ATE256874T1 - Optischer wellenleiter mit mehrschichtigem kern und verfahren zu seiner herstellung - Google Patents
Optischer wellenleiter mit mehrschichtigem kern und verfahren zu seiner herstellungInfo
- Publication number
- ATE256874T1 ATE256874T1 AT00964465T AT00964465T ATE256874T1 AT E256874 T1 ATE256874 T1 AT E256874T1 AT 00964465 T AT00964465 T AT 00964465T AT 00964465 T AT00964465 T AT 00964465T AT E256874 T1 ATE256874 T1 AT E256874T1
- Authority
- AT
- Austria
- Prior art keywords
- core
- layer
- optical waveguide
- core optical
- producing same
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12176—Etching
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9923598A GB2355079A (en) | 1999-10-07 | 1999-10-07 | Multi-core waveguide |
PCT/GB2000/003766 WO2001025827A2 (en) | 1999-10-07 | 2000-10-09 | Optical waveguide with a multi-layer core and method of fabrication thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE256874T1 true ATE256874T1 (de) | 2004-01-15 |
Family
ID=10862201
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00964465T ATE256874T1 (de) | 1999-10-07 | 2000-10-09 | Optischer wellenleiter mit mehrschichtigem kern und verfahren zu seiner herstellung |
Country Status (9)
Country | Link |
---|---|
US (1) | US6718109B1 (de) |
EP (1) | EP1218782B1 (de) |
JP (1) | JP2003511714A (de) |
CN (1) | CN1178077C (de) |
AT (1) | ATE256874T1 (de) |
AU (1) | AU7539900A (de) |
DE (1) | DE60007341D1 (de) |
GB (1) | GB2355079A (de) |
WO (1) | WO2001025827A2 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2355079A (en) | 1999-10-07 | 2001-04-11 | Kymata Ltd | Multi-core waveguide |
GB2407394A (en) | 2003-10-23 | 2005-04-27 | Dow Corning Ltd | Optical waveguide with two differently dimensioned waveguiding layers on substrate |
KR100679229B1 (ko) * | 2004-12-09 | 2007-02-05 | 한국전자통신연구원 | 평면형 광도파로 및 그의 제조 방법 |
WO2008018155A1 (fr) * | 2006-08-10 | 2008-02-14 | The Furukawa Electric Co., Ltd. | Fibre optique |
CN101859001B (zh) * | 2010-06-08 | 2012-06-27 | 浙江大学 | 基于硼锗共掺上包层的二氧化硅光波导器件及制备方法 |
AT512498B1 (de) * | 2012-06-06 | 2013-09-15 | Joanneum Res Forschungsgmbh | Opto-chemischer Sensor |
WO2014189599A2 (en) * | 2013-03-14 | 2014-11-27 | Massachusetts Institute Of Technology | Photonic devices and methods of using and making photonic devices |
CN108646345B (zh) * | 2018-05-16 | 2020-04-14 | 德州尧鼎光电科技有限公司 | 一种深紫外平面光波导制作方法 |
CN108427159B (zh) * | 2018-05-16 | 2020-04-14 | 德州尧鼎光电科技有限公司 | 一种深紫外平面光波导 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4425146A (en) | 1979-12-17 | 1984-01-10 | Nippon Telegraph & Telephone Public Corporation | Method of making glass waveguide for optical circuit |
JP2553583B2 (ja) * | 1987-09-02 | 1996-11-13 | 三菱電機株式会社 | 光集積回路用折曲り導波路 |
EP0308602A3 (de) | 1987-09-25 | 1990-01-10 | Siemens Aktiengesellschaft | Vergrabener doppelbrechender optischer Wellenleiter oder Struktur aus solchen Wellenleitern sowie Verfahren zur Herstellung eines solchen Wellenleiters oder einer solchen Struktur |
FR2625333B1 (fr) * | 1987-12-24 | 1993-09-10 | Commissariat Energie Atomique | Procede de fabrication de microguides de lumiere a faibles pertes de propagation optique par depot de multicouches |
JP2585332B2 (ja) | 1987-12-25 | 1997-02-26 | 株式会社日立製作所 | 導波路型光デバイス |
JP2755471B2 (ja) * | 1990-06-29 | 1998-05-20 | 日立電線株式会社 | 希土類元素添加光導波路及びその製造方法 |
US5299276A (en) | 1991-10-11 | 1994-03-29 | Fujitsu Limited | Waveguide type optical device and method for manufacturing the same |
JPH05100123A (ja) | 1991-10-11 | 1993-04-23 | Fujitsu Ltd | 光導波路の製造方法 |
JP2682919B2 (ja) * | 1991-11-07 | 1997-11-26 | 富士通株式会社 | 光導波路及びその製造方法 |
JPH05188231A (ja) * | 1992-01-13 | 1993-07-30 | Sumitomo Electric Ind Ltd | 光導波路の製造方法 |
GB9202463D0 (en) | 1992-02-05 | 1992-03-18 | British Telecomm | Silica waveguide structure |
US5319727A (en) * | 1992-12-28 | 1994-06-07 | Honeywell Inc. | Ion-beam deposited, gain enhanced ring resonators |
US5416884A (en) * | 1993-05-25 | 1995-05-16 | Sharp Kabushiki Kaisha | Semiconductor waveguide structure of a II-VI group compound |
JPH07318734A (ja) | 1994-05-27 | 1995-12-08 | Hitachi Cable Ltd | 石英系ガラス導波路及びその製造方法 |
CA2222145A1 (en) | 1995-06-28 | 1997-01-16 | Akzo Nobel N.V. | At least penta-layered optical device |
JP3425734B2 (ja) * | 1995-07-10 | 2003-07-14 | 日本電信電話株式会社 | 光導波路の製造方法 |
US5563979A (en) * | 1995-08-31 | 1996-10-08 | Lucent Technologies Inc. | Erbium-doped planar optical device |
US5703989A (en) | 1995-12-29 | 1997-12-30 | Lucent Technologies Inc. | Single-mode waveguide structure for optoelectronic integrated circuits and method of making same |
GB2312525A (en) * | 1996-04-24 | 1997-10-29 | Northern Telecom Ltd | Providing cladding on planar optical waveguide by heating to flow |
US6003222A (en) * | 1997-07-10 | 1999-12-21 | Lucent Technologies Inc. | Manufacture of tapered waveguides |
GB2355078A (en) | 1999-10-07 | 2001-04-11 | Kymata Ltd | Waveguide with composite cladding layer |
GB2355079A (en) | 1999-10-07 | 2001-04-11 | Kymata Ltd | Multi-core waveguide |
-
1999
- 1999-10-07 GB GB9923598A patent/GB2355079A/en not_active Withdrawn
-
2000
- 2000-10-09 CN CNB008148937A patent/CN1178077C/zh not_active Expired - Fee Related
- 2000-10-09 AU AU75399/00A patent/AU7539900A/en not_active Abandoned
- 2000-10-09 US US10/110,087 patent/US6718109B1/en not_active Expired - Fee Related
- 2000-10-09 AT AT00964465T patent/ATE256874T1/de not_active IP Right Cessation
- 2000-10-09 WO PCT/GB2000/003766 patent/WO2001025827A2/en active Search and Examination
- 2000-10-09 DE DE60007341T patent/DE60007341D1/de not_active Expired - Lifetime
- 2000-10-09 JP JP2001528733A patent/JP2003511714A/ja active Pending
- 2000-10-09 EP EP00964465A patent/EP1218782B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1218782A2 (de) | 2002-07-03 |
JP2003511714A (ja) | 2003-03-25 |
AU7539900A (en) | 2001-05-10 |
EP1218782B1 (de) | 2003-12-17 |
CN1178077C (zh) | 2004-12-01 |
GB2355079A (en) | 2001-04-11 |
CN1384923A (zh) | 2002-12-11 |
US6718109B1 (en) | 2004-04-06 |
WO2001025827A3 (en) | 2001-08-16 |
DE60007341D1 (de) | 2004-01-29 |
WO2001025827A2 (en) | 2001-04-12 |
GB9923598D0 (en) | 1999-12-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |