173B2 (en) 1987-09-10
DE3463289D1 (en) 1987-05-27
CA1239912A (en) 1988-08-02
EP0142208A1 (de) 1985-05-22
JPS60113091A (ja) 1985-06-19
NL8303927A (nl) 1985-06-17

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee