ATE247124T1 - Herstellung von metallkomplexen durch komproportionierung - Google Patents
Herstellung von metallkomplexen durch komproportionierungInfo
- Publication number
- ATE247124T1 ATE247124T1 AT00111836T AT00111836T ATE247124T1 AT E247124 T1 ATE247124 T1 AT E247124T1 AT 00111836 T AT00111836 T AT 00111836T AT 00111836 T AT00111836 T AT 00111836T AT E247124 T1 ATE247124 T1 AT E247124T1
- Authority
- AT
- Austria
- Prior art keywords
- metal
- sup
- comproportioning
- production
- metal complexes
- Prior art date
Links
- 230000015572 biosynthetic process Effects 0.000 abstract 4
- 239000003446 ligand Substances 0.000 abstract 4
- 239000002184 metal Substances 0.000 abstract 3
- 239000002243 precursor Substances 0.000 abstract 3
- 238000003786 synthesis reaction Methods 0.000 abstract 3
- 150000002736 metal compounds Chemical class 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
- C07F1/08—Copper compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
- C07F1/005—Compounds containing elements of Groups 1 or 11 of the Periodic Table without C-Metal linkages
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/329,417 US6096913A (en) | 1999-06-10 | 1999-06-10 | Production of metal-ligand complexes |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE247124T1 true ATE247124T1 (de) | 2003-08-15 |
Family
ID=23285285
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00111836T ATE247124T1 (de) | 1999-06-10 | 2000-06-07 | Herstellung von metallkomplexen durch komproportionierung |
Country Status (8)
Country | Link |
---|---|
US (1) | US6096913A (de) |
EP (1) | EP1059295B1 (de) |
JP (2) | JP2001048827A (de) |
KR (1) | KR100379312B1 (de) |
CN (1) | CN1145630C (de) |
AT (1) | ATE247124T1 (de) |
DE (1) | DE60004439T2 (de) |
TW (1) | TWI229675B (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6096913A (en) * | 1999-06-10 | 2000-08-01 | Air Products And Chemicals, Inc. | Production of metal-ligand complexes |
US6391385B1 (en) * | 1999-10-18 | 2002-05-21 | Advanced Technology Materials, Inc. | Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents |
US6340768B1 (en) * | 2000-12-04 | 2002-01-22 | Research Foundation Of State University Of New York | MOCVD precursors based on organometalloid ligands |
KR100807947B1 (ko) * | 2001-01-30 | 2008-02-28 | 삼성전자주식회사 | 비대칭형 β-케토이미네이트 리간드 화합물의 제조방법 |
US6537361B2 (en) | 2001-03-30 | 2003-03-25 | Sharp Laboratories Of America, Inc. | Method of the synthesis and control of PGO spin-coating precursor solutions |
US6534666B1 (en) * | 2001-12-27 | 2003-03-18 | Air Products And Chemicals, Inc. | Use of water and acidic water to purify liquid MOCVD precursors |
JP4529434B2 (ja) * | 2003-12-11 | 2010-08-25 | 東ソー株式会社 | 多置換ビニルシラン化合物を含んで成る銅錯体及び銅錯体組成物 |
US6838573B1 (en) | 2004-01-30 | 2005-01-04 | Air Products And Chemicals, Inc. | Copper CVD precursors with enhanced adhesion properties |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4279874A (en) * | 1980-04-17 | 1981-07-21 | Exxon Research & Engineering Co. | Cu(1) Acetylacetonate complexes for CO separation |
US4385005A (en) * | 1981-07-13 | 1983-05-24 | Exxon Research And Engineering Co. | Process for separating unsaturated hydrocarbons using copper or silver complexes with fluorinated diketonates |
US4425281A (en) * | 1981-07-13 | 1984-01-10 | Exxon Research And Engineering Co. | Copper or silver complexes with fluorinated diketones and unsaturated ligands |
US4434317A (en) * | 1983-05-06 | 1984-02-28 | Exxon Research And Engineering Company | Separation and recovery of unsaturated hydrocarbons by copper (I) complexes |
US4471152A (en) * | 1983-05-06 | 1984-09-11 | Exxon Research And Engineering Co. | Separation of olefin mixtures by Cu (I) complexation |
US5085731A (en) * | 1991-02-04 | 1992-02-04 | Air Products And Chemicals, Inc. | Volatile liquid precursors for the chemical vapor deposition of copper |
JP2622671B2 (ja) * | 1995-03-07 | 1997-06-18 | 株式会社トリケミカル研究所 | 銅のβ−ジケトネート錯体の製造方法 |
US6096913A (en) * | 1999-06-10 | 2000-08-01 | Air Products And Chemicals, Inc. | Production of metal-ligand complexes |
-
1999
- 1999-06-10 US US09/329,417 patent/US6096913A/en not_active Expired - Fee Related
-
2000
- 2000-06-07 DE DE60004439T patent/DE60004439T2/de not_active Expired - Fee Related
- 2000-06-07 EP EP00111836A patent/EP1059295B1/de not_active Expired - Lifetime
- 2000-06-07 AT AT00111836T patent/ATE247124T1/de not_active IP Right Cessation
- 2000-06-08 KR KR10-2000-0031353A patent/KR100379312B1/ko not_active IP Right Cessation
- 2000-06-09 TW TW089111354A patent/TWI229675B/zh not_active IP Right Cessation
- 2000-06-09 JP JP2000179381A patent/JP2001048827A/ja not_active Revoked
- 2000-06-10 CN CNB001192086A patent/CN1145630C/zh not_active Expired - Fee Related
-
2009
- 2009-11-16 JP JP2009261178A patent/JP2010031060A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
TWI229675B (en) | 2005-03-21 |
US6096913A (en) | 2000-08-01 |
CN1277966A (zh) | 2000-12-27 |
DE60004439D1 (de) | 2003-09-18 |
EP1059295A1 (de) | 2000-12-13 |
JP2001048827A (ja) | 2001-02-20 |
KR100379312B1 (ko) | 2003-04-10 |
EP1059295B1 (de) | 2003-08-13 |
KR20010049504A (ko) | 2001-06-15 |
DE60004439T2 (de) | 2004-06-24 |
JP2010031060A (ja) | 2010-02-12 |
CN1145630C (zh) | 2004-04-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |